Apparatus for manufacturing template and method for manufacturing template
According to one embodiment, an apparatus for manufacturing a template includes a vacuum chamber, an electrode and an adjustor. The vacuum chamber includes an inlet and an exhaust port of a reactive gas. The vacuum chamber is capable of maintaining an atmosphere depressurized below atmospheric pressure. The electrode is provided in an interior of the vacuum chamber. A high frequency voltage is applied to the electrode. A substrate is placed on the electrode. The substrate has a back surface on a side of the electrode. A recess is provided in the back surface. The adjustor is inserted into the recess. The adjustor is insulative.
1. An apparatus for manufacturing a template, comprising:
a vacuum chamber including an inlet and an exhaust port of a reactive gas, the vacuum chamber being capable of maintaining an atmosphere depressurized below an atmospheric pressure;
an electrode, provided in an interior of the vacuum chamber, for receiving a high frequency voltage to be applied thereto, a substrate to form the template being placed on the electrode, the substrate having a back surface on a side of the electrode, a recess being provided in the back surface;
an adjustor being configured to be inserted into the recess, the adjustor being an insulator; and
a guide plate provided in a peripheral portion of an upper surface of the electrode to guide the substrate, the guide plate being insulative;
wherein
a side surface of the adjustor conforms to an inner surface of the recess.
2. The apparatus according to claim 1 , wherein at least one of the adjustor and the guide plate includes SiO 2 .
3. The apparatus according to claim 1 , wherein at least one of the adjustor and the guide plate includes quartz including TiO 2 .
4. The apparatus according to claim 1 , wherein the guide plate is formed of a same material as the adjustor.
5. The apparatus according to claim 1 , wherein the guide plate has a step-like portion having a difference in levels.
6. The apparatus according to claim 5 , wherein the difference in levels is not less than 0.15 mm and not more than 0.20 mm.
7. The apparatus according to claim 1 , wherein the adjustor is provided in a plurality, and the plurality of adjustors are inserted into the recess.
8. The apparatus according to claim 1 , wherein a configuration of the adjustor when projected onto a plane parallel to an upper surface of the electrode is a dot configuration arranged two-dimensionally in the plane.
9. The apparatus according to claim 1 , further comprising an inductively coupled plasma high frequency coil additionally provided In the vacuum chamber above the electrode.
10. The apparatus according to claim 1 , wherein the reactive gas includes at least one selected from a fluorine-based gas and an oxygen gas.
11. An apparatus for manufacturing a template using a substrate, comprising:
a vacuum chamber including an inlet and an exhaust port of a reactive gas, the vacuum chamber being capable of maintaining an atmosphere depressurized below an atmospheric pressure;
an electrode, provided In an interior of the vacuum chamber, for receiving a high frequency voltage to be applied thereto; and
an adjustor provided on the electrode, the adjustor being an insulator, the adjustor having a constant thickness, the adjustor having an upper surface and a side surface, the upper surface and the side surface being exposed to the interior of the vacuum chamber, the adjustor being configured to be inserted in a recess of the substrate.
12. The apparatus according to claim 11 , wherein the electrode has a first surface contacting the adjustor, and the first surface is wider than the upper surface of the adjustor.
13. The apparatus according to claim 11 , wherein the adjustor has a lower surface, and all region of the lower surface contacts the electrode.
14. The apparatus according to claim 11 , wherein the adjustor is formed of a same material as the substrate.
15. The apparatus according to claim 11 , wherein the adjustor includes SiO 2 .
16. The apparatus according to claim 11 , wherein the adjustor includes quartz including TiO 2 .
17. The apparatus according to claim 11 , further comprising a guide plate provided in a peripheral portion of an upper surface of the electrode to guide the substrate, the guide plate being insulative.
18. The apparatus according to claim 1 , wherein the adjustor is formed of a same material as the substrate.
19. The apparatus according to claim 1 , wherein a configuration of the adjustor has a constant thickness.
20. The apparatus according to claim 1 , wherein the adjustor is directly provided on the electrode.
21. The apparatus according to claim 1 , wherein an upper surface of the adjustor is separated from a bottom surface of the recess.
22. The apparatus according to claim 11 , wherein the adjustor is directly provided on the electrode.
23. The apparatus according to claim 11 , wherein the upper surface of the adjustor is separated from a bottom surface of a substrate placed on the electrode.
24. The apparatus according to claim 1 , wherein the substrate is a single piece.
25. The apparatus according to claim 1 , wherein the adjustor has the same electrical characteristics as the substrate.