Ultrasound probe, performance evaluation method therefor, and ultrasound diagnostic equipment
View Patent ↗Technique that enables precisely measuring cavity height and precisely grasping maximum transmission sound pressure in an ultrasonic probe is provided to the ultrasonic probe using CMUT. The ultrasonic probe according to the present invention includes plural cells each of which includes a lower electrode and an upper electrode arranged via a gap with respect to the lower electrode, and the plural cells include an ultrasonic cell the gap of which is void and which transmits/receives an ultrasonic wave and a reference cell the gap of which is filled with a conductive material. Electrostatic capacity of the ultrasonic cell and the reference cell is measured, parasitic capacity included in the measured electrostatic capacity as to the ultrasonic cell is corrected using parasitic capacity included in the measured electrostatic capacity as to the reference cell, and cavity height is calculated on the basis of the corrected electrostatic capacity of the ultrasonic cell.
1. An ultrasonic probe, comprising:
a transducer having a plurality of cells arranged in an array structure, each of the plurality of cells including a lower electrode and an upper electrode arranged via a gap with respect to the lower electrode,
wherein the plurality of cells of the transducer include a plurality of ultrasonic cells, the gaps of which are void, and which transmit/receive an ultrasonic wave, a reference cell, the gap of which is filled with a conductive material, and an ultrasonic cell adjacent to the reference cell being a dummy cell which is not driven when the ultrasonic probe is driven,
wherein the array structure in which the plurality of cells are arranged is two-dimensional, and
the reference cell is arranged at an end of the array structure.
2. The ultrasonic probe according to claim 1 , wherein the conductive material of the reference cell is metal.
3. The ultrasonic probe according to claim 1 ,
wherein each of the plurality of ultrasonic cells and the reference cell are equal in overlapped areas of the upper electrode and the lower electrode, respectively, when viewed from above the upper electrode.
4. The ultrasonic probe according to claim 1 ,
wherein each of the plurality of ultrasonic cells and the reference cell have same planar layouts of the upper electrode and the lower electrode.
5. The ultrasonic probe according to claim 1 ,
wherein the plurality of ultrasonic cells and the reference cell share the lower electrode.
6. An ultrasonic probe, comprising:
a transducer having a plurality of cells arranged in an array structure, each of the plurality of cells including a lower electrode and an upper electrode arranged via a gap with respect to the lower electrode,
wherein the plurality of cells of the transducer include a plurality of ultrasonic cells, the gaps of which are void, and which transmit/receive an ultrasonic wave, and a reference cell, the gap of which is filled with a conductive material, and
wherein the upper electrode and the lower electrode of each of the plurality of cells are independent of the upper electrode and the lower electrode of another cell of the plurality of cells.
7. An ultrasonic diagnostic apparatus, comprising:
an ultrasonic probe;
an ultrasonic transmitter-receiver that supplies a driving voltage to the ultrasonic probe;
an image generator that generates an ultrasonic image using an ultrasonic signal received by the ultrasonic transmitter-receiver; and
a controller that controls the ultrasonic transmitter-receiver,
wherein the ultrasonic probe includes a transducer having a plurality of cells arranged in an array, each of the plurality of cells including a lower electrode and an upper electrode arranged via a gap with respect to the lower electrode, and
wherein the plurality of cells include an ultrasonic cell, the gap of which is void, and which transmits/receives an ultrasonic wave and a reference cell, the gap of which is filled with a conductive material,
the ultrasonic diagnostic apparatus further comprising:
a performance evaluation device that determines a cavity height of the ultrasonic cell,
wherein the performance evaluation device corrects a measured electrostatic capacity of the ultrasonic cell using a measured electrostatic capacity of the reference cell and calculates the cavity height of the ultrasonic cell.