CUTTING OF BRITTLE MATERIALS WITH TAILORED EDGE SHAPE AND ROUGHNESS
The method of and device for cutting brittle materials with tailored edge shape and roughness are disclosed. The methods can include directing one or more tools to a portion of brittle material causing separation of the material into two or more portions, where the as-cut edge has a predetermined and controllable geometric shape and/or surface morphology. The one or more tools can comprise energy (e.g., a femtosecond laser beam or acoustic beam) delivered to the material without making a physical contact.
1 - 41 . (canceled)
42 . Laser apparatus for cutting a work-piece of brittle material, comprising:
a laser source generating a beam of laser-pulses;
a lens having a numerical aperture greater than about 0.3, the lens located in the beam of laser-pulses and arranged to form the beam of laser-pulses into a converging beam of laser-pulses; and
a transparent plate located between the lens and the work-piece, the transparent plate imposing spherical aberration into the converging beam of laser-pulses, the lens and the transparent plate cooperatively forming a long depth-of-focus within the work-piece.
43 . The laser apparatus of claim 42 , wherein the lens has a numerical aperture greater than about 0.5.
44 . The laser apparatus of claim 42 , wherein the lens has a numerical aperture greater than about 0.7.
45 . The laser apparatus of claim 42 , wherein the laser source is a femtosecond laser.
46 . The laser apparatus of claim 42 , wherein the laser pulses are grouped into bursts of individual laser pulses.
47 . The laser apparatus of claim 46 , wherein the time interval between individual pulses within a burst is between about 1 nanosecond and 100 nanoseconds, the bursts having a duration between about 10 nanoseconds and 1000 nanoseconds.
48 . The laser apparatus of claim 42 , wherein exposure to a laser pulse in the converging beam of laser-pulses having spherical aberration creates a longitudinally extended defect in the work-piece.
49 . The laser apparatus of claim 42 , wherein the converging beam of laser-pulses follows a tool path, creating a plurality of longitudinally extended defects in the work-piece and along the tool path.
50 . The laser apparatus of claim 49 , wherein a second laser beam is applied to the work-piece and along the tool path, the second laser beam causing a controlled separation of the work-piece.
51 . The laser apparatus of claim 42 , wherein the workpiece has a thickness of less than about 500 micrometers.
52 . The laser apparatus of claim 42 , wherein the workpiece is made of glass.
53 . The laser apparatus of claim 42 , wherein the workpiece is made of strengthened glass.