DEVICE AND METHOD FOR MASKLESS THIN FILM ETCHING
A device for maskless thin film etching, including an ablation tool adapted to emit an ablative output for etching a surface, a gas jet associated with a source of carrier gas and adapted to emit a stream of the carrier gas at an area of the surface where the output of the ablation tool impinges, and a suction member associated with a vacuum source and adapted to collect ablated particulate from the area of the surface where the output of the ablation tool impinges, wherein the ablation tool, the gas jet, and the suction member are mounted adjacent one another.
1 . A device for maskless thin film etching comprising:
an ablation tool;
a gas jet associated with a source of carrier gas and adapted to emit a stream of the carrier gas; and
a suction member associated with a vacuum source and adapted to collect gas and particulate;
wherein the ablation tool, the gas jet, and the suction member are mounted adjacent one another.
2 . The device of claim 1 , wherein the ablation tool, the gas jet, and the suction member are mounted adjacent one another on a carrier arm, wherein the carrier arm is adapted to move the ablation tool, the gas jet, and the suction member relative to a surface to be etched.
3 . The device of claim 1 , wherein the ablation tool is a laser.
4 . The device of claim 1 , wherein the ablation tool is adapted to emit an abrasive media.
5 . The device of claim 1 , wherein the gas jet is adapted to emit the stream of the carrier gas at an area of a surface where an output of the ablation tool impinges.
6 . The device of claim 1 , wherein the carrier gas is an inert gas selected for an ability to suppress formation of laser-induced plasma.
7 . The device of claim 1 , wherein the suction member is adapted to collect ablated particulate from an area of a surface where an output of the ablation tool impinges.
8 . The device of claim 1 , further comprising a controller operatively coupled to the ablation tool, the gas jet, and the suction member and configured to operate the ablation tool, the gas jet, and the suction member in a predefined, coordinated manner.
9 . The device of claim 8 , wherein the controller is configured to direct the ablation tool and to move the gas jet and the suction member along a predefined path to etch a predefined pattern in a surface with the ablation tool.
10 . A device for maskless thin film etching comprising:
an ablation tool adapted to emit an ablative output for etching a surface;
a gas jet associated with a source of carrier gas and adapted to emit a stream of the carrier gas at an area of the surface where the output of the ablation tool impinges; and
a suction member associated with a vacuum source and adapted to collect ablated particulate from the area of the surface where the output of the ablation tool impinges;
wherein the ablation tool, the gas jet, and the suction member are mounted adjacent one another.
11 . The device of claim 10 , wherein the ablation tool includes at least one of a laser and a media blaster.
12 . A method for maskless thin film etching comprising:
positioning an ablation tool adjacent a surface to be etched;
positioning a gas jet adjacent the ablation tool, wherein the gas jet is associated with a source of carrier gas and is adapted to emit a stream of the carrier gas; and
positioning a suction member adjacent the ablation tool, wherein the suction member associated with a vacuum source and is adapted to collect gas and particulate.
13 . The method of claim 12 , wherein the ablation tool, the gas jet, and the suction member are mounted on a carrier arm, the method further comprising moving the carrier arm relative to the surface.
14 . The method of claim 12 , wherein the ablation tool is a laser.
15 . The method of claim 12 , wherein the ablation tool is adapted to emit an abrasive media.
16 . The method of claim 12 , further comprising the gas jet emitting the stream of the carrier gas at an area of the surface where an output of the ablation tool impinges.
17 . The method of claim 12 , wherein the carrier gas is an inert gas selected for an ability to suppress formation of laser-induced plasma.
18 . The method of claim 12 , further comprising the suction member collecting ablated particulate from an area of the surface where an output of the ablation tool impinges.
19 . The method of claim 12 , further comprising a controller operating the ablation tool, the gas jet, and the suction member in a predefined, coordinated manner.
20 . The method of claim 19 , further comprising the controller directing the ablation tool and moving the gas jet and the suction member along a predefined path to etch a predefined pattern in the surface with the ablation tool.