Method of selectively transferring semiconductor device
A semiconductor device comprises a substrate, a first semiconductor unit on the substrate, and an first adhesion structure between the substrate and the first semiconductor unit, and directly contacting the first semiconductor unit and the substrate, wherein the first adhesion structure comprises an adhesion layer and a sacrificial layer, and the adhesion layer and the sacrificial layer are made of different materials, and wherein an adhesion between the first semiconductor unit and the adhesion layer is different from that between the first semiconductor unit and the sacrificial layer.
1. A semiconductor device, comprising:
a substrate;
a first semiconductor unit on the substrate; and
a first adhesion structure between the substrate and the first semiconductor unit,
wherein the first adhesion structure comprises an adhesion layer and a sacrificial layer, the adhesion layer directly contacts the first semiconductor unit with a first area, the sacrificial layer directly contacts the first semiconductor unit with a second area, the first area is larger than the second area.
2. The semiconductor device according to claim 1 , wherein an adhesion between the adhesion layer and the first semiconductor unit is larger than an adhesion between the sacrificial layer and the first semiconductor unit.
3. The semiconductor device according to claim 1 , wherein the substrate only contacts the adhesion layer.
4. The semiconductor device according to claim 1 , wherein the first semiconductor unit has a lower surface contacting the sacrificial layer, and the sacrificial layer comprises a pattern and exposes a portion of the lower surface.
5. The semiconductor device according to claim 1 , wherein the adhesion layer comprises BCB.
6. The semiconductor device according to claim 1 , wherein the sacrificial layer comprises SiO x or SiN x .
7. The semiconductor device according to claim 1 , wherein a thickness of the first adhesion structure is between 1 μm and 10 μm.
8. The semiconductor device according to claim 1 , wherein the substrate comprises sapphire, diamond, glass, quartz, acryl, ZnO, LiAlO 2 , ceramics, GaAs, SiC, GaN, AlN, metal, EPS tape or Si.
9. The semiconductor device according to claim 1 , wherein the first semiconductor unit comprises a semiconductor epitaxial stack.
10. The semiconductor device according to claim 9 , wherein the semiconductor epitaxial stack comprises a p-type semiconductor, a n-type semiconductor and a converting unit arranged between the p-type semiconductor and the n-type semiconductor.
11. The semiconductor device according to claim 10 , wherein the converting unit is made of aluminum gallium indium phosphide (AlGaInP) series or aluminum gallium indium nitride (AlGaInN) series.
12. The semiconductor device according to claim 9 , wherein the semiconductor epitaxial stack comprises an upper surface arranged on a side opposite to the substrate, the upper surface is exposed.
13. The semiconductor device according to claim 1 , wherein the sacrificial layer comprises UV dissociated material or thermoplastic material.
14. The semiconductor device according to claim 1 , further comprising a second semiconductor unit on the substrate, wherein the second semiconductor unit and the first semiconductor unit are separated to each other, and comprise a same structure, a same material composition, or both.
15. The semiconductor device according to claim 14 , further comprising an interval between the second semiconductor unit and the first semiconductor unit, and the interval is between 1 μm and 10 μm.
16. The semiconductor device according to claim 14 , further comprising a second adhesion structure between the second semiconductor unit and the substrate, wherein the second adhesion structure and the first adhesion structure comprise a same structure, a same material composition, or both.
17. The semiconductor device according to claim 1 , wherein the adhesion layer and the sacrificial layer are made of different materials.
18. The semiconductor device according to claim 1 , wherein the substrate contacts the sacrificial layer and the adhesion layer.
19. The semiconductor device according to claim 1 , wherein the sacrificial layer and the adhesion layer have different cross sectional shapes.