Semiconductor memory device and method of manufacturing semiconductor memory device
A semiconductor memory device includes a substrate having a memory region and a peripheral region that are adjacent to each other, and a plurality of insulating layers and a plurality of wiring layers that are alternately formed on the memory region and the peripheral region of the substrate. On the memory region, the insulating layers and the wiring layers are alternately formed along a thickness direction of the memory device. On the peripheral region, first portions of the insulating layers and first portions of the wiring layers are alternately formed along the thickness direction and second portions of the insulating layers and second portions of the wiring layers are alternately formed along a lateral direction. A width of the second portion of each of the wiring layers in the lateral direction is greater than a thickness of the first portion of the wiring layer.
1. A semiconductor memory device comprising:
a substrate having a memory region and a peripheral region that are adjacent to each other; and
a plurality of insulating layers and a plurality of wiring layers that are alternately formed on the memory region and the peripheral region of the substrate, wherein
on the memory region, the insulating layers and the wiring layers are alternately formed along a thickness direction of the memory device,
on the peripheral region, first portions of the insulating layers and first portions of the wiring layers are alternately formed along the thickness direction and second portions of the insulating layers and second portions of the wiring layers are alternately formed along a lateral direction, and
a width of the second portion of each of the wiring layers in the lateral direction is greater than a thickness of the first portion thereof.
2. The semiconductor memory device according to claim 1 , wherein
a width of the second portion of each of the insulating layers in the lateral direction is greater than a thickness of the first portion thereof.
3. The semiconductor memory device according to claim 2 , wherein
thicknesses of the first portions of the wiring layers are uniform, and
thicknesses of the first portions of the insulating layers are uniform.
4. The semiconductor memory device according to claim 3 , wherein
widths of the second portions of the wiring layers are uniform, and
widths of the second portions of the insulating layers are uniform.
5. The semiconductor memory device according to claim 3 , wherein
widths of the second portions of the wiring layers become wider as a distance from the memory region increases, and
widths of the second portions of the insulating layers become wider as a distance from the memory region increases.
6. The semiconductor memory device according to claim 3 , wherein
widths of the second portions of the wiring layers are uniform, and
widths of the second portions of the insulating layers become wider as a distance from the memory region increases.
7. The semiconductor memory device according to claim 3 , wherein
widths of the second portions of the wiring layers become wider as a distance from the memory region increases, and
widths of the second portions of the insulating layers are uniform.
8. The semiconductor memory device according to claim 3 , wherein
widths of the second portions of the wiring layers are uniform, and
widths of the second portions of the insulating layers become narrower as a distance from the memory region increases.
9. The semiconductor memory device according to claim 3 , wherein
widths of the second portions of the wiring layers become wider as a distance from the memory region increases, and
widths of the second portions of the insulating layers become narrower as a distance from the memory region increases.
10. The semiconductor memory device according to claim 3 , wherein
the plurality of wiring layers includes a source-side selection gate line, a drain-side selection gate line, and a plurality of word lines formed between the source-side selection gate line and the drain-side selection gate line.
11. The semiconductor memory device according to claim 10 , wherein
a width of the second portion of an insulating layer formed between the source-side selection gate line and a word line closest thereto is wider than a width of the second portion of each insulating layer formed between two adjacent word lines.
12. The semiconductor memory device according to claim 10 , wherein
a width of the second portion of an insulating layer formed between the drain-side selection gate line and a word line closest thereto is wider than a width of the second portion of each insulating layer formed between two adjacent word lines.
13. A semiconductor memory device comprising:
a substrate having a memory region and a peripheral region that are adjacent to each other; and
a plurality of insulating layers and a plurality of wiring layers that are alternately formed on the memory region and the peripheral region of the substrate, wherein
on the memory region, the insulating layers and the wiring layers are alternately formed along a thickness direction of the memory device,
on the peripheral region, first portions of the insulating layers and first portions of the wiring layers are alternately formed along the thickness direction and second portions of the insulating layers and second portions of the wiring layers are alternately formed along a lateral direction, and
a width of the second portion of each of the insulating layers in the lateral direction is greater than a thickness of the first portion thereof.
14. The semiconductor memory device according to claim 13 , wherein
thicknesses of the first portions of the wiring layers are uniform, and
thicknesses of the first portions of the insulating layers are uniform.
15. The semiconductor memory device according to claim 14 , wherein
widths of the second portions of the wiring layers are uniform, and
widths of the second portions of the insulating layers are uniform.
16. The semiconductor memory device according to claim 14 , wherein
widths of the second portions of the wiring layers become wider as a distance from the memory region increases, and
widths of the second portions of the insulating layers become wider as a distance from the memory region increases.
17. The semiconductor memory device according to claim 14 , wherein
widths of the second portions of the wiring layers are uniform, and
widths of the second portions of the insulating layers become wider as a distance from the memory region increases.
18. The semiconductor memory device according to claim 14 , wherein
widths of the second portions of the wiring layers become wider as a distance from the memory region increases, and
widths of the second portions of the insulating layers are uniform.
19. The semiconductor memory device according to claim 14 , wherein
widths of the second portions of the wiring layers become wider as a distance from the memory region increases, and
widths of the second portions of the insulating layers become narrower as a distance from the memory region increases.