Ultrasonic transducer chip assembly, ultrasound probe, ultrasonic imaging system and ultrasound assembly and probe manufacturing methods
Disclosed is an ultrasonic transducer assembly comprising an ultrasonic transducer chip ( 100 ) having a main surface comprising a plurality of ultrasound transducer elements ( 112 ) and a plurality of first contacts ( 120 ) for connecting to said ultrasound transducer elements; a contact chip ( 400 ) having a further main surface comprising a plurality of second contacts ( 420 ); an backing member ( 300 ) comprising ultrasound absorbing and/or scattering bodies ( 310 ), said backing member comprising a first surface ( 302 ) on which the transducer chip is mounted and a second surface ( 306 ) on which the contact chip is mounted; and a flexible interconnect ( 200 ) extending over said backing member from the main surface to the further main surface, the flexible interconnect comprising a plurality of conductive tracks ( 210 ), each conductive track connecting one of said first contacts to a second contact. An ultrasound probe including such an assembly, an ultrasonic imaging system including such an ultrasound probes and manufacturing methods of such an assembly and probe are also disclosed.
1. An ultrasonic transducer assembly comprising:
an ultrasonic transducer chip having a main surface comprising a plurality of CMUT ultrasound transducer elements and a plurality of first contacts for connecting to said CMUT ultrasound transducer elements;
a single contact chip having a further main surface comprising a plurality of second contacts for contacting a signal processing assembly;
a backing member comprising ultrasound absorbing and/or scattering bodies, said backing member comprising a first surface on which the transducer chip is located and a second surface on which the contact chip is located; and
a flexible interconnect in contact with, and extending over a third surface of said backing member from the main surface to the further main surface, the flexible interconnect comprising a plurality of conductive tracks, each conductive track connecting one of said first contacts to a second contact.
2. The ultrasonic transducer assembly of claim 1 , wherein the backing member comprises a resin in which the ultrasound scattering and/or absorbing bodies are dispersed.
3. The ultrasonic transducer assembly of claim 1 , wherein the ultrasound scattering members are hollow glass beads and/or the ultrasound absorbing members are particles comprising tungsten, such as tungsten oxide particles.
4. The ultrasonic transducer assembly of claim 1 , wherein the flexible interconnect includes a first electrically insulating polymer layer and a second insulating polymer layer, wherein the conductive tracks are arranged in between said first and second electrically insulating polymer layers.
5. The ultrasonic transducer assembly of claim 1 , wherein the first surface is opposite the second surface.
6. The ultrasonic transducer assembly of claim 1 , wherein the first surface adjoins the second surface.
7. The ultrasonic transducer assembly of claim 1 , wherein the second contacts comprise solder bumps.
8. The ultrasonic transducer assembly of claim 1 , wherein the second contacts define a ball grid array.
9. The ultrasonic transducer assembly of claim 1 , wherein the flexible interconnect envelopes the first contacts and the second contacts.
10. An ultrasound probe comprising:
the ultrasonic transducer assembly of claim 1 ; and
a signal processing assembly including a carrier carrying at least one signal processing circuit on a main carrier surface for processing signals from said transducer elements, said carrier comprising a further carrier surface adjoining the main carrier surface, the further carrier surface comprising a plurality of carrier contacts to said at least one signal processing circuit, wherein the carrier contacts are conductively coupled to the second contacts.
11. The ultrasound probe of claim 10 , wherein the further carrier surface is an edge surface of the carrier.
12. An ultrasonic imaging system including the ultrasound probe of claim 10 .