Microphone Arrangement which has an Enlarged Opening and is Decoupled from the Cover
A microphone arrangement having an enlarged opening is disclosed. In an embodiment, the microphone includes a substrate, a transducer element arranged on the substrate, a cover having an opening, wherein the opening of the cover completely covers the transducer element and a sound separation fixing the cover to the transducer element.
1 - 15 . (canceled)
16 . A microphone comprising:
a substrate;
a transducer element arranged on the substrate;
a cover having an opening, wherein the opening of the cover completely covers the transducer element; and
a sound separation fixing the cover to the transducer element.
17 . The microphone according to claim 16 , wherein the transducer element forms a front volume and a back volume, wherein the front volume is acoustically connected to surroundings of the microphone via the opening of the cover, and wherein the cover and the sound separation are arranged such that the cover, the sound separation, the transducer element and the substrate enclose a back volume of the transducer element.
18 . The microphone according to claim 16 , wherein the cover comprises metal.
19 . The microphone according to claim 16 , wherein the sound separation comprises a material having a lower modulus of elasticity than the cover.
20 . The microphone according to claim 16 , wherein the sound separation comprises an adhesive.
21 . The microphone according to claim 16 , wherein the cover has a top side arranged parallel to the substrate, and wherein the opening of the cover is arranged in the top side.
22 . The microphone according to claim 21 , wherein the top side of the cover has a first region and a second region, wherein the opening is arranged in the first region, and wherein the first region is at a smaller distance from the substrate than the second region.
23 . The microphone according to claim 21 , wherein the top side has a depression facing toward the substrate.
24 . The microphone according to claim 16 , wherein the sound separation comprises a film completely covering the cover and partly covering the transducer element.
25 . The microphone according to claim 24 , wherein the film essentially consists of a polymer.
26 . The microphone according to claim 24 , wherein a metal layer is arranged above the film.
27 . The microphone according to claim 16 , wherein the transducer element has a sound entrance opening that is free of the sound separation.
28 . The microphone according to claim 16 , wherein the transducer element has a sound entrance opening that is partly covered by the sound separation.
29 . The microphone according to claim 28 , wherein the sound separation has a grille-shaped region that partly covers the sound entrance opening.
30 . The microphone according to claim 16 , wherein a sound-transmissive protective grille is arranged above the opening of the cover.
31 . The microphone according to claim 16 , wherein the sound separation directly fixes the cover to the transducer element.
32 . A microphone comprising:
a substrate;
a transducer element arranged on the substrate;
a cover having an opening, wherein the opening of the cover completely covers the transducer element; and
a sound separation fixing the cover to the transducer element,
wherein the cover has a top side arranged parallel to the substrate,
wherein the opening of the cover is arranged in the top side,
wherein the top side of the cover has a first region and a second region,
wherein the opening is arranged in the first region, and
wherein the first region is at a smaller distance from the substrate than the second region.