SEMICONDUCTOR MANUFACTURING APPARATUS

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Quick Facts

Patent No.: US None
App. No.: 15/265,003

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Abstract

A semiconductor manufacturing apparatus includes a reactor, a first electrode, a second electrode, and a first member. The reactor can accommodate a semiconductor substrate therein. The first electrode can place the semiconductor substrate thereon. The second electrode is opposed to the first electrode. The first member supplies alternating-current power to the second electrode. The first member includes a conductor that is arranged on an outer circumferential surface or at an outer peripheral edge of the second electrode and that has an input/output end for the alternating-current power and a plurality of contacts with respect to the outer circumferential surface or the outer peripheral edge. The first member includes a plurality of passive elements each having a first input/output end and a second input/output end for the alternating-current power, where the first input/output end and the second input/output end are connected to different positions of the conductor.

Claims (42)

1 . A Semiconductor manufacturing apparatus comprising:

a reactor capable of accommodating a semiconductor substrate therein;

a first electrode arranged in the reactor and can place the semiconductor substrate thereon;

a second electrode opposed to the first electrode in the reactor; and

a first member supplying alternating-current power to the second electrode, and including a conductor that is arranged on an outer circumferential surface or at an outer peripheral edge of the second electrode and has an input/output end for the alternating-current power and a plurality of contacts with respect to the outer circumferential surface or the outer peripheral edge, and a plurality of passive elements each having a first input/output end and a second input/output end for the alternating-current power, where the first input/output end and the second input/output end are connected to different positions of the conductor.

2 . The apparatus of claim 1 , wherein the passive elements each have an impedance that is individually variable.

3 . The apparatus of claim 1 , wherein the first member supplies alternating-current power of a single frequency to the second electrode in order to generate plasma between the first electrode and the second electrode.

4 . The apparatus of claim 2 , wherein the first member supplies alternating-current power of a single frequency to the second electrode in order to generate plasma between the first electrode and the second electrode.

5 . The apparatus of claim 2 , wherein the passive elements include a capacitor of which a capacitance is variable.

6 . The apparatus of claim 4 , wherein the passive elements include a capacitor of which a capacitance is variable.

7 . The apparatus of claim 2 , wherein the passive elements include an inductor of which an inductance is variable.

8 . The apparatus of claim 4 , wherein the passive elements include an inductor of which an inductance is variable.

9 . The apparatus of claim 2 , further comprising a setting device that sets impedances of the passive elements in such a manner that a combined impedance between the input/output end and a first one of the contacts and a combined impedance between the input/output end and a second one of the contacts are equal.

10 . The apparatus of claim 4 , further comprising a setting device that sets impedances of the passive elements in such a manner that a combined impedance between the input/output end and a first one of the contacts and a combined impedance between the input/output end and a second one of the contacts are equal.

11 . The apparatus of claim 5 , further comprising a setting device that sets impedances of the passive elements in such a manner that a combined impedance between the input/output end and a first one of the contacts and a combined impedance between the input/output end and a second one of the contacts are equal.

12 . The apparatus of claim 6 , further comprising a setting device that sets impedances of the passive elements in such a manner that a combined impedance between the input/output end and a first one of the contacts and a combined impedance between the input/output end and a second one of the contacts are equal.

13 . The apparatus of claim 7 , further comprising a setting device that sets impedances of the passive elements in such a manner that a combined impedance between the input/output end and a first one of the contacts and a combined impedance between the input/output end and a second one of the contacts are equal.

14 . The apparatus of claim 8 , further comprising a setting device that sets impedances of the passive elements in such a manner that a combined impedance between the input/output end and a first one of the contacts and a combined impedance between the input/output end and a second one of the contacts are equal.

15 . The apparatus of claim 1 , wherein

the conductor branches into a plurality of branching portions extending from a position near the input/output end to a plurality of positions on the outer circumferential surface or the outer peripheral edge, respectively,