Microscope apparatus, automatic focusing device, and automatic focusing method
A microscope apparatus includes an objective and an automatic focusing device. The automatic focusing device is an automatic focusing device of an active type that irradiates a specimen with automatic focusing light via the objective, and the automatic focusing device is configured in such away that an illumination light axis of the automatic focusing light passes through a position distant from an optical axis of the objective.
1. A microscope apparatus comprising:
an objective;
an automatic focusing device of an active type that irradiates a specimen with automatic focusing light via the objective, the automatic focusing device being configured in such a way that an illumination light axis of the automatic focusing light passes through a position offset from an optical axis of the objective; and
an adjustment mechanism that moves the illumination light axis of the automatic focusing light in a direction orthogonal to the optical axis of the objective while keeping the illumination light axis of the automatic focusing light parallel to the optical axis of the objective,
wherein the adjustment mechanism changes a position of the illumination light axis of the automatic focusing light in accordance with a type of the objective which is being used for observation.
2. The microscope apparatus according to claim 1 , wherein the adjustment mechanism moves the automatic focusing device in a prescribed direction with respect to the optical axis of the objective.
3. The microscope apparatus according to claim 1 , wherein the automatic focusing device includes a deflection element that deflects the automatic focusing light toward the objective, and the adjustment mechanism moves the deflection element in a prescribed direction with respect to the optical axis of the objective.
4. The microscope apparatus according to claim 3 , wherein the prescribed direction is the direction orthogonal to the optical axis of the objective.
5. The microscope apparatus according to claim 1 , wherein the automatic focusing device includes a shifter that moves the automatic focusing light, and the adjustment mechanism changes an angle of the automatic focusing light incident on the shifter.
6. The microscope apparatus according to claim 1 , wherein the automatic focusing device includes an offset lens that moves a condensing position of the automatic focusing light in a direction of the optical axis of the objective, and the adjustment mechanism moves the illumination light axis in a prescribed direction with respect to the optical axis of the objective in accordance with a position of the offset lens.
7. The microscope apparatus according to claim 1 , wherein the automatic focusing device includes a variable aperture diaphragm that changes a beam diameter of the automatic focusing light.
8. The microscope apparatus according to claim 1 , wherein the automatic focusing device includes:
a photodetector that detects the automatic focusing light reflected by the specimen;
an optical system that condenses the automatic focusing light reflected by the specimen onto the photodetector; and
a light shielding member that is arranged between the optical system and the photodetector, and in which an aperture is formed.
9. The microscope apparatus according to claim 8 , wherein the light shielding member is a variable aperture diaphragm that freely changes a diameter of the aperture.
10. The microscope apparatus according to claim 8 , wherein the light shielding member is movably arranged along an optical axis of the optical system.
11. The microscope apparatus according to claim 1 , further comprising a revolver configured to accommodate a plurality of objectives.
12. A microscope apparatus comprising:
an objective;
an automatic focusing device of an active type that irradiates a specimen with automatic focusing light via the objective, the automatic focusing device being configured in such a way that an illumination light axis of the automatic focusing light passes through a position offset from an optical axis of the objective; and
an adjustment mechanism that moves the illumination light axis of the automatic focusing light in a direction orthogonal to the optical axis of the objective while keeping the illumination light axis of the automatic focusing light parallel to the optical axis of the objective,
wherein the adjustment mechanism moves the automatic focusing device in a prescribed direction with respect to the optical axis of the objective.