OCT system with bonded MEMS tunable mirror VCSEL swept source
View Patent ↗A microelectromechanical systems (MEMS)-tunable vertical-cavity surface-emitting laser (VCSEL) in which the MEMS mirror is bonded to the active region. This allows for a separate electrostatic cavity that is outside the laser's optical resonant cavity. Moreover, the use of this cavity configuration allows the MEMS mirror to be tuned by pulling the mirror away from the active region. This reduces the risk of snap down. Moreover, since the MEMS mirror is now bonded to the active region, much wider latitude is available in the technologies that are used to fabricate the MEMS mirror. This is preferably deployed as a swept source in an optical coherence tomography (OCT) system.
1. An integrated VCSEL swept source system, comprising:
an optical bench;
a MEMS tunable VCSEL installed on the optical bench that emits a swept optical signal that propagates parallel to a top surface of the optical bench;
a semiconductor optical amplifier that amplifies the swept optical signal;
wherein the amplified swept optical signal from the semiconductor optical amplifier is returned to propagate through the MEMS tunable VCSEL.
2. A system as claimed in claim 1 , further comprising a polarization beam splitter for directing the amplified swept optical signal from the semiconductor optical amplifier to be coupled into the MEMS tunable VCSEL.