Slurry composition for chemical mechanical polishing of GE-based materials and devices
A CMP slurry composition which provides for a high Ge- or SiGe-to-dielectric material selectivity a low rate of Ge or SiGe recess formation includes an oxidant and a germanium removal rate enhancer including at least one of a methylpyridine compound and a methylpyridine derivative compound. In some examples, the slurry composition also includes an etching inhibitor. In some cases, the slurry composition may include an abrasive, a surfactant, an organic complexant, a chelating agent, an organic or inorganic acid, an organic or inorganic base, a corrosion inhibitor, or a buffer. The slurry composition may be distributed onto a surface of a polishing pad disposed on a platen that is configured to rotate. Additionally, a workpiece carrier configured to house a substrate may bring the substrate into contact with the rotating polishing pad and thereby polish the substrate utilizing the slurry composition.
1. A slurry composition for a chemical mechanical polish (CMP) process for semiconductor device fabrication, comprising:
an oxidant including a compound having one or more oxygen atoms; and
a germanium removal rate enhancer including at least one of a methylpyridine compound and a methylpyridine derivative compound.
2. The slurry composition of claim 1 , wherein the oxidant includes one or more of hydrogen peroxide, potassium peroxodisulfate, ammonium peroxodisulfate, sodium peroxodisulfate, potassium peroxymonosulfate, peracetic acid, and tert-butyl hydrogen peroxide.
3. The slurry composition of claim 1 , wherein the oxidant includes an oxidant concentration between approximately 10 ppm and 50,000 ppm.
4. The slurry composition of claim 1 , wherein the germanium removal rate enhancer includes the methylpyridine compound including at least one of 2-methylpyridine, 3-methylpyridine, and 4-methylpyridine.
5. The slurry composition of claim 1 , wherein the germanium removal rate enhancer includes the methylpyridine derivative compound including at least one of 2,3-dimethylpyridine, 2,4-dimethylpyridine, 2,6-dimethylpyridine, and 3,5-dimethylpyridine.
6. The slurry composition of claim 1 , wherein the germanium removal rate enhancer includes a germanium removal rate enhancer concentration between approximately 100 ppm and 5,000 ppm.
7. The slurry composition of claim 1 further comprising an etching inhibitor.
8. The slurry composition of claim 7 , wherein the etching inhibitor includes 2-mercaptopyridine N-oxide.
9. The slurry composition of claim 7 , wherein the etching inhibitor includes an etching inhibitor concentration of between approximately 100 ppm and 5,000 ppm.
10. The slurry composition of claim 1 further comprising an abrasive including at least one of colloidal silica, fumed silica, aluminum oxide, silica shell based composite submicron particles, and ceria.
11. The slurry composition of claim 1 further comprising at least one of a surfactant, an organic complexant, a chelating agent, an organic or inorganic acid, an organic or inorganic base, a corrosion inhibitor, and a buffer.
12. The slurry composition of claim 1 , wherein the slurry composition includes a slurry composition having a pH level in a range of between approximately 1 and 6.
13. A slurry composition for a chemical mechanical polish (CMP) process for semiconductor device fabrication, comprising:
an oxidant including a first compound;
a germanium removal rate enhancer including a second compound comprising a methylpyridine-based compound; and
an abrasive.
14. The slurry composition of claim 13 , wherein the oxidant includes one or more oxygen atoms.
15. The slurry composition of claim 13 , wherein the oxidant includes one or more of hydrogen peroxide, potassium peroxodisulfate, ammonium peroxodisulfate, sodium peroxodisulfate, potassium peroxymonosulfate, peracetic acid, and tert-butyl hydrogen peroxide.
16. The slurry composition of claim 13 , wherein the methylpyridine-based compound includes at least one of a methylpyridine compound and a methylpyridine derivative compound.
17. The slurry composition of claim 13 , wherein the oxidant includes an oxidant concentration between approximately 10 ppm and 50,000 ppm, and wherein the germanium removal rate enhancer includes a germanium removal rate enhancer concentration between approximately 100 ppm and 5,000 ppm.
18. A slurry composition, comprising:
an oxidant including a compound having one or more oxygen atoms;
a germanium removal rate enhancer including a methylpyridine-based compound; and
an etching inhibitor including an N-oxide compound.
19. The slurry composition of claim 18 , wherein the methylpyridine-based compound includes at least one of 2-methylpyridine, 3-methylpyridine, 4-methylpyridine, 2,3-dimethylpyridine, 2,4-dimethylpyridine, 2,6-dimethylpyridine, and 3,5-dimethylpyridine.
20. The slurry composition of claim 18 , wherein the N-oxide compound includes 2-mercaptopyridine N-oxide.