Semiconductor device and method for manufacturing the same
A semiconductor device according to an embodiment, includes a stacked body, a plurality of first terraces, a second terrace, a plurality of interconnects, a plurality of conductive bodies. The stacked body includes a plurality of electrode layers. The stacked body includes a stairstep portion at an end portion of the stacked body. The plurality of first terraces are provided in the stairstep portion. The second terrace is provided in the stairstep portion. The plurality of interconnects are provided from the second terrace to the plurality of first terraces. The plurality of interconnects contact one of the plurality of electrode layers at the stairstep portion. The plurality of conductive bodies are provided above the second terrace. The plurality of conductive bodies extend in a stacking direction of the stacked body. The conductive bodies contact the interconnects above the second terrace.
1. A semiconductor device, comprising:
a stacked body including a plurality of electrode layers, the plurality of electrode layers being stacked with an insulating body interposed, the stacked body including a stairstep portion at an end portion of the stacked body;
a plurality of first terraces provided in the stairstep portion, steps of the first terraces extending in a first direction;
a second terrace provided in the stairstep portion, a second terrace width of the second terrace being wider than a first terrace width of the first terrace, the first and second terrace widths being aligned with a second direction crossing the first direction;
a plurality of interconnects provided from the second terrace to the plurality of first terraces, the plurality of interconnects contacting one of the plurality of electrode layers at the stairstep portion, portions where the interconnects and the electrode layers are in contact being aligned with a plane crossing an upper surface of the second terrace; and
a plurality of conductive bodies provided above the second terrace, the plurality of conductive bodies extending in a stacking direction of the stacked body, the conductive bodies contacting the interconnects above the second terrace.
2. The semiconductor device according to claim 1 , wherein a structure body including the plurality of first terraces and the second terrace is provided repeatedly in the stairstep portion.
3. The semiconductor device according to claim 1 , further comprising a plurality of insulating films provided on the plurality of first terraces and on the second terrace, the insulating films covering side surfaces of the electrode layers,
the insulating films having exposed regions where the side surfaces of the electrode layers are exposed.
4. The semiconductor device according to claim 3 , wherein the interconnects contact the electrode layers via the exposed regions.
5. The semiconductor device according to claim 3 , wherein
the exposed regions are provided respectively at the first terraces and the second terrace, and
the exposed regions provided at the first terraces and the second terrace are arranged in an oblique direction with respect to the first direction when viewed in plan.
6. The semiconductor device according to claim 5 , wherein side walls of the insulating films in the exposed regions are aligned with the oblique direction when viewed in plan.
7. The semiconductor device according to claim 5 , wherein
the relationship
tan θ= B/A
is satisfied, where θ is an angle between the first direction and the oblique direction, A is an arrangement pitch of the interconnects, and B is the first terrace width.
8. The semiconductor device according to claim 1 , further comprising:
a plurality of first insulating portions provided along the second direction inside the stacked body; and
at least one second insulating portion interposed between the first insulating portions and provided along the second direction inside the stacked body, a length in the second direction of the second insulating portion being shorter than the first insulating portions, the second insulating portion dividing, along the second direction, at least one layer of the electrode layers in the upper layers of the plurality of electrode layers, the second insulating portion not dividing the remaining electrode layers.
9. The semiconductor device according to claim 1 , wherein the plurality of conductive bodies is disposed in a staggered configuration above the second terrace when viewed in plan.
10. The semiconductor device according to claim 2 , wherein
structure bodies including a first structure body and a second structure body are provided in the stairstep portion, and
the interconnects included in the first structure body are disposed to correspond to spaces extending in the second direction between the interconnect and the interconnect included in the second structure body when viewed in plan.
11. The semiconductor device according to claim 1 , further comprising:
a semiconductor body provided inside the stacked body and extending in the stacking direction of the stacked body, and
a charge storage unit provided between the semiconductor body and the electrode layers.
12. A semiconductor device, comprising:
a stacked body including a plurality of electrode layers, the plurality of electrode layers being stacked with an insulating body interposed, the stacked body including a stairstep portion at an end portion of the stacked body;
a plurality of terraces provided in the stairstep portion;
a plurality of insulating films provided on the plurality of terraces and covering side surfaces of the electrode layers, the insulating films having exposed regions where the side surfaces of the electrode layers are exposed; and
a plurality of interconnects provided to straddle at least two of the plurality of terraces, the plurality of interconnects contacting the electrode layers via the exposed regions.
13. The semiconductor device according to claim 12 , wherein
the exposed regions are provided respectively at the plurality of terraces, and
the exposed regions are arranged in an oblique direction with respect to a first direction, steps of the terraces extend in the first direction when viewed in plan.
14. The semiconductor device according to claim 13 , wherein side walls of the insulating films in the exposed regions are aligned with the oblique direction when viewed in plan.
15. The semiconductor device according to claim 13 , wherein
the relationship
tan θ= B/A
is satisfied, where θ is an angle between the first direction and the oblique direction, A is an arrangement pitch of the interconnects, and B is a terrace width along a second direction of the terrace, the second direction crossing the first direction.
16. The semiconductor device according to claim 12 , further comprising:
a semiconductor body provided inside the stacked body and extending in the stacking direction of the stacked body, and
a charge storage unit provided between the semiconductor body and one of the electrode layers.
17. A method for manufacturing a semiconductor device, comprising:
forming a stacked body including a plurality of electrode layers, the plurality of electrode layers being stacked with an insulating body interposed;
forming a stairstep portion in an end portion of the stacked body, the stairstep portion including a plurality of first terraces and a second terrace, steps of the first terraces extending in the first direction, a second terrace width of the second terrace being wider than a first terrace width of the first terrace, the first and second terrace widths being aligned with a second direction crossing the first direction;
forming a plurality of insulating films on the plurality of first terraces and on the second terrace to cover side surfaces of the plurality of electrode layers;
forming, in the insulating films, exposed regions where the side surfaces of the electrode layers are exposed;
forming a plurality of interconnects from the second terrace to the plurality of first terraces, the plurality of interconnects contacting the electrode layers via the exposed regions; and
forming a plurality of conductive bodies above the second terrace, the plurality of conductive bodies respectively contacting the plurality of interconnects.
18. The method for manufacturing the semiconductor device according to claim 17 , wherein the exposed regions are formed using a mask material having a hole extending in an oblique direction with respect to the first direction when viewed in plan.
19. The method for manufacturing the semiconductor device according to claim 18 , wherein
the relationship
tan θ= B/A
is satisfied, where θ is an angle between the first direction and the oblique direction, A is an arrangement pitch of the interconnects, and B is the first terrace width.
20. The method for manufacturing the semiconductor device according to claim 17 , further comprising:
forming a hole inside the stacked body, the hole extending in a stacking direction of the stacked body;
forming a memory film inside the hole, the memory film including a charge storage unit corresponding to the electrode layers; and
forming a semiconductor body inside the hole after forming the memory film.