Monolithic visible/IR fused low light level imaging sensor
An imaging array and method for fabricating the same are disclosed. The imaging array includes a semiconductor substrate having a plurality of VIS pixel sensors and a plurality of SWIR readout circuits fabricated therein. An insulating layer is deposited on the semiconductor substrate. The insulating array has wells overlying the SWIR pixel sensors. A plurality of SWIR photodiodes are deposited in the wells. Each SWIR photodiode is located in a corresponding one of the wells and is connected by an electrically conducting path with the SWIR readout circuit underlying the SWIR photodiode. An electrically conducting transparent electrode overlying the SWIR photodiodes is connected to each of the SWIR photodiodes.
1. An imaging array comprising:
a semiconductor substrate having a plurality of VIS pixel sensors and a plurality of SWIR readout circuits fabricated therein;
an insulating layer deposited on said semiconductor substrate having wells overlying said plurality of SWIR readout circuits;
a plurality of SWIR photodiodes, each SWIR photodiode being located in a corresponding one of said wells and being connected by an electrically conducting path with said plurality of SWIR readout circuits underlying said plurality of SWIR photodiodes; and
an electrically conducting transparent electrode overlying said plurality of SWIR photodiodes and being connected to each of said plurality of SWIR photodiodes.
2. The imaging array of claim 1 , wherein said SWIR photodiodes comprise a quantum dot material.
3. The imaging array of claim 1 , wherein said SWIR readout circuit comprises a capacitive transimpedance amplifier with a feedback capacitor having a capacitance that is controlled by a first bias signal, said first bias signal varying in potential during a readout of one of said SWIR photodiodes connected to said SWIR readout circuit.
4. The imaging array of claim 3 , further comprising a bias circuit that applies said first bias signal to said SWIR readout circuits and a second bias signal to said electrically conducting transparent electrode.
5. The imaging array of claim 4 , further comprising a controller that sets said first and second bias signals based on an average of outputs of said capacitive transimpedance amplifiers during a previously recorded image.
6. A method of fabricating an imaging array comprising:
providing a semiconductor substrate having a plurality of VIS pixel sensors and a plurality of SWIR readout circuits fabricated therein;
depositing an insulating layer on said semiconductor substrate, said insulating layer having wells overlying said plurality of SWIR readout circuits;
depositing a plurality of SWIR photodiodes, each of said plurality of SWIR photodiode being located in a corresponding one of said wells and being connected by an electrically conducting path with said STIR readout circuit underlying said SWIR photodiode; and
depositing an electrically conducting transparent electrode overlying said plurality of SWIR photodiodes, said electrically conducting transparent electrode being connected to each of said SWIR photodiodes.