Method and apparatus for forming backside die planar devices and saw filter
Described is an apparatus which comprises: a backside of a first die having a redistribution layer (RDL); and one or more passive planar devices disposed on the backside, the one or more passive planar devices formed in the RDL.
1. An apparatus comprising:
a backside of a first die having a redistribution layer (RDL);
one or more passive planar devices on the backside, the one or more passive planar devices formed in the RDL;
a front-side of the first die having an active region;
one or more vias to couple the active region with the one or more passive planar devices, wherein the one or more vias include ground and signal vias; and
a layer comprising piezoelectric material, wherein the layer is on the backside of the first die such that the layer is disposed on the RDL.
2. The apparatus of claim 1 comprises a second die coupled to the backside of the first die.
3. The apparatus of claim 2 , wherein the second die includes an active region coupled to the one or more passive planar devices of the first die.
4. The apparatus of claim 1 comprises a passivation layer on the layer.
5. The apparatus of claim 1 , wherein the one or more passive planar devices is one or more of:
a SAW filter;
a band-pass filter;
a low-pass filter;
a high-pass filter;
an inductor;
an antenna; or
a balun.
6. The apparatus of claim 1 comprises bumps on the backside of the die to couple the one or more passive planar devices to another die.
7. An apparatus comprising:
a backside of a die having a redistribution layer (RDL);
one or more SAW filters on the backside, the one or more SAW filters in the RDL;
a piezoelectric layer on the RDL over the one or more SAW filters;
a front-side of the die having an active region; and
one or more vias to couple the active region with the one or more SAW filters.
8. The apparatus of claim 7 , wherein the active region comprises a low noise amplifier (LNA) coupled to one of the one or more SAW filters.
9. The apparatus of claim 7 , wherein the active region comprises a power amplifier (PA) coupled to one of the one or more SAW filters.
10. The apparatus of claim 7 further comprises one or more passive planar devices on the backside.
11. A system comprising:
a memory;
a processor die coupled to the memory, the processor die having:
a backside with a redistribution layer (RDL);
one or more passive planar devices on the backside, the one or more passive planar devices formed in the RDL;
a front-side of the first die having an active region; and
one or more vias to couple the active region with the one or more passive planar device;
a layer comprising piezoelectric material, wherein the layer is on the backside of the first die such that the layer is on the RDL; and
a wireless interface to allow the processor to communicatively couple with another device.
12. The system of claim 11 comprises a display interface for displaying content processed by the processor.
13. The system of claim 11 , wherein the active region comprises a low noise amplifier (LNA) coupled to one of the one or more passive planar devices.
14. The system of claim 13 , wherein the one or more vias include ground and signal vias.
15. The system of claim 11 comprises another die coupled to the backside of the processor die.