IP Library Granted Patent US 9,953,994
Granted Patent B2
US 9,953,994 · App. 15/344,562 · Granted Apr 24, 2018

Semiconductor memory device and structure

Inventors: Zvi Or-Bach (San Jose, CA); Jin-Woo Han (San Jose, CA)
Assignee: MONOLITHIC 3D INC.
H01L27/11568G11C14/0018G11C16/0466G11C16/08G11C16/10G11C16/16G11C16/24H01L27/11565H01L29/792G11C11/5621H01L29/7831H01L29/7923
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Quick Facts
Patent No.
US 9,953,994
App. No.
15/344,562
Granted
Apr 24, 2018
Kind
B2
Abstract

A semiconductor device, including: a plurality of non-volatile memory cells including a first memory cell and a second memory cell, where the plurality of non-volatile memory cells includes source diffusion lines and drain diffusion lines, at least one of the source diffusion lines and drain diffusion lines are shared by the first memory cell and the second memory cell, where the first memory cell includes a thin tunneling oxide of less than 1 nm thickness, and where the second memory cell includes a thick tunneling oxide of greater than 2 nm thickness.

Claims (74)

1. A semiconductor device, comprising:

a plurality of non-volatile memory cells comprising a first memory cell and a second memory cell,

wherein said plurality of non-volatile memory cells comprises source diffusion lines and drain diffusion lines, at least one of said source diffusion lines and drain diffusion lines are shared by said first memory cell and said second memory cell,

wherein said first memory cell comprises a transistor channel, said transistor channel has two independent facets,

wherein each of said two independent facets comprise at least one independent storage site,

wherein said first memory cell comprises a thin tunneling oxide of less than 1 nm thickness, and

wherein said second memory cell comprises a thick tunneling oxide of greater than 2 nm thickness.

2. The semiconductor device according to claim 1 ,

wherein at least a portion of said memory cells comprises at least one channel facet,

wherein said at least one channel facet is affected by at least two gates to affect at least two storage locations oriented in perpendicular to said at least two gates,

wherein one of said at least two gates is self-aligned to the other of said at least two gates.

3. The semiconductor device according to claim 1 ,

wherein at least one region of one of said drain diffusion lines comprises a junction less transistor (“JLT”).

4. The semiconductor device according to claim 1 ,

wherein a portion of said memory cells comprises at least one channel facet,

wherein said at least one channel facet comprises at least four charge storage locations.

5. The semiconductor device according to claim 1 , further comprising:

a single crystal semiconductor layer overlaying said memory cells; and

through silicon vias,

wherein said through silicon vias have a radius less than 250 nm.

6. The semiconductor device according to claim 1 ,

wherein said first memory cell and said second memory cell additionally function as volatile floating body memory cells.

7. The semiconductor device according to claim 1 , further comprising:

a plurality of volatile memory cells; and

a controller,

wherein said controller is designed to operate a direct transfer of data from a portion of said non-volatile memory cells to a portion of said volatile memory cells.

8. A semiconductor device, comprising:

a plurality of non-volatile memory cells comprising a first memory cell and a second memory cell,

wherein said plurality of non-volatile memory cells comprises source diffusion lines and drain diffusion lines, at least one of said source diffusion lines and drain diffusion lines are shared by said first memory cell and said second memory cell,

wherein said first memory cell comprises a transistor channel, said transistor channel has two independent facets,

wherein each of said two independent facets comprise at least one independent storage site,

wherein at least one region of one of said drain diffusion lines comprises a junction less transistor (“JLT”).

9. The semiconductor device according to claim 8 ,

wherein at least a portion of said memory cells comprises at least one channel facet,

wherein said at least one channel facet is affected by at least two gates to affect at least two storage locations oriented in perpendicular to said at least two gates,

wherein one of said at least two gates is self-aligned to the other of said at least two gates.

10. The semiconductor device according to claim 8 ,

wherein said first memory cell comprises a thin tunneling oxide of less than 1 nm thickness, and

wherein said second memory cell comprises a thick tunneling oxide of greater than 2 nm thickness.

11. The semiconductor device according to claim 8 ,

wherein a portion of said memory cells comprises at least one channel facet,

wherein said at least one channel facet comprises at least four charge storage locations.

12. The semiconductor device according to claim 8 , further comprising:

a single crystal semiconductor layer overlaying said memory cells; and

through silicon vias,

wherein said through silicon vias have a radius less than 250 nm.

13. The semiconductor device according to claim 8 ,

wherein said first memory cell comprises a transistor channel, said transistor channel has two independent facets,

wherein each of said two independent facets comprise at least one independent storage site.

14. The semiconductor device according to claim 8 , further comprising:

a plurality of volatile memory cells; and

a controller,

wherein said controller is designed to operate a direct transfer of data from a portion of said non-volatile memory cells to a portion of said volatile memory cell.

15. A semiconductor device, comprising:

a plurality of non-volatile memory cells comprising a first memory cell and a second memory cell,

wherein said plurality of non-volatile memory cells comprises source diffusion lines and drain diffusion lines, at least one of said source diffusion lines and drain diffusion lines are shared by said first memory cell and said second memory cell,

wherein said first memory cell comprises a transistor channel said transistor channel has two independent facets,

wherein each of said two independent facets comprise at least one independent storage site,

wherein at least one region of one of said drain diffusion lines comprises a junction less transistor (“JLT”).

16. A semiconductor device, comprising:

a plurality of non-volatile memory cells comprising a first memory cell and a second memory cell,

wherein said plurality of non-volatile memory cells comprises source diffusion lines and drain diffusion lines, at least one of said source diffusion lines and drain diffusion lines are shared by said first memory cell and said second memory cell,

wherein said first memory cell comprises a transistor channel, said transistor channel has two independent facets,

wherein each of said two independent facets comprise at least one independent storage site,

wherein said first memory cell comprises a thin tunneling oxide of less than 1 nm thickness, and

wherein said second memory cell comprises a thick tunneling oxide of greater than 2 nm thickness.

17. A semiconductor device, comprising:

a plurality of non-volatile memory cells comprising a first memory cell and a second memory cell,

wherein said plurality of non-volatile memory cells comprises source diffusion lines and drain diffusion lines, at least one of said source diffusion lines and drain diffusion lines are shared by said first memory cell and said second memory cell,

wherein said first memory cell comprises a transistor channel said transistor channel has two independent facets,

wherein each of said two independent facets comprise at least one independent storage site,

wherein at least a portion of said memory cells comprises at least one channel facet,

wherein said at least one channel facet is affected by at least two gates to affect at least two storage locations oriented in perpendicular to said at least two gates,

wherein one of said at least two gates is self-aligned to the other of said at least two gates.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 7, 2026
From: MONOLITHLC 3D™ INC.
To: SAMSUNG ELECTRONICS CO. , LTD.
Reel/Frame 073397/0890 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2022
From: SAMSUNG ELECTRONICS CO., LTD.
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 058625/0664 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 8, 2020
From: MONOLITHIC 3D INC.
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 054576/0686 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 18, 2020
From: OR-BACH, ZVI; HAN, JIN-WOO
To: MONOLITHIC 3D INC.
Reel/Frame 051850/0960 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 24, 2017
From: OR-BACH, ZVI; HA, JIN-WOO
To: MONOLITHIC 3D INC.
Reel/Frame 044206/0566 →
Continuity (5)
Provisional Application 62297857 · Feb 20, 2016
Provisional Application 62269950 · Dec 19, 2015
Provisional Application 62258433 · Nov 21, 2015
Provisional Application 62252448 · Nov 7, 2015
Related Publication 20170133395A1 · May 11, 2017