Method for fabricating an electronic device and a stacked electronic device
A method for fabricating an electronic device includes fixing a rear face of an integrated-circuit chip to a front face of a support wafer. An infused adhesive is applied in the form of drops or segments that are separated from each other. A protective wafer is applied to the infused adhesive, and the infused adhesive is cured. The infused adhesive includes a curable adhesive and solid spacer elements infused in the curable adhesive. A closed intermediate peripheral ring is deposited on the integrated-circuit chip outside the cured infused adhesive, and an encapsulation block is formed such that it surrounds the chip, the protective wafer and the closed intermediate peripheral ring.
1. A method for fabricating an electronic device, comprising:
fixing a rear face of an integrated-circuit chip on a front face of a support wafer;
depositing on a front face of the integrated-circuit chip an infused adhesive in a plurality of drops or segments separated from each other outside a central region of the front face of the integrated-circuit chip, the infused adhesive comprising a curable adhesive and solid spacer elements infused in the curable adhesive;
placing a protective wafer on the infused adhesive so that a free space remains between the front face of the integrated-circuit chip and the protective wafer;
curing the infused adhesive to fix the protective wafer to the integrated-circuit chip;
depositing a closed intermediate peripheral ring on the integrated-circuit chip outside of the cured infused adhesive; and
producing on a peripheral zone of the front face of the support wafer an encapsulation block around the integrated-circuit chip, the protective wafer, and the closed intermediate peripheral ring.
2. The method of claim 1 wherein curing the infused adhesive comprises exposing the infused adhesive to heat to polymerize the curable adhesive and thereby release gas.
3. The method of claim 2 wherein the curable adhesive comprises an epoxy resin.
4. The method of claim 1 further comprising curing the closed intermediate peripheral ring.
5. The method of claim 4 wherein curing the closed intermediate peripheral ring comprises exposing the closed intermediate peripheral ring to ultraviolet radiation, the curing of the closed intermediate peripheral ring occurring without releasing gas.
6. The method of claim 1 wherein the closed intermediate peripheral ring is deposited at least partially outside the protective wafer.
7. The method of claim 1 further comprising wire bonding front pads of the integrated-circuit chip to an electrical connection network associated with the support wafer.
8. The method of claim 1 wherein producing the encapsulation block comprises spreading an epoxy resin.
9. The method of claim 1 wherein producing the encapsulation block comprises injection molding a liquid material.
10. The method of claim 1 wherein the infused adhesive is deposited using a dispensing needle.
11. The method of claim 1 wherein the closed intermediate peripheral ring is deposited using a dispensing needle.
12. The method of claim 1 wherein the integrated-circuit chip is applied to the support wafer with a thin layer of adhesive.
13. The method of claim 1 further comprising cutting through the support wafer and the encapsulation block to form the electronic device.