IP Library Granted Patent US 10,096,556
Granted Patent B2
US 10,096,556 · App. 15/409,786 · Granted Oct 9, 2018

Semiconductor device

Inventor: Takayuki Kumai (Kanagawa, JP)
Assignee: TOSHIBA MEMORY CORPORATION
H01L23/562H01L23/544H01L23/585H01L29/045H01L29/16H01L2223/5446
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Quick Facts
Patent No.
US 10,096,556
App. No.
15/409,786
Granted
Oct 9, 2018
Kind
B2
Abstract

A semiconductor device includes a substrate and a conductive layer. The substrate has an upper surface that is a substantially rectangular shape having a pair of two sides extending in a first direction and a pair of two sides extending in a second direction. The conductive layer is provided on the substrate and extending along a periphery of the substrate. The conductive layer extends and zigzags toward the first direction.

Claims (30)

1. A semiconductor device comprising:

a substrate having an upper surface that is a substantially rectangular shape having a pair of two sides extending in a first direction and a pair of two sides extending in a second direction;

a conductive layer provided on the substrate and extending along a periphery of the substrate, wherein the conductive layer extends and zigzags toward the first direction; and

an insulation layer provided in an upper portion of the substrate, wherein the insulation layer extends and zigzags toward the first direction,

wherein the conductive layer includes a first conductive layer and a second conductive layer, the first conductive layer being provided adjacent to the second conductive layer toward the second direction,

wherein the first conductive layer includes a first portion and a second portion, the first portion extending in a third direction crossing the first direction and the second direction, the second portion extending in a fourth direction crossing the first direction, the second direction and the third direction.

2. The semiconductor device according to the claim 1 , wherein the first conductive layer includes a curve line portion between the first portion and the second portion.

3. The semiconductor device according to the claim 1 , wherein the second conductive layer includes a third portion extending in the fourth direction and a fourth portion extending in the third direction, such that an extension of the first portion crosses the third portion and an extension of the second portion crosses the fourth portion.

4. The semiconductor device according to the claim 1 , wherein the insulation layer includes a first insulation layer and a second insulation layer, the first insulation layer being provided adjacent to the second insulation layer toward the second direction.

5. The semiconductor device according to the claim 4 , wherein the first insulation layer includes a fifth portion and a sixth portion, the fifth portion extending in a fifth direction crossing the first direction and the second direction, the sixth portion extending in a sixth direction crossing the first direction, the second direction and the fifth direction.

6. The semiconductor device according to the claim 5 , wherein the first insulation layer includes a curve line portion between the fifth portion and the sixth portion.

7. The semiconductor device according to the claim 5 , wherein the second insulation layer includes a seventh portion extending in the sixth direction and an eighth portion extending in the fifth direction such that an extension of the fifth portion crosses the seventh portion and an extension of the sixth portion crosses the eighth portion.

8. A semiconductor device comprising:

a substrate having an upper surface that is a substantially rectangular shape having a pair of two sides extending in a first direction and a pair of two sides extending in a second direction;

a conductive layer provided on the substrate and extending along a periphery of the substrate, wherein the conductive layer extends and zigzags toward the first direction; and

an insulation layer provided in an upper portion of the substrate, wherein the insulation layer extends and zigzags toward the first direction,

wherein the substrate includes a silicon crystal, and

a (100) direction of the silicon crystal or a 010 direction of the silicon crystal cross the first direction.

9. A semiconductor device comprising:

a substrate having an upper surface that is a substantially rectangular shape having a pair of two sides extending in a first direction and a pair of two sides extending in a second direction;

a conductive layer provided on the substrate and extending along a periphery of the substrate, wherein the conductive layer includes a plurality of first portions extending in a third direction and a plurality of second portions extending in a fourth direction; and

an insulation layer provided in an upper portion of the substrate, wherein the insulation layer includes a plurality of third portions extending in the third direction and a plurality of fourth portions extending in the fourth direction,

wherein the conductive layer includes a curve line portion between at least one of the first portions and one of the second portions.

10. The semiconductor device according to the claim 9 , wherein the conductive layer includes a first conductive layer and a second conductive layer, the first conductive layer being provided adjacent to the second conductive layer toward the second direction.

11. The semiconductor device according to the claim 10 , wherein an extension of one of the first portions of the first conductive layer crosses one of the second portions of the second conductive layer, and an extension of one of the second portions of the first conductive layer crosses one of the first portions of the second conductive layer.

12. The semiconductor device according to the claim 9 , wherein the insulation layer includes a first insulation layer and a second insulation layer, the first insulation layer being provided adjacent to the second insulation layer toward the second direction.

13. The semiconductor device according to the claim 9 , wherein the first insulation layer includes a curve line portion between the third portions and the fourth portions.

14. The semiconductor device according to the claim 12 , wherein an extension of the third portion of the first insulation layer crosses the fourth portion of the second insulation layer, and an extension of the fourth portion of the first insulation layer crosses the third portion of the second insulation layer.

15. The semiconductor device according to the claim 9 , wherein the substrate includes a silicon crystal, and

a (100) direction of the silicon crystal or a (010) direction of the silicon crystal cross the first direction.

Assignments (5)
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 21, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043063/0178 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 19, 2017
From: KUMAI, TAKAYUKI
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 041015/0111 →
Priority Claims (1)
JP 2016-101542 · May 20, 2016 · national
Continuity (1)
Related Publication 20170338187A1 · Nov 23, 2017