SOLID-STATE IMAGING ELEMENT AND ELECTRONIC DEVICE
The present disclosure relates to a solid-state imaging element and an electronic device capable of effectively inhibiting occurrence of reflection and diffraction of light on a light incident surface. A fine uneven structure including a recess and a protrusion is formed with a predetermined pitch on a light incident surface of a semiconductor layer in which photoelectric conversion sections are formed for a plurality of pixels; and an antireflective film is laminated on the fine uneven structure, the antireflective film being formed with a film thickness different for each color of light received by each of the pixels. The pitch of one of the recess and protrusion formed in the fine uneven structure is generally identical in all the pixels, and is 100 nm or less. The present technology is applicable, for example, to a solid-state imaging element.
1 . A solid-state imaging element comprising:
a fine uneven structure comprising a recess and a protrusion which are formed with a predetermined pitch on a light incident surface of a semiconductor layer in which photoelectric conversion sections are formed for a plurality of pixels; and
an antireflective film laminated on the fine uneven structure, the antireflective film being formed with a film thickness different for each color of light received by each of the pixels.
2 . The solid-state imaging element according to claim 1 , wherein the pitch of one of the recess and the protrusion formed in the fine uneven structure is generally identical in all the pixels.
3 . The solid-state imaging element according to claim 1 , wherein the pitch of the recess and the protrusion formed in the fine uneven structure is 100 nm or less.
4 . The solid-state imaging element according to claim 1 , further comprising an inter-pixel light-shielding section having a light-shielding property provided between the adjacent photoelectric conversion sections in the semiconductor substrate.
5 . An electronic device comprising a solid-state imaging element comprising:
a fine uneven structure comprising a recess and a protrusion which are formed with a predetermined pitch on a light incident surface of a semiconductor layer in which photoelectric conversion sections are formed for a plurality of pixels; and
an antireflective film laminated on the fine uneven structure, the antireflective film being formed in film thickness different for each color of light received by each of the pixels.