IP Library Granted Patent US 9,806,082
Granted Patent B2
US 9,806,082 · App. 15/266,798 · Granted Oct 31, 2017

Semiconductor memory device including a sense amplifier on a semiconductor substrate, a memory cell including a capacitor and a transistor including conductive lines electrically connected to the sense amplifier

Inventors: Chika Tanaka (Yokohama, JP); Keiji Ikeda (Kawasaki, JP); Yoshihiro Ueda (Yokohama, JP); Toshinori Numata (Kamakura, JP); Tsutomu Tezuka (Yokohama, JP)
Assignee: TOSHIBA MEMORY CORPORATION
H01L27/10897G11C11/408G11C11/4091H01L27/0688H01L27/1082H01L27/10808H01L29/24H01L29/7827G11C11/404G11C11/405
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Quick Facts
Patent No.
US 9,806,082
App. No.
15/266,798
Granted
Oct 31, 2017
Kind
B2
Abstract

According to one embodiment, a semiconductor memory device includes a sense amplifier on a semiconductor substrate, a memory cell array including a memory cell above the sense amplifier, the memory cell including a capacitor and a first transistor, the capacitor including a first electrode and a second electrode, the first transistor including a first current path and a first control electrode controlling an on/off of the first current path, the first current path including a first terminal and a second terminal, the first terminal being electrically connected to the first electrode, and a first conductive line electrically connected to the second terminal and extending along an upper surface of the semiconductor substrate in a first direction, the first conductive line being electrically connected to the sense amplifier.

Claims (42)

1. A semiconductor memory device comprising:

a semiconductor substrate;

a sense amplifier on the semiconductor substrate;

a memory cell array including a memory cell above the sense amplifier, the memory cell including a capacitor and a first transistor, the capacitor including a first electrode and a second electrode, the first transistor including a first current path and a first control electrode controlling an on/off of the first current path, the first current path including a first terminal and a second terminal, the first terminal being electrically connected to the first electrode;

a first conductive line electrically connected to the second terminal and extending along an upper surface of the semiconductor substrate in a first direction, the first conductive line being electrically connected to the sense amplifier;

a second transistor including a second current path and a second control electrode controlling an on/off of the second current path, the second current path including a third terminal and a fourth terminal, and the third terminal being electrically connected to the first conductive line; and

a second conductive line electrically connected to the fourth terminal,

wherein the second current path is provided between the first and second conductive lines, the second conductive line is electrically connected to a power source having a predetermined potential, and the first conductive line is set to the predetermined potential by turning on the second current path,

wherein the second transistor is disposed above the sense amplifier and apart from the semiconductor substrate, and

wherein the first current path comprises a first semiconductor layer, and the second current path comprises a second semiconductor layer.

2. The device of claim 1 , wherein

the first and second semiconductor layers are oxide semiconductor layers.

3. The device of claim 2 , wherein

each of the oxide semiconductor layers includes indium oxide, gallium oxide and zinc oxide.

4. The device of claim 1 , wherein

the first and second semiconductor layers are semiconductor pillars.

5. The device of claim 1 , further comprising:

a selector on the semiconductor substrate, the selector being electrically connected between the first conductive line and the sense amplifier.

6. The device of claim 1 , wherein

the second electrode is a part of a plate electrode covering the memory cell array.

7. The device of claim 1 , wherein

the second electrode is set to a fixed potential.

8. The device of claim 1 , wherein

the first conductive line is set to the predetermined potential in a read operation.

9. The device of claim 1 , wherein

the second conductive line extends along the upper surface of the semiconductor substrate in a second direction crossing the first direction.

10. The device of claim 1 , wherein

the sense amplifier is disposed directly under the memory cell array.

11. The device of claim 1 , wherein

the first current path comprises the first semiconductor layer between the capacitor and the first conductive line.

12. The device of claim 1 , wherein

the first current path extends in a direction crossing the upper surface of the semiconductor substrate.

13. The device of claim 1 , wherein

the second current path extends in a direction crossing the upper surface of the semiconductor substrate.

14. The device of claim 1 , wherein

the second transistor is disposed side by side with the first transistor in the first direction.

15. The device of claim 1 , wherein

the second current path extends along the upper surface of the semiconductor substrate.

16. The device of claim 1 , wherein

the first transistor is disposed above the capacitor.

17. The device of claim 1 , wherein

the capacitor is disposed above the first transistor.

Assignments (5)
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 22, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043620/0798 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 22, 2017
From: TANAKA, CHIKA; IKEDA, KEIJI; UEDA, YOSHIHIRO; NUMATA, TOSHINORI; TEZUKA, TSUTOMU
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 041329/0558 →
Priority Claims (1)
JP 2016-052348 · Mar 16, 2016 · national
Continuity (1)
Related Publication 20170271341A1 · Sep 21, 2017