Contact material for MEMS devices
View Patent ↗A method for forming electrical contacts on a semiconductor substrate is disclosed. The method includes forming a first metal layer over the substrate, and forming a layer of a second metal oxide by sputter deposition of a second metal in an oxygen environment. In some embodiments, the second metal oxide may be ruthenium dioxide, and the first metal layer may be gold, copper, platinum, silver or aluminum.
1. A method for forming an electrical contact for a switch, comprising:
forming a first layer of a first metal on a substrate; and
forming a second layer of an oxide of a second metal by sputter deposition of a second metal target in an environment of oxygen to form a second metal oxide layer over the first metal layer, wherein the second metal oxide does not contain the first metal, and wherein the second metal is ruthenium and the metal oxide layer is ruthenium dioxide.
2. The method of claim 1 , wherein the substrate is a silicon substrate, and wherein the first metal is at least one of gold, copper, platinum, silver and aluminum.
3. The method of claim 1 , wherein the first metal layer is between about 0.5-5.0 um thick.
4. The method of claim 1 , wherein the ruthenium dioxide is formed by sputter deposition of a ruthenium target in a low pressure oxygen environment.
5. The method of claim 1 , wherein the switch is a MEMS switch.
6. The method of claim 1 , wherein the oxygen environment has an oxygen partial pressure of about 0.5 mTorr to about 10 mTorr.
7. A method for forming an electrical contact for a switch, comprising:
forming a first-layer of a first metal on a substrate; and
forming a second layer of an oxide of a second metal by sputter deposition of a second metal target in an environment of oxygen to form a second metal oxide layer over the first metal layer, wherein the second metal oxide does not contain the first metal,
wherein the metal oxide is ruthenium dioxide at a thickness of between about 60 nm and about 120 nm.
8. The method of claim 1 , wherein the switch is a dual substrate MEMS switch.
9. The method of claim 1 , wherein a first substrate supports an incoming and an outgoing electrode, and a second substrate supports a movable gate electrode.
10. The method of claim 1 , wherein the incoming electrode, outgoing electrode and movable electrode each comprise a first metal layer and a second metal oxide layer deposited over the metal layer.
11. An electrical contact for a switch, comprising:
a first layer of a first metal on a substrate; and
a second layer of an oxide of a second metal, wherein the second layer of oxide of the second metal does not contain the first metal, and is disposed directly adjacent and in contact with the layer of the first metal, wherein the metal oxide is ruthenium dioxide at a thickness of between about 60 nm and about 120 nm.
12. The electrical contact of claim 11 , wherein the substrate is a silicon substrate, and wherein the first metal layer is at least one of gold, copper, platinum, silver and aluminum, wherein the second metal is ruthenium and the metal oxide layer is ruthenium dioxide.
13. The electrical contact of claim 11 , wherein the first metal layer is between about 0.5-5.0 um thick.
14. The electrical contact of claim 11 , wherein the ruthenium dioxide is formed by sputter deposition of a ruthenium target in a low pressure oxygen environment.
15. The electrical contact of claim 11 , wherein the switch is a MEMS switch.
16. The electrical contact of claim 14 , wherein the oxygen environment has an oxygen partial pressure of about 0.5 mTorr to about 10 mTorr.
17. An electrical contact for a switch, comprising:
a first metal layer of a first metal on a substrate; and
a second layer of a second metal oxide, wherein the second metal oxide does not contain the first metal, and is disposed directly adjacent and in contact with the first metal layer,
wherein the metal oxide is ruthenium dioxide at a thickness of between about 60 nm and about 120 nm.
18. The electrical contact of claim 11 , wherein the switch is a dual substrate MEMS switch.
19. The electrical contact of claim 18 , wherein a first substrate supports an incoming and an outgoing electrode, and a second substrate supports a movable gate electrode.
20. The electrical contact of claim 19 , wherein the incoming electrode, outgoing electrode and movable electrode each comprise a first metal layer and a second metal oxide layer deposited over the metal layer.