Laser processing apparatus
In a laser processing apparatus for refining magnetic domains of a grain-oriented electromagnetic steel sheet by setting a laser beam to be focused on the grain-oriented electromagnetic steel sheet and scanned in a scanning direction, the laser beam focused on the grain-oriented electromagnetic steel sheet is linearly polarized light, and the angle between the linear polarization direction and the scanning direction is equal to or higher than 0° and lower than 45°.
1. A laser processing apparatus for refining magnetic domains of a grain-oriented electromagnetic steel sheet by setting a linearly polarized laser beam to be focused on the grain-oriented electromagnetic steel sheet and scanned in a scanning direction, the laser processing apparatus comprising:
a laser oscillator configured to emit the linearly polarized laser beam, or a laser oscillator configured to emit a laser beam and a polarizer configured to convert the laser beam into the linearly polarized laser beam,
wherein an angle between a linear polarization direction of the linearly polarized laser beam focused on the grain oriented electromagnetic steel sheet and the scanning direction is equal to or higher than 0° and lower than 45° on a surface of the grain-oriented electromagnetic steel sheet and the scanning direction is substantially perpendicular to a transport direction of the grain-oriented electromagnetic steel sheet, and
wherein an incident angle ϕ of the laser beam into the surface of the grain-oriented electromagnetic steel sheet becomes 0° when an incident position of the laser beam is coincident with a center portion of a laser scanning width and the incident angle ϕ of the laser beam increases as the incident position of the laser beam approaches the end portions of the laser scanning width, and
wherein the laser beam has a degree of polarization defined as PW1/(PW1+PW2), a linearly polarized light having the degree of polarization of 0.9 or higher and lower than 1.0, wherein a power of a linearly polarized component is given by PW1 and a power of an orthogonal component is given by PW2.
2. The laser processing apparatus according to claim 1 ,
wherein a maximum incident angle ϕ MAX of the laser beam incident on the grain-oriented electromagnetic steel sheet satisfies the following conditional expression (1).
1/cos ϕ MAX ≤1.24 (1)
3. The laser processing apparatus according to claim 1 ,
wherein a wavelength of the laser beam focused on the grain-oriented electromagnetic steel sheet is 0.15 μm or higher and 7 μm or lower.
4. The laser processing apparatus according to claim 2 ,
wherein a wavelength of the laser beam focused on the grain-oriented electromagnetic steel sheet is 0.15 μm or higher and 7 μm or lower.
5. The laser processing apparatus according to claim 1 ,
wherein the laser oscillator is a fiber laser or a disk laser.
6. The laser processing apparatus according to claim 2 ,
wherein the laser oscillator is a fiber laser or a disk laser.
7. The laser processing apparatus according to claim 3 ,
wherein the laser oscillator is a fiber laser or a disk laser.
8. The laser processing apparatus according to claim 4 ,
wherein the laser oscillator is a fiber laser or a disk laser.
9. The laser processing apparatus according to claim 1 ,
wherein a shape of the laser beam focused on the grain-oriented electromagnetic steel sheet is an ellipse, and
a minor axis direction of the ellipse is perpendicular to the scanning direction.
10. The laser processing apparatus according to claim 2 ,
wherein a shape of the laser beam focused on the grain-oriented electromagnetic steel sheet is an ellipse, and
a minor axis direction of the ellipse is perpendicular to the scanning direction.
11. The laser processing apparatus according to claim 3 ,
wherein a shape of the laser beam focused on the grain-oriented electromagnetic steel sheet is an ellipse, and
a minor axis direction of the ellipse is perpendicular to the scanning direction.
12. The laser processing apparatus according to claim 4 ,
wherein a shape of the laser beam focused on the grain-oriented electromagnetic steel sheet is an ellipse, and
a minor axis direction of the ellipse is perpendicular to the scanning direction.