IP Library Granted Patent US 10,388,684
Granted Patent B2
US 10,388,684 · App. 15/285,197 · Granted Aug 20, 2019

Image sensor packages formed using temporary protection layers and related methods

Inventors: Larry Duane Kinsman (Boise, ID); Swarnal Borthakur (Boise, ID); Marc Allen Sulfridge (Boise, ID); Scott Donald Churchwell (Meridian, ID); Brian Vaartstra (Nampa, ID)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L27/14621H01L27/1462H01L27/14618H01L27/14623H01L27/14627H01L27/14632H01L27/14685H01L27/14687
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Quick Facts
Patent No.
US 10,388,684
App. No.
15/285,197
Granted
Aug 20, 2019
Kind
B2
Abstract

An image sensor package may include a semiconductor wafer having a pixel array, a color filter array (CFA) formed over the pixel array, and one or more lenses formed over the CFA. A light block layer may couple over the semiconductor wafer around a perimeter of the lenses and an encapsulation layer may be coupled around the perimeter of the lenses and over the light block layer. The light block layer may form an opening providing access to the lenses. A mold compound layer may be coupled over the encapsulation layer and the light block layer. A temporary protection layer may be used to protect the one or more lenses from contamination during application of the mold compound and/or during processes occurring outside of a cleanroom environment.

Claims (38)

1. An image sensor package, comprising:

a semiconductor wafer comprising a pixel array;

a color filter array (CFA) formed over the pixel array;

one or more lenses formed over the CFA;

a light block layer coupled over the semiconductor wafer around a perimeter of the one or more lenses;

an encapsulation layer coupled around the perimeter of the one or more lenses and over the light block layer, the light block layer forming an opening providing access to the one or more lenses, and;

a mold compound layer coupled over the encapsulation layer and over the light block layer;

wherein a height of the encapsulation layer perpendicular to a largest planar surface of the semiconductor wafer is configured to prevent a temporary protection layer, applied over the one or more lenses before applying the mold compound layer, from depositing over the encapsulation layer.

2. The package of claim 1 , wherein the encapsulation layer is comprised between the mold compound layer and the one or more lenses.

3. The package of claim 1 , further comprising a transparent cover coupled over the one or more lenses and at least partially defining a cavity between the transparent cover and the one or more lenses.

4. The package of claim 1 , wherein the height of the encapsulation layer perpendicular to the largest planar surface of the semiconductor wafer is at least 10 microns.

5. The package of claim 1 , wherein the mold compound layer contacts the encapsulation layer.

6. The package of claim 1 , further comprising an antireflective coating (ARC) layer coupled over the one or more lenses.

7. The package of claim 6 , wherein the mold compound layer contacts the ARC layer.

8. The package of claim 1 , wherein the light block layer comprises a height perpendicular to the largest planar surface of the semiconductor wafer of at least 3 microns.

9. An image sensor package, comprising:

a semiconductor wafer comprising a pixel array;

a color filter array (CFA) formed over the pixel array;

one or more lenses formed over the CFA;

a light block layer coupled over the semiconductor wafer around a perimeter of the one or more lenses;

an encapsulation layer coupled around the perimeter of the one or more lenses and over the light block layer;

a dam structure coupled at an edge of the encapsulation layer, and;

a mold compound layer coupled over the encapsulation layer, coupled over the light block layer, and coupled against the dam structure;

wherein a height of the dam structure perpendicular to a largest planar surface of the semiconductor wafer is configured to prevent a temporary protection layer, applied over the one or more lenses before applying the mold compound layer, from depositing over the encapsulation layer.

10. The package of claim 9 , wherein phobicity of the dam structure relative to the temporary protection layer prevents the temporary protection layer from crossing a face of the dam structure that faces the one or more lenses.

11. The package of claim 9 , wherein the height of the dam structure perpendicular to the largest planar surface of the semiconductor wafer is greater than a height of the encapsulation layer perpendicular to the largest planar surface of the semiconductor wafer.

12. The package of claim 9 , wherein the mold compound layer contacts the encapsulation layer.

13. An image sensor package, comprising:

a semiconductor wafer comprising one or more lenses;

an encapsulation layer coupled around a perimeter of the one or more lenses, and;

a mold compound layer coupled over the encapsulation layer;

wherein a height of the encapsulation layer perpendicular to a largest planar surface of the semiconductor wafer is configured to prevent a temporary protection layer, applied over the one or more lenses before applying the mold compound layer, from depositing over the encapsulation layer.

14. The package of claim 13 , wherein the encapsulation layer is comprised between the mold compound layer and the one or more lenses.

15. The package of claim 13 , further comprising a transparent cover coupled over the one or more lenses and at least partially defining a cavity between the transparent cover and the one or more lenses.

16. The package of claim 13 , wherein the height of the encapsulation layer perpendicular to the largest planar surface of the semiconductor wafer is at least 10 microns.

17. The package of claim 13 , wherein the mold compound layer contacts the encapsulation layer.

18. The package of claim 13 , further comprising an antireflective coating (ARC) layer coupled over the one or more lenses.

19. The package of claim 18 , wherein the mold compound layer contacts the ARC layer.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 054090, FRAME 0617 Recorded Jun 23, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064081/0167 →
SECURITY INTEREST Recorded Oct 16, 2020
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION; ON SEMICONDUCTOR CONNECTIVITY SOLUTIONS, INC.
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 054090/0617 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 4, 2016
From: KINSMAN, LARRY DUANE; BORTHAKUR, SWARNAL; SULFRIDGE, MARC ALLEN; CHURCHWELL, SCOTT DONALD; VAARTSTRA, BRIAN
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 039935/0539 →
Continuity (1)
Related Publication 20180097028A1 · Apr 5, 2018