Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, and moving object
A substrate for a sensor includes: a base section; a movable section connected to the base section; an arm portion as a support portion extending along the movable section from the base section; a first gap portion having a protrusion portion in which one of the movable section and the arm portion protrudes toward the other of the movable section and the arm portion, and having a predetermined gap between the protrusion portion on one side and the other of the movable section and the support portion; and a second gap portion which is located further toward the base section side than the first gap portion has a gap wider than the predetermined gap, in which in the first gap portion, one of the movable section and the arm portion has a ridge portion on the side facing the first gap portion.
1. A sensor that includes a substrate for a sensor comprising:
a base section;
a movable section connected to the base section;
a support portion which extends along the movable section from the base section when viewed in a planar view as viewed from a thickness direction of the movable section;
a first gap portion having a protrusion portion in which one of the movable section and the support portion protrudes toward the other of the movable section and the support portion when viewed in the planar view, and having a predetermined gap between the protrusion portion on one side and the other of the movable section and the support portion; and
a second gap portion which is located further toward the base section side than the first gap portion when viewed in the planar view and has a gap wider than the predetermined gap,
wherein in the first gap portion, the protrusion portion has a ridge portion on the side facing the first gap portion when viewed in a cross-section perpendicular to an extension direction of the support portion.
2. The sensor that includes the substrate for a sensor according to claim 1 , wherein the support portions are disposed on both sides with the movable section interposed therebetween, when viewed in the planar view,
the first gap portions and the second gap portions are provided on both sides with the movable section interposed therebetween, and
the respective protrusion portions protrude in the same direction when viewed in the planar view.
3. A physical quantity detection sensor comprising:
the substrate for a sensor according to claim 2 ; and
a physical quantity detection element which has one end portion fixed to the base section and the other end portion fixed to the movable section and detects a physical quantity.
4. An acceleration sensor comprising:
the physical quantity detection sensor according to claim 3 ,
wherein acceleration is measured by the physical quantity detection sensor.
5. An electronic apparatus comprising:
the physical quantity detection sensor according to claim 3 .
6. A moving object comprising:
the physical quantity detection sensor according to claim 3 .
7. The sensor that includes the substrate for a sensor according to claim 1 , wherein the ridge portion is provided at substantially the center of a cross-section of the protrusion portion.
8. A physical quantity detection sensor comprising:
the substrate for a sensor according to claim 7 ; and
a physical quantity detection element which has one end portion fixed to the base section and the other end portion fixed to the movable section and detects a physical quantity.
9. An acceleration sensor comprising:
the physical quantity detection sensor according to claim 8 ,
wherein acceleration is measured by the physical quantity detection sensor.
10. An electronic apparatus comprising:
the physical quantity detection sensor according to claim 8 .
11. A moving object comprising:
the physical quantity detection sensor according to claim 8 .
12. The sensor that includes the substrate for a sensor according to claim 1 , wherein the ridge portion exhibits a trapezoidal shape in which a width narrows toward the tip portion side from the base end portion side of the movable section or the support portion when viewed in the planar view.
13. A physical quantity detection sensor comprising:
the substrate for a sensor according to claim 12 ; and
a physical quantity detection element which has one end portion fixed to the base section and the other end portion fixed to the movable section and detects a physical quantity.
14. The sensor that includes the substrate for a sensor according to claim 1 , wherein a quartz crystal Z-cut plate cut out in a Z-cut is used.
15. The sensor that includes the substrate for a sensor according to claim 14 , wherein the protrusion portion protrudes in a +X crystal axis direction of the quartz crystal Z-cut plate.
16. The sensor that includes the substrate for a sensor according to claim 1 , wherein a second gap length that is a length in a direction intersecting a gap width direction of the second gap portion is longer than a first gap length that is a length in a direction intersecting a gap width direction of the first gap portion.
17. A physical quantity detection sensor comprising:
the substrate for a sensor according to claim 1 ; and
a physical quantity detection element which has one end portion fixed to the base section and the other end portion fixed to the movable section and detects a physical quantity.
18. An acceleration sensor comprising:
the physical quantity detection sensor according to claim 17 ,
wherein acceleration is measured by the physical quantity detection sensor.
19. An electronic apparatus comprising:
the physical quantity detection sensor according to claim 17 .
20. A moving object comprising:
the physical quantity detection sensor according to claim 17 .