Heat treatable coated article with carbon-doped zirconium based layer(s) in coating
In certain example embodiments, a coated article includes a carbon-doped zirconium based layer before heat treatment (HT). The coated article is heat treated sufficiently to cause the carbon-doped zirconium oxide and/or nitride based layer to result in a carbon-doped zirconium oxide based layer that is scratch resistant and/or chemically durable. The doping of the layer with carbon (C) has been found to improve wear resistance.
1. A method of making a heat treated coated article, the method comprising:
having a coated article including a coating supported by a glass substrate, the coating comprising a carbon-doped layer comprising an oxide and/or nitride of zirconium, and wherein the carbon-doped layer comprising an oxide and/or nitride of zirconium is substantially free of tungsten, copper, and zinc; and
heat treating the coated article for at least thirty minutes at temperatures of from 580-800 degrees C., including the glass substrate and the carbon-doped layer comprising an oxide and/or nitride of zirconium, so that after the heat treating a layer comprising carbon-doped zirconium oxide is provided on the glass substrate, wherein the layer comprising carbon-doped zirconium oxide comprises from 4.7 to 20 atomic % carbon.
2. The method of claim 1 , wherein there is more zirconium than carbon in each of (i) the carbon-doped layer comprising an oxide and/or nitride of zirconium, and (ii) the layer comprising carbon-doped zirconium oxide.
3. The method of claim 1 , wherein a metal content of the layer comprising carbon-doped zirconium oxide is from 80-100% Zr (atomic %).
4. The method of claim 1 , wherein a metal content of the layer comprising carbon-doped zirconium oxide is from 90-100% Zr (atomic %).
5. The method of claim 1 , wherein a metal content of the layer comprising carbon-doped zirconium oxide is from 99-100% Zr (atomic %).
6. The method of claim 1 , wherein the layer comprising carbon-doped zirconium oxide comprises from 4.8-15 atomic % carbon.
7. The method of claim 1 , wherein the layer comprising carbon-doped zirconium oxide comprises from 5.0-12.0 atomic % carbon.
8. The method of claim 1 , wherein the layer comprising carbon-doped zirconium oxide comprises from 7.0-12.0 atomic % carbon.
9. The method of claim 1 , wherein the layer comprising carbon-doped zirconium oxide includes C-doped Zr x O y where y/x is from about 1.2 to 2.5.
10. The method of claim 1 , wherein the layer comprising carbon-doped zirconium oxide further comprises fluorine.
11. The method of claim 1 , wherein prior to said heat treating the carbon-doped layer comprising an oxide and/or nitride of zirconium comprises carbon-doped zirconium nitride.
12. The method of claim 1 , wherein prior to said heat treating the carbon-doped layer comprising an oxide and/or nitride of zirconium comprises carbon-doped zirconium oxynitride.
13. The method of claim 1 , wherein prior to the heat treating, the coating further comprises a layer comprising diamond-like carbon located on the glass substrate over at least the carbon-doped layer comprising an oxide and/or nitride of zirconium.
14. The method of claim 1 , wherein prior to and after the heat treating, the coating further comprises a dielectric layer between the glass substrate and the carbon-doped layer comprising an oxide and/or nitride of zirconium.
15. The method of claim 1 , wherein the layer comprising carbon-doped zirconium oxide comprises a nanocrystalline cubic lattice structure and/or a tetragonal lattice structure.
16. The method of claim 1 , wherein the layer comprising carbon-doped zirconium oxide is an outermost layer of the coating following tempering.
17. The method of claim 1 , wherein the heat treated coated article has a visible transmission of at least 50%.
18. The method of claim 1 , wherein the carbon-doped layer comprising an oxide and/or nitride of zirconium is free of tungsten, copper, and zinc.
19. The method of claim 1 , wherein the layer comprising carbon-doped zirconium oxide is free of tungsten, copper, and zinc.
20. The method of claim 1 , wherein the layer comprising carbon-doped zirconium oxide does not contain any metal other than Zr.
21. The method of claim 1 , further comprising sputter-depositing the carbon-doped layer comprising an oxide and/or nitride of zirconium in the presence of at least carbon inclusive gas.
22. The method of claim 21 , wherein the carbon inclusive gas comprises C 2 F 6 .
23. The method of claim 21 , wherein at least 5 sccm of the carbon inclusive gas is used during the sputter-deposition of the carbon-doped layer comprising an oxide and/or nitride of zirconium.
24. A method of making a heat treated coated article, the method comprising:
having a coated article including a coating supported by a glass substrate, the coating comprising a carbon-doped layer comprising an oxide and/or nitride of zirconium; and
heat treating the coated article for at least thirty minutes minutes at temperatures of 580-800 degrees C., including the glass substrate and the carbon-doped layer comprising an oxide and/or nitride of zirconium, so that after the heat treating a layer comprising carbon-doped zirconium oxide is provided on the glass substrate, wherein the layer comprising carbon-doped zirconium oxide comprises from 4.7 to 20 atomic % carbon and is substantially free of tungsten, copper, and zinc.
25. The method of claim 24 , further comprising sputter-depositing the carbon-doped layer comprising an oxide and/or nitride of zirconium in the presence of at least carbon inclusive gas.
26. The method of claim 24 , wherein the carbon inclusive gas comprises C 2 F 6 .
27. The method of claim 24 , wherein the layer comprising carbon-doped zirconium oxide comprises from 7.0-12.0 atomic % carbon.
28. A method of making a heat treated coated article, the method comprising:
sputter-depositing a carbon-doped layer comprising an oxide and/or nitride of zirconium on a glass substrate;
wherein said sputter-depositing of the carbon-doped layer comprising an oxide and/or nitride of zirconium includes sputtering a target comprising zirconium in the presence of at least a carbon inclusive gas;
heat treating the coated article for at least thirty minutes at temperatures of 580-800 degrees C., including the glass substrate and the carbon-doped layer comprising an oxide and/or nitride of zirconium, so that after the heat treating a layer comprising carbon-doped zirconium oxide is provided on the glass substrate, wherein the layer comprising carbon-doped zirconium oxide is substantially free of tungsten, copper, and zinc.
29. The method of claim 28 , wherein the carbon inclusive gas comprises C 2 F 6 .
30. The method of claim 28 , wherein the layer comprising carbon-doped zirconium oxide does not contain any metal other than Zr.