MULTI-AXIS, SINGLE-DRIVE INERTIAL DEVICE

1 . An inertial device, comprising:

a rotational drive configured to oscillate a plurality of accelerometer proof masses and a plurality of gyroscope proof masses about a z axis, each of the gyroscope proof masses able to deflect in two respective directions that are both orthogonal to a respective oscillation direction; and

signal processing circuitry configured for determining:

based on motion of the plurality of accelerometer proof masses, acceleration of the inertial device along an x axis perpendicular to the z axis and along a y axis perpendicular to each of the x and z axes, and

based on motion of the plurality of gyroscope proof masses in the two respective directions, rotation of the inertial device about each of the x, y, and z axes.

2 . The inertial device of claim 1 , further comprising coupling springs and drive springs configured for converting rotational motion from the drive into linear motion of each of the plurality of accelerometer proof masses.

3 . The inertial device of claim 1 , further comprising coupling springs and drive springs configured for converting rotational motion from the drive into linear motion of each of the plurality of gyroscope proof masses.

4 . The inertial device of claim 1 , further comprising time-domain switched (TDS) structures for determining a drive velocity of one or more of the plurality of gyroscope proof masses.

5 . The inertial device of claim 1 , wherein the signal processing circuitry is configured for determining acceleration of the inertial device based on one or more offsets in oscillations of one or more of the plurality of accelerometer proof masses.

6 . (canceled)

7 . The inertial device of claim 1 , further comprising a plurality of analog front ends (AFE), each configured for measuring changes in capacitance between one of the plurality of gyroscope proof masses and an electrode adjacent to the respective gyroscope proof mass.

8 . The inertial device of claim 7 , further comprising a differential amplifier configured for measuring a difference in output between two of the plurality of AFE's, wherein the signal processing circuitry determines rotation of the inertial device based on the difference.

9 . The inertial device of claim 1 , further comprising suspension springs configured for shifting a resonant frequency of one of the plurality of accelerometer proof masses to a lower frequency than a resonant frequency of one of the plurality of gyroscope proof masses.

10 . A method of forming an inertial device, comprising:

forming a plurality of accelerometer proof masses;

forming a plurality of gyroscope proof masses;

forming a rotational drive configured to oscillate the plurality of accelerometer proof masses and the plurality of gyroscope proof masses about a z axis; and

forming coupling springs and drive springs configured for converting rotational motion from the rotational drive into linear motion of the plurality of accelerometer and gyroscope proof masses.

11 . The method of claim 10 , further comprising forming time-domain switched (TDS) structures configured for determining a drive velocity of one or more of the plurality of gyroscope proof masses.

12 . The method of claim 10 , further comprising forming TDS structures for determining an acceleration of one or more of the plurality of accelerometer proof masses.

13 . The method of claim 10 , further comprising forming an electrode adjacent to one or more of the plurality of gyroscope proof masses.

14 . The method of claim 10 , further comprising forming suspension springs configured for shifting a resonant frequency of one of the plurality of accelerometer proof masses to a lower frequency than a resonant frequency of one of the plurality of gyroscope proof masses.

15 . An method of inertial sensing using an inertial device, comprising:

oscillating, with a rotational drive, a plurality of accelerometer proof masses and a plurality of biaxial gyroscope proof masses about a z axis;

determining, based on motion of one or more of the plurality of accelerometer proof masses, acceleration of the inertial device along an x axis perpendicular to the z axis and along a y axis perpendicular to each of the x and z axes; and

determining, based on motion of one or more of the plurality of biaxial gyroscope proof masses in two respective directions that are both orthogonal to respective oscillation directions, rotation of the inertial device about each of the x, y, and z axes.

16 . The method of claim 15 , further comprising determining, using time-domain switched (TDS) structures, a drive velocity of one or more of the plurality of biaxial gyroscope proof masses.

17 . The method of claim 15 , further comprising determining acceleration of the inertial device based on one or more offsets in oscillations of one or more of the plurality of accelerometer proof masses.

18 . (canceled)

19 . The method of claim 15 , further comprising measuring, using a plurality of analog front ends (AFE), changes in capacitance between one of the plurality of biaxial gyroscope proof masses and an electrode adjacent to the one of the plurality of biaxial gyroscope proof masses.

20 . The method of claim 19 , further comprising measuring, using a differential amplifier, a difference in output between two of the plurality of AFE's, wherein determining rotation of the inertial device comprises determining based on the difference.

21 . The inertial device of claim 1 , wherein, for each of the gyroscope proof masses, a first direction of the two directions is along the z axis and a second direction of the two directions is within a plane defined by the x and y axes.

22 . The method of claim 15 , wherein, for each of the biaxial gyroscope proof masses, a first direction of the two directions is along the z axis and a second direction of the two directions is within a plane defined by the x and y axes.