Measurement method, manufacturing method of device, and measurement system

1. A measurement method comprising:

measuring an amount of overlay shift between a first layer and a second layer using a first overlay mark and a second overlay mark, the first layer being provided as a layer including the first overlay mark above a first substrate, the second layer being provided as a layer including the second overlay mark above the first overlay mark;

acquiring a parameter related to asymmetry of a shape of the second overlay mark; and

obtaining an amount of correction with respect to a measured value of the amount of overlay shift based on the acquired parameter and the measured amount of overlay shift, wherein

the obtaining of the amount of correction includes

obtaining a correlation between the parameter and the measured value of the amount of overlay shift, and

obtaining the amount of correction based on the correlation, the obtaining of the amount of correction based on the correlation includes

extrapolating an amount of overlay shift corresponding to a case in which asymmetry is not present in the correlation, and

taking a difference between the extrapolated amount of overlay shift and the measured amount of overlay shift to obtain the amount of correction,

the obtaining of the correlation includes

obtaining a function of a parameter related to asymmetry and a measured value of an amount of overlay shift based on the acquired parameter and the measured amount of overlay shift with respect to a plurality of process conditions, and

the extrapolating includes obtaining an amount of overlay shift with respect to a value of the parameter corresponding to a case in which asymmetry is not present using the function.

2. The measurement method according to claim 1 , further comprising:

measuring an amount of overlay shift between a third layer and a fourth layer using a third overlay mark and a fourth overlay mark, the third layer being provided as a layer including the third overlay mark above a second substrate and corresponding to the first layer, the fourth layer being provided as a layer including the fourth overlay mark above the third overlay mark and corresponding to the second layer; and

correcting the measured amount of overlay shift between the third layer and the fourth layer using the amount of correction.

3. The measurement method according to claim 1 , wherein

the acquiring of the parameter includes acquiring the parameter by evaluating a planar image of the second overlay mark.

4. The measurement method according to claim 3 , wherein

the acquiring of the parameter includes acquiring, as the parameter, a difference between a first white band width with respect to a first edge of the second overlay mark and a second white band width with respect to a second edge on an opposite side from the first edge of the second overlay mark in the planar image.

5. The measurement method according to claim 3 , wherein

the planar image is an image obtained by imaging the second overlay mark using an electron microscope, and

the amount of overlay shift is measured using an optical microscope.

6. The measurement method according to claim 3 , wherein

the planar image is an image obtained by imaging the second overlay mark using an atomic force microscope, and

the amount of overlay shift is measured using an optical microscope.

7. The measurement method according to claim 1 , wherein

the plurality of process conditions includes a plurality of conditions among which at least one of a baking temperature of a resist on which the second overlay mark is formed, an illumination condition of the resist on which the second overlay mark is formed, and a film thickness of the resist on which the second overlay mark is formed is different.

8. A manufacturing method of a device, comprising:

forming a third layer above a second substrate, the third layer including a third overlay mark;

forming a fourth layer on the third layer, the fourth layer including a fourth overlay mark above the third overlay mark;

measuring an amount of overlay shift between the third layer and the fourth layer using the third overlay mark and the fourth overlay mark;

correcting the measured amount of overlay shift using an amount of correction which is obtained in advance by:

measuring an amount of overlay shift between a first layer and a second layer using a first overlay mark and a second overlay mark, the first layer being provided as a layer including the first overlay mark above a first substrate, the third layer corresponding to the first layer, the second layer being provided as a layer including the second overlay mark above the first overlay mark, the fourth layer corresponding to the second layer,

acquiring an asymmetry parameter with respect to the second overlay mark, the second overlay mark being an edge portion of an opening that exposes the first overlay mark, the asymmetry parameter indicating asymmetry of a cross-sectional shape of a side surface of the second overlay mark, and

obtaining the amount of correction with respect to the measured value of the amount of overlay shift based on the acquired parameter and the measured amount of overlay shift; and

forming a pattern in the third layer with using the fourth layer as a mask,

wherein the obtaining of the amount of correction includes

obtaining a correlation between the parameter and the measured value of the amount of overlay shift, and

obtaining the amount of correction based on the correlation,

the obtaining of the amount of correction based on the correlation includes

extrapolating an amount of overlay shift corresponding to a case in which asymmetry is not present in the correlation, and

taking a difference between the extrapolated amount of overlay shift and the measured amount of overlay shift to obtain the amount of correction, the obtaining of the correlation includes

obtaining a function of a parameter related to asymmetry and a measured value of an amount of overlay shift based on the acquired parameter and the measured amount of overlay shift with respect to a plurality of process conditions, and

the extrapolating includes obtaining an amount of overlay shift with respect to a value of the parameter corresponding to a case in which asymmetry is not present using the function.

9. A measurement system comprising:

a controller that measures an amount of overlay shift between a first layer and a second layer using a first overlay mark and a second overlay mark, the first layer being provided as a layer including the first overlay mark above a first substrate, the second layer being provided as a layer including the second overlay mark above the first overlay mark, acquires a parameter related to asymmetry of a shape of the second overlay mark, and obtains an amount of correction with respect to a measured value of the amount of overlay shift based on the acquired parameter and the measured amount of overlay shift, wherein

the controller obtains a correlation between the parameter and the measured value of the amount of overlay shift, and obtains the amount of correction based on the correlation,

the controller extrapolates an amount of overlay shift corresponding to a case in which asymmetry is not present in the correlation, and takes a difference between the extrapolated amount of overlay shift and the measured amount of overlay shift to obtain the amount of correction, and

the controller obtains a function of a parameter related to asymmetry and a measured value of an amount of overlay shift based on the acquired parameter and the measured amount of overlay shift with respect to a plurality of process conditions, and obtains an amount of overlay shift with respect to a value of the parameter corresponding to a case in which asymmetry is not present using the function.

10. The measurement system according to claim 9 , wherein

the controller measures an amount of overlay shift between a third layer and a fourth layer using a third overlay mark and a fourth overlay mark, the third layer being provided as a layer including the third overlay mark above a second substrate and corresponding to the first layer, the fourth layer being provided as a layer including the fourth overlay mark above the third overlay mark and corresponding to the second layer, and corrects the measured amount of overlay shift between the third layer and the fourth layer using the amount of correction.

11. The measurement system according to claim 9 , wherein

the controller acquires the parameter by evaluating a planar image of the second overlay mark.

12. The measurement system according to claim 11 , wherein

the controller acquires, as the parameter, a difference between a first white band width with respect to a first edge of the second overlay mark and a second white band width with respect to a second edge on an opposite side from the first edge of the second overlay mark in the planar image.

13. The measurement system according to claim 11 , wherein

the controller images the second overlay mark using an electron microscope to acquire the planar image, and images the second overlay mark using an optical microscope to measure the amount of overlay shift.

14. The measurement system according to claim 11 , wherein

the controller images the second overlay mark using an atomic force microscope to get the planar image, and images the second overlay mark using an optical microscope to measure the amount of overlay shift.