HYBRID PARYLENE-METAL OXIDE INTERSTACKED COATINGS

1 . A composite coating on a substrate, comprising:

a first parylene layer deposited on a substrate surface of a substrate;

a first metal oxide layer covering the first parylene layer;

a first metal oxide, parylene hybrid layer formed between the first metal oxide layer and the first parylene layer; and

a second parylene layer covering the first metal oxide layer, with the first metal oxide layer interposed between the first and second parylene layers.

2 . The composite coating of claim 1 , wherein the first and second parylene layers are at least one of parylene A, parylene C, parylene N, parylene D, parylene VT-4, parylene AF-4, or mixtures or derivations of parylene A, parylene C, parylene N, parylene D, parylene VT-4, parylene AF-4.

3 . The composite coating of claim 1 , wherein the first parylene layer and the second parylene layer are a same parylene material.

4 . The composite coating of claim 1 , wherein the first metal oxide layer is formed by oxidation of a metal oxide precursor defined by formula I: [M]-(R 1 ) n , wherein:

M is a metal;

each R 1 is at least one of hydrogen, C 1 -C 12 alkyl, C 1 -C 12 alkoxide, halogen, alkyl halide, C 1 -C 12 alkylamido, di-C 1 -C 12 alkylamido, optionally substituted cyclopentadienyl; and

n corresponds to an oxidation state of the metal.

5 . The composite coating of claim 4 , wherein the metal is at least one of aluminum, gallium, magnesium, hafnium, silicon, tantalum, titanium, yttrium, zinc, and zirconium.

6 . The composite coating of claim 4 , wherein at least one R1 is C 1 -C 12 alkyl.

7 . The composite coating of claim 4 , wherein the first parylene layer and the second parylene layer are different parylene materials.

8 . The composite coating of claim 1 , further comprising a second metal oxide layer covering a surface of the second parylene layer.

9 . The composite coating of claim 8 , wherein the second metal oxide layer is formed by oxidation of a second metal oxide precursor defined by formula I: [M]-(R 1 ) n , wherein:

M is a second metal;

each R 1 is at least one of hydrogen, C 1 -C 12 alkyl, C 1 -C 12 alkoxide, halogen, alkyl halide, C 1 -C 12 alkylamido, di-C 1 -C 12 alkylamido, optionally substituted cyclopentadienyl; and

n corresponds to an oxidation state of the second metal.

10 . The composite coating of claim 8 , wherein the first and second metal oxide layers each has a thickness between 5 and 50 nm.

11 . The composite coating of claim 8 , wherein the first parylene layer has a thickness between 0.1 μm and 2 μm.

12 . The composite coating of claim 8 , wherein the composite coating further comprises additional parylene layers and additional metal oxide layers in an alternating arrangement up to a maximum composite coating thickness between 0.5 μm and 20 μm.

13 . A coated corrosive sensitive article comprising:

a corrosive sensitive article comprising a substrate surface; and

a composite coating comprising:

a first parylene layer deposited on a substrate surface of a substrate;

a first metal oxide layer covering the first parylene layer;

a first metal oxide, parylene hybrid layer formed between the first metal oxide layer and the first parylene layer; and

a second parylene layer covering the first metal oxide layer, with the first metal oxide layer interposed between the first and second parylene layers.

14 . The coated corrosive sensitive article of claim 13 , wherein the first and second parylene layers are at least one of parylene A, parylene C, parylene N, parylene D, parylene VT-4, parylene AF-4, or mixtures or derivations of parylene A, parylene C, parylene N, parylene D, parylene VT-4, parylene AF-4.

15 . The coated corrosive sensitive article of claim 13 , wherein the first metal oxide layer is formed by oxidation of a metal oxide precursor defined by formula I: [M]-(R 1 ) n , wherein:

M is a metal;

each R 1 is at least one of hydrogen, C 1 -C 12 alkyl, C 1 -C 12 alkoxide, halogen, alkyl halide, C 1 -C 12 alkylamido, di-C 1 -C 12 alkylamido, optionally substituted cyclopentadienyl; and

n corresponds to an oxidation state of the metal.

16 . A process for depositing a composite coating on a substrate, comprising:

applying a first parylene layer to a substrate surface of a substrate;

depositing a first metal oxide precursor onto a surface of the first parylene layer to cover the first parylene layer;

oxidizing the first metal oxide precursor to form a first metal oxide layer; and

applying a second parylene layer onto a surface of the first metal oxide layer.

17 . The process of claim 16 , wherein the first and second parylene layers are at least one of parylene A, parylene C, parylene N, parylene D, parylene VT-4, parylene AF-4, or mixtures or derivations of parylene A, parylene C, parylene N, parylene D, parylene VT-4, parylene AF-4.

18 . The process of claim 17 , wherein the first metal oxide precursor is defined by formula I: [M]-(R 1 ) n , wherein:

M is a metal;

each R 1 is at least one of hydrogen, C 1 -C 12 alkyl, C 1 -C 12 alkoxide, halogen, alkyl halide, C 1 -C 12 alkylamido, di-C 1 -C 12 alkylamido, optionally substituted cyclopentadienyl; and

n corresponds to an oxidation state of the metal.

19 . The process of claim 16 , further comprising depositing a second metal oxide precursor onto a surface of the second parylene layer.

20 . The process of claim 19 , wherein the second metal oxide precursor is defined by formula I: [M]-(R 1 ) n , wherein:

M is a second metal;

each R 1 is at least one of hydrogen, C 1 -C 12 alkyl, C 1 -C 12 alkoxide, halogen, alkyl halide, C 1 -C 12 alkylamido, di-C 1 -C 12 alkylamido, optionally substituted cyclopentadienyl; and

n corresponds to an oxidation state of the second metal.