Power device and fabricating method thereof
In one general aspect, a method of fabricating a power device can include preparing a semiconductor substrate of a first conductivity type, and forming a first Field Stop (FS) layer and a second FS layer.
1. A method of fabricating a power device, the method comprising:
forming a first Field Stop (FS) layer by implanting impurity ions of a first conductivity type in an upper surface of a semiconductor substrate of the first conductivity type;
forming a drift region by growing an epitaxial layer of the first conductivity type on the first FS layer, the drift region having an impurity density lower than an impurity density of the semiconductor substrate;
forming a base region of a second conductivity type in a portion of the surface of the drift region;
forming an emitter region of the first conductivity type in a portion of the surface of the base region;
forming a gate insulation layer on the drift region, the base region, and the emitter region;
forming a gate electrode on the gate insulation layer;
forming an emitter electrode on the base region and on the emitter region;
forming a second FS layer by grinding a lower surface of the semiconductor substrate; and
forming a collector region below the second FS layer, the first FS layer having a portion having an impurity density different than an impurity density of the second FS layer.
2. The method of claim 1 , wherein a sum of a thickness of the first FS layer and a thickness of the second FS layer is less than the thickness of the second FS layer when the first FS layer is not formed.
3. The method of claim 1 , wherein the forming the first FS layer includes diffusing the impurity ions by a heat treatment after implanting the impurity ions.
4. The method of claim 1 , wherein the first FS layer includes at least two layers formed with different impurities or different doping energies.
5. The method of claim 4 , wherein the at least two layers includes a first layer adjacent to the second FS layer, the first layer has an impurity density higher than an impurity density of a second layer from the at least two layers.
6. The method of claim 1 , wherein each of the second FS layer and the drift region has a constant impurity density profile along a depth direction, the second FS layer has an impurity density higher than an impurity density of the drift region, the impurity density of the first FS layer increases and then decreases to cancel a density difference between the second FS layer and the drift region.
7. The method of claim 1 , wherein the second FS layer has an impurity density of about 1E14 cm −3 to about 1E16 cm −3 , and the first FS layer includes a portion having an impurity density of about 1E15 cm −3 to about 1E17 cm −3 .
8. The method of claim 1 , wherein each of the base region and the emitter region is formed by selectively implanting corresponding ions in a predetermined part and diffusing the implanted impurity ions by a heat treatment,
the collector region is formed by implanting corresponding ions into the lower surface of the semiconductor substrate, after the grinding of the semiconductor substrate, and diffusing the implanted impurity ions by a heat treatment.
9. A method, comprising:
forming a first field stop (FS) layer of a first conductivity type;
forming a drift region by growing an epitaxial layer of the first conductivity type disposed on the first FS layer;
forming a base region of a second conductivity type disposed in an upper portion of the drift region;
forming an emitter region of the first conductivity type disposed in an upper portion of the base region;
forming a gate electrode on a gate insulation layer, the gate electrode being disposed adjacent to the base region and being disposed between the drift region and the emitter region;
forming a second FS layer of the first conductivity type; and
forming a collector region of the second conductivity type disposed below the second FS layer, the first FS layer having a portion having an impurity density higher than an impurity density of the second FS layer,
each of the second FS layer and the drift region having a constant impurity density profile along a depth direction, the impurity density of the second FS layer being higher than the impurity density of the drift region, the first FS layer canceling a density difference between the second FS layer and the drift region.
10. The method of claim 9 , wherein the second FS layer is formed by grinding a lower surface of a semiconductor substrate without at least one of an ion process or an annealing process.
11. A method, comprising:
forming a first field stop (FS) layer of a first conductivity type;
forming a drift region by growing an epitaxial layer of the first conductivity type disposed on the first FS layer;
forming a base region of a second conductivity type disposed in an upper portion of the drift region;
forming an emitter region of the first conductivity type disposed in an upper portion of the base region;
forming a gate electrode on a gate insulation layer, the gate electrode being disposed adjacent to the base region and being disposed between the drift region and the emitter region;
forming a second FS layer of the first conductivity type; and
forming a collector region of the second conductivity type disposed below the second FS layer, the first FS layer having a portion having an impurity density different than an impurity density of the second FS layer, the first FS layer having a maximum impurity density at a first portion, the first FS layer having an impurity density increasing from the second FS layer to the first portion and decreasing from the first portion to the drift region.
12. The method claim 11 , wherein the impurity density decreases at a portion of the first FS layer, the portion of the first FS layer contacts the drift region.
13. The method of claim 11 , wherein the first FS layer includes at least two layers with different impurities.
14. The method of claim 13 , wherein the at least two layers includes a first layer adjacent to the second FS layer, the first layer has an impurity density higher than an impurity density of a second layer from the at least two layers.
15. The method of claim 13 , wherein the at least two layers includes a layer adjacent to the drift region, the layer has an impurity density lower than the impurity density of the second FS layer.
16. The method of claim 11 , wherein the second FS layer has an impurity density of about 1E14 cm −3 to about 1E16 cm −3 , and the first FS layer includes a portion having an impurity density of about 1E15 cm −3 to about 1E17 cm −3 .
17. The method of claim 11 , further comprising:
an emitter electrode electrically connected to the emitter region; and
a collector electrode electrically connected to the collector region.
18. The method of claim 11 , wherein the second FS layer includes a Czochralski (CZ) single-crystal.
19. The method of claim 11 , wherein the second FS layer is formed by grinding a lower surface of a semiconductor substrate.