Micro-acoustic component having improved temperature compensation
For a component operating with acoustic waves, it is proposed to provide a compensation layer on the component for compensating for a negative temperature coefficient of the frequency, which includes a material based on a chemical compound made up of at least two elements, which has a negative thermal expansion coefficient.
1. A component operating with acoustic waves, having a layer of a piezoelectric material including at least one pair of electrodes for exciting acoustic waves in the piezoelectric material
having a compensation layer arranged in the component in such a way that at least a portion of the energy of the acoustic wave is located in the compensation layer,
wherein the compensation layer includes dielectric material based on a rare-earth compound made up of at least two elements, the dielectric material having a negative thermal expansion coefficient.
2. The component as claimed in claim 1 , in which the compensation layer is applied directly to the layer of the piezoelectric material, wherein the electrodes are arranged on the piezoelectric layer, on the compensation layer, or between these two layers.
3. The component as claimed in claim 1 , in which the rare-earth compound is in the form of scandium trifluoride ScF 3 .
4. The component as claimed in claim 3 , in which the rare-earth compound is in the form of ScF 3 doped with yttrium, having the formula Sc (1-X) Y x F 3 , wherein the yttrium component expressed by the coefficient x is defined by the relationship 0<x≤0.25.
5. The component as claimed in claim 4 , in which the rare-earth compound is in the form of ScF 3 doped with yttrium having the formula Sc (1-x) Y x F 3 , where x=0.2.
6. The component as claimed in claim 3 , in which the compensation layer including ScF 3 is a glass.
7. The component as claimed in claim 1 , in which the compensation layer includes a network former.
8. The component as claimed in claim 1 , in which the compensation layer has a positive temperature coefficient of the thermoelastic properties greater than 700 ppm/K.
9. The component as claimed in claim 1 ,
designed as an SAW component,
including at least one interdigital transducer on or above the piezoelectric layer
including a compensation layer deposited above the piezoelectric layer and the interdigital transducer, which contains ScF 3 in pure form, doped, in the form of a mixed crystal including other oxides or halides, or embedded in a crystalline matrix or a glass
wherein the temperature coefficient of the center frequency is fully compensated for by a layer thickness of 5 to 20% relative to the wavelength at the center frequency of the component.
10. The component as claimed in claim 1 ,
designed as an BAW component,
including two electrode layers
including a compensation layer deposited between the piezoelectric layer and an electrode layer or onto an electrode layer opposite to the piezoelectric layer, wherein the compensation layer contains ScF 3 in pure form, doped, in the form of a mixed crystal including other oxides or halides, or embedded in a crystalline matrix or a glass
wherein the temperature coefficient of the center frequency is fully compensated for by a layer thickness of 5 to 20% relative to the wavelength at the center frequency of the component.
11. The component as claimed in claim 2 , in which the rare-earth compound is in the form of scandium trifluoride ScF 3 , in which the rare-earth compound is in the form of ScF 3 doped with yttrium, having the formula Sc (1-X) Y x F 3 , wherein the yttrium component expressed by the coefficient x is defined by the relationship 0<x≤0.25, or in which the rare-earth compound is in the form of ScF 3 doped with yttrium having the formula Sc (1-X) Y x F 3 , where x=0.2.
12. The component as claimed in claim 11 , in which the compensation layer includes a network former.
13. The component as claimed in claim 2 , in which the compensation layer has a positive temperature coefficient of the thermoelastic properties greater than 700 ppm/K.
14. The component as claimed in claim 11 , in which the compensation layer has a positive temperature coefficient of the thermoelastic properties greater than 700 ppm/K.
15. The component as claimed in claim 2 ,
designed as an SAW component,
including at least one interdigital transducer on or above the piezoelectric layer
including a compensation layer deposited above the piezoelectric layer and the interdigital transducer, which contains ScF 3 in pure form, doped, in the form of a mixed crystal including other oxides or halides, or embedded in a crystalline matrix or a glass
wherein the temperature coefficient of the center frequency is fully compensated for by a layer thickness of 5 to 20% relative to the wavelength at the center frequency of the component.
16. The component as claimed in claim 11 ,
designed as an SAW component,
including at least one interdigital transducer on or above the piezoelectric layer
including a compensation layer deposited above the piezoelectric layer and the interdigital transducer, which contains ScF 3 in pure form, doped, in the form of a mixed crystal including other oxides or halides, or embedded in a crystalline matrix or a glass
wherein the temperature coefficient of the center frequency is fully compensated for by a layer thickness of 5 to 20% relative to the wavelength at the center frequency of the component.
17. The component as claimed in claim 2 ,
designed as an BAW component,
including two electrode layers
including a compensation layer deposited between the piezoelectric layer and an electrode layer or onto an electrode layer opposite to the piezoelectric layer, wherein the compensation layer contains ScF 3 in pure form, doped, in the form of a mixed crystal including other oxides or halides, or embedded in a crystalline matrix or a glass
wherein the temperature coefficient of the center frequency is fully compensated for by a layer thickness of 5 to 20% relative to the wavelength at the center frequency of the component.
18. The component as claimed in claim 11 ,
designed as an BAW component,
including two electrode layers
including a compensation layer deposited between the piezoelectric layer and an electrode layer or onto an electrode layer opposite to the piezoelectric layer, wherein the compensation layer contains ScF 3 in pure form, doped, in the form of a mixed crystal including other oxides or halides, or embedded in a crystalline matrix or a glass
wherein the temperature coefficient of the center frequency is fully compensated for by a layer thickness of 5 to 20% relative to the wavelength at the center frequency of the component.
19. A component operating with acoustic waves,
having a layer of a piezoelectric material including at least one pair of electrodes for exciting acoustic waves in the piezoelectric material
having a compensation layer which is arranged in the component in such a way that at least a portion of the energy of the acoustic wave is located in the compensation layer, in which the compensation layer includes a dielectric material having a negative thermal expansion coefficient the material being chosen from one of the following compounds: ZrW 2 O 8 , ZrMo 2 O 8 , HfW 2 O 8 , HfMo 2 O 8 , ScW 3 O 12 , AlW 3 O 12 , Zr(WO 4 )(PO 4 ) 2 , ScF 3 —BaF 2 —YF 3 , ScF 3 —BaF 2 —ZnF 2 , ScF 3 —BaF 2 —InF 3 , ScF 3 —MgF 2 , YbF 3 —ScF 3 , LuF 3 —ScF 3 , Zn(CN) 2 , BeF 2 , B 2 O 3 , and zeolite.