Physical quantity detection apparatus, measurement system, and measurement apparatus
A detecting element unit of a physical quantity detection apparatus includes a detection part and a supporting part. The detection part has a base part, a movable part coupled to the base part via a joint part, and a vibrator provided over the base part and the movable part, and the supporting part includes a fixing portion to be fixed to a base for supporting the base part. A processing unit of the physical quantity detection apparatus extracts vibration response signals at a resonance frequency of the detecting element unit from output of the vibrator.
1. A physical quantity detection apparatus comprising:
a detecting element unit having
a detection part having a base part, a movable part coupled to the base part via a joint part, and a vibrator provided over the base part and the movable part, and
a supporting part including a fixing portion to be fixed to a base for supporting the base part; and
a processing unit that extracts vibration response signals at a resonance frequency of the detecting element unit from output of the vibrator.
2. The physical quantity detection apparatus according to claim 1 , wherein the processing unit outputs amplitude information of the vibration response signals.
3. The physical quantity detection apparatus according to claim 2 , wherein the processing unit calculates physical quantity signals from output of the vibrator.
4. The physical quantity detection apparatus according to claim 3 , wherein the processing unit outputs one of the amplitude information and the physical quantity signals according to a command.
5. The physical quantity detection apparatus according to claim 3 , wherein, in the physical quantity signals, resonance frequency components of the detecting element unit are suppressed or removed.
6. The physical quantity detection apparatus according to claim 2 , wherein the amplitude information is envelope signals.
7. A measurement system comprising:
a physical quantity detection apparatus having a detecting element unit having a detection part having a base part, a movable part coupled to the base part via a joint part, and a vibrator provided over the base part and the movable part, and a supporting part including a fixing portion to be fixed to a base for supporting the base part, and a processing unit that extracts vibration response signals at a resonance frequency of the detecting element unit from output of the vibrator; and
a measurement apparatus that calculates attenuation characteristics of a structure based on the vibration response signals extracted by the physical quantity detection apparatus.
8. A measurement apparatus comprising a command output part that, to a physical quantity detection apparatus having a detecting element unit having a detection part having a base part, a movable part coupled to the base part via a joint part, and a vibrator provided over the base part and the movable part, and a supporting part including a fixing portion to be fixed to a base for supporting the base part, and a processing unit that extracts vibration response signals at a resonance frequency of the detecting element unit from output of the vibrator, outputs a command of instructing output one or both of amplitude information of the vibration response signals and physical quantity signals calculated from output of the vibrator.