Germanium-silicon light sensing apparatus
An image sensor array including a carrier substrate; a first group of photodiodes coupled to the carrier substrate, where the first group of photodiodes include a first photodiode, and where the first photodiode includes a semiconductor layer configured to absorb photons at visible wavelengths and to generate photo-carriers from the absorbed photons; and a second group of photodiodes coupled to the carrier substrate, where the second group of photodiodes include a second photodiode, and where the second photodiode includes a germanium-silicon region fabricated on the semiconductor layer, the germanium-silicon region configured to absorb photons at infrared or near-infrared wavelengths and to generate photo-carriers from the absorbed photons.
1. A method for fabricating an image sensor array having a first group of photodiodes for detecting light at visible wavelengths formed from a first material, and a second group of photodiodes for detecting light at infrared or near-infrared wavelengths formed from a second material different than the first material, the method comprising:
defining pixels of the image sensor array on a semiconductor donor wafer;
forming the first group of photodiodes on the semiconductor donor wafer;
after forming the first group of photodiodes, depositing a dielectric layer on the semiconductor donor wafer;
forming the second group of photodiodes on the semiconductor donor wafer, comprising:
defining, in the dielectric layer, regions for the second group of photodiodes; and
growing a germanium-silicon layer on the regions for the second group of photodiodes;
after growing the germanium-silicon layer, defining a first interconnect layer, wherein the first interconnect layer includes a plurality of interconnects coupled to the first group of photodiodes and the second group of photodiodes;
defining integrated circuitry for controlling the pixels of the image sensor array on a semiconductor carrier wafer;
after defining the integrated circuitry, defining a second interconnect layer on the semiconductor carrier wafer, wherein the second interconnect layer includes a plurality of interconnects coupled to the integrated circuitry; and
bonding the first interconnect layer with the second interconnect layer, such that the first group of photodiodes and the second group of photodiodes are coupled to the integrated circuitry.
2. The method of claim 1 , wherein growing the germanium-silicon layer on the regions for the second group of photodiodes further comprises:
growing the germanium-silicon layer by a selective epitaxial growth, such that the germanium-silicon layer is embedded in the dielectric layer; and
polishing the germanium-silicon layer to planarize the dielectric layer and the germanium-silicon layer.
3. The method of claim 1 , further comprising:
removing at least a portion of the semiconductor donor wafer through polishing.
4. The method of claim 1 , further comprising:
forming lens elements over the image sensor array, wherein each of the lens elements is arranged to guide light to a respective photodiode of the image sensor array, and
forming wavelength filters over the image sensor array, each of the wavelength filters formed for a respective photodiode of the image sensor array.
5. The method of claim 1 , wherein the defining, in the dielectric layer, regions for the second group of photodiodes comprises:
etching the regions for the second group of photodiodes in the dielectric layer.