IP Library Granted Patent US 10,032,709
Granted Patent B2
US 10,032,709 · App. 15/412,993 · Granted Jul 24, 2018

Embedding thin chips in polymer

Inventors: Conor Rafferty (Newton, MA); Mitul Dalal (South Grafton, MA)
Assignee: MC10, INC.
H01L23/4985H01L21/56H01L21/6836H01L23/16H01L23/3107H01L23/3121H01L23/49822H01L23/49827H01L23/5389H01L24/03H01L24/05H01L24/06H01L24/29H01L24/82H05K1/189H01L2221/68327H01L2221/68381H01L2224/02379H01L2224/036H01L2224/03436H01L2224/0401H01L2224/04105H01L2224/05144H01L2224/05155H01L2224/05166H01L2224/05171H01L2224/05184H01L2224/05548H01L2224/293H01L2224/2919H01L2224/2929H01L2224/32225H01L2224/32245H01L2224/73267H01L2224/8203H01L2224/82039H01L2224/83132H01L2224/83192H01L2224/92244H01L2924/07802H01L2924/12042H01L2924/12043H01L2924/15153H05K1/0283H05K1/185H05K2203/1469
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Quick Facts
Patent No.
US 10,032,709
App. No.
15/412,993
Granted
Jul 24, 2018
Kind
B2
Abstract

Systems and methods are provided for the embedding of thin chips. A well region is generated in a substrate that includes a conductive material disposed on a flexible polymer. The standoff well region can be generated by pattern the conductive material, where the thin chip is embedded in the standoff well region. A cavity can be generated in the polymer layer to form a polymer well region, where the thin chip is embedded in the polymer well region.

Claims (31)

1. An apparatus comprising:

A) a substrate comprising a standoff well region, wherein:

the substrate comprises a layer of a first conductive material disposed on a layer of a flexible and stretchable polymer, and

a patterned portion of the first conductive material comprises a standoff bordering a portion of exposed flexible and stretchable polymer, thereby forming the standoff well region; and

B) a sensor disposed within the standoff well region on a portion of the exposed flexible and stretchable polymer proximate to the standoff.

2. The apparatus of claim 1 , wherein the sensor is embedded in the portion of the exposed flexible and stretchable polymer proximate to the standoff.

3. The apparatus of claim 1 , wherein a height of the standoff greater than or about equal to a height of the sensor.

4. The apparatus of claim 1 , wherein the standoff completely surrounds the sensor.

5. The apparatus of claim 1 , wherein the standoff includes at least one gap between a plurality of standoffs that define the standoff well region.

6. An apparatus comprising:

A) a substrate comprising a standoff well region, wherein:

the substrate comprises a layer of a first conductive material disposed on a layer of a flexible and stretchable polymer, and

a patterned portion of the first conductive material comprises a standoff bordering a portion of exposed flexible and stretchable polymer, thereby forming the standoff well region; and

B) an electrical interconnect disposed within the standoff well region on a portion of the exposed flexible and stretchable polymer proximate to the standoff.

7. The apparatus of claim 6 , wherein the electrical interconnect is embedded in the portion of the exposed flexible and stretchable polymer proximate to the standoff.

8. The apparatus of claim 6 , wherein a height of the standoff greater than or about equal to a height of the electrical interconnect.

9. The apparatus of claim 6 , wherein the electrical interconnect is a stretchable serpentine interconnect.

10. The apparatus of claim 6 , wherein the electrical interconnect is one or more interconnects electrically connecting a plurality of device islands.

11. The apparatus of claim 10 , wherein a height of the standoff is greater than or equal to a height of the one or more electrical interconnects and the plurality of device islands.

12. The apparatus of claim 10 , wherein the plurality of device islands include one or more thinned chips disposed on the flexible and stretchable polymer.

13. The apparatus of claim 10 , further comprising at least one additional layer disposed on the first conductive material or on the flexible and stretchable polymer, wherein the at least one additional layer positions the one or more interconnects and the plurality of device islands at a neutral mechanical plane of the apparatus.

14. The apparatus of claim 6 , wherein the standoff completely surrounds the electrical interconnect.

15. The apparatus of claim 6 , wherein the standoff includes at least one gap between a plurality of standoffs that define the standoff well region.

16. A method for embedding electrical interconnects, the method comprising:

A) providing a substrate comprising a standoff well region, wherein:

the substrate comprises a layer of a first conductive material disposed on a layer of a flexible and stretchable polymer, and

a patterned portion of the first conductive material comprises a standoff bordering a portion of exposed flexible and stretchable polymer, thereby forming the standoff well region; and

B) disposing an electrical interconnect on a portion of the exposed flexible and stretchable polymer proximate to the standoff.

17. The method of claim 16 , wherein the electrical interconnect is further embedded in the portion of the exposed flexible and stretchable polymer proximate to the standoff.

18. The method of claim 16 , wherein the electrical interconnect is a stretchable serpentine interconnect.

19. The method of claim 16 , wherein the electrical interconnect is a one or more interconnects electrically connecting a plurality of device islands.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 18, 2020
From: BRAEMAR ENERGY VENTURES III, L.P.; NORTH BRIDGE VENTURE PARTNERS VI, L.P.; NORTH BRIDGE VENTURE PARTNERS 7, L.P.; ABERDARE VENTURES IV, LP; ABERDARE PARTNERS IV, LP; WINDHAM LIFE SCIENCES PARTNERS, LP; WINDHAM-MC INVESTMENT I, LLC; LABORATORY CORPORATION OF AMERICA HOLDINGS
To: MC10, INC.
Reel/Frame 054456/0903 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 18, 2020
From: MC10, INC.
To: MEDIDATA SOLUTIONS, INC.
Reel/Frame 054476/0075 →
SECURITY INTEREST Recorded Apr 2, 2020
From: MC10, INC.
To: BRAEMAR ENERGY VENTURES III, L.P.; NORTH BRIDGE VENTURE PARTNERS VI, L.P.; NORTH BRIDGE VENTURE PARTNERS 7, L.P.; ABERDARE VENTURES IV, LP; ABERDARE PARTNERS IV, LP; WINDHAM LIFE SCIENCES PARTNERS, LP; WINDHAM-MC INVESTMENT I, LLC; LABORATORY CORPORATION OF AMERICA HOLDINGS
Reel/Frame 052296/0969 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 3, 2017
From: RAFFERTY, CONOR; DALAL, MITUL
To: MC10, INC.
Reel/Frame 041827/0552 →
Continuity (4)
Continuation 14859112 · Sep 18, 2015
Continuation 13844638 · Mar 15, 2013
Provisional Application 61711629 · Oct 9, 2012
Related Publication 20170200670A1 · Jul 13, 2017
Cited By (7)
US 1,123,167 US 12,279,853 US 12,329,497 US 12,414,699 US 12,575,741 US 12,575,773 US 12,575,791