Method of manufacturing semiconductor device and semiconductor device
View Patent ↗A structure having high, middle, and low impurity concentration regions disposed from a surface side of a substrate is more suitably manufactured. A method of manufacturing a semiconductor device includes: a first implantation of first conductivity type impurities into a first conductivity type semiconductor substrate from a surface; melting and solidifying a first semiconductor region between a depth and the surface, wherein the depth is deeper than a depth having a peak impurity concentration in an increased region where the impurity concentration was increased in the first implantation, and shallower than a deeper end of the increased region; a second implantation of the impurities from the surface into a region shallower than the depth; and melting and solidifying a region in which the impurity concentration was increased in the second implantation.
1. A method of manufacturing a semiconductor device, the method comprising:
a first implantation of implanting first conductivity type impurities into a semiconductor substrate of a first conductivity type from a surface of the semiconductor substrate;
melting and then solidifying a first semiconductor region between a specific depth and the surface, the specific depth being deeper than a depth having a peak concentration of the first conductivity type impurities in an increased region in which a first conductivity type impurity concentration was increased in the first implantation, and the specific depth being shallower than a deeper side end of the increased region;
a second implantation of implanting, from the surface, the first conductivity type impurities into a region shallower than the specific depth; and
melting and then solidifying a region in which the first conductivity type impurity concentration was increased in the second implantation.
2. The method of claim 1 , wherein the first conductivity type impurity concentration is increased in a range between the deeper side end and the surface in the first implantation.
3. The method of claim 2 , wherein the first conductivity type impurities are implanted by a channeling implantation in the first implantation.
4. A semiconductor device, comprising:
a high concentration region of a first conductivity type provided in a range exposed on a surface of a semiconductor substrate;
a middle concentration region of the first conductivity type provided in a range deeper than the high concentration region, and having a first conductivity type impurity concentration which is lower than that of the high concentration region; and
a low concentration region of the first conductivity type provided in a range deeper than the middle concentration region, and having the first conductivity type impurity concentration which is lower than that of the middle concentration region,
wherein
a distance A is a distance from a depth having a peak value of the first conductivity type impurity concentration in the high concentration region to a depth deeper than the depth having the peak value of the first conductivity type impurity concentration, and having the first conductivity type impurity concentration which is one tenth of the peak value of the first conductivity type impurity concentration,
the first conductivity type impurity concentration at a depth shallower by twice the distance A than the depth having the peak value of the first conductivity type impurity concentration is equal to or higher than one tenth of the peak value of the first conductivity type impurity concentration,
a distance B is a distance from a depth having a peak value of the second conductivity type impurity concentration in the middle concentration region to a depth deeper than the depth having the peak value of the second conductivity type impurity concentration, and having which is one tenth of the peak value of the second conductivity type impurity concentration,
the second conductivity type impurity concentration at a depth shallower by twice the distance B than the depth having the peak value of the second conductivity type impurity concentration is equal to or higher than one tenth of the peak value of the second conductivity type impurity concentration,
a distance C is a distance from a depth having a peak value of the first conductivity type impurity concentration in the middle concentration region to a depth deeper than the depth having the peak value of the first conductivity type impurity concentration in the middle concentration region, and having the first conductivity type impurity concentration which is one tenth of the peak value of the first conductivity type impurity concentration in the middle concentration region, and
the distance C is greater than the distance B.
5. The semiconductor device of claim 4 , wherein
the first conductivity type impurity concentration continuously decreases from the depth having the peak value of the first conductivity type impurity concentration in the middle concentration region toward a deeper side, and
a graph of the first conductivity type impurity concentration in a part where the first conductivity type impurity concentration continuously decreases curves in a convex manner toward a plus side of the first conductivity type impurity concentration.