Gas sensor including first electrode, second electrode, metal oxide layer, and insulating film, and fuel-cell vehicle including the gas sensor
A gas sensor includes a first electrode having a first main surface and a second main surface opposite to the first main surface; a second electrode having a third main surface facing the second main surface and a fourth main surface opposite to the third main surface; a metal oxide layer disposed between the first electrode and the second electrode, and being in contact with the second main surface and the third main surface; and an insulating film covering at least a part of the first electrode, a part of the second electrode, and at least a part of the metal oxide layer. At least a part of the fourth main surface is exposed to gas which contains a gas molecule including a hydrogen atom. A resistance value of the metal oxide layer decreases when the second electrode is in contact with the gas molecule.
1. A gas sensor comprising:
a first electrode having a first main surface and a second main surface opposite to the first main surface;
a second electrode having a third main surface facing the second main surface of the first electrode and a fourth main surface opposite to the third main surface;
a metal oxide layer comprising only a single layer of metal oxide disposed between the first electrode and the second electrode, and being in contact with the second main surface of the first electrode and the third main surface of the second electrode;
an insulating film covering at least a part of the first electrode, a part of the second electrode, and at least a part of the metal oxide layer, wherein:
at least a part of the fourth main surface of the second electrode is not covered with the insulating film and is exposed to gas which contains a gas molecule including a hydrogen atom; and
the metal oxide layer includes a local region being in contact with the second electrode and has a resistance value that decreases with changing oxygen deficiency level in the local region when the second electrode is in contact with the gas molecule; and
a via passing through the insulating film in a portion covering the part of the second electrode and in direct physical contact with the second electrode,
wherein a degree of oxygen deficiency of a metal oxide contained in the local region is larger than a degree of oxygen deficiency of a metal oxide contained in a portion other than the local region in the metal oxide layer.
2. The gas sensor according to claim 1 , wherein
the second electrode contains a material having a catalytic action of releasing the hydrogen atom from the gas molecule.
3. The gas sensor according to claim 1 , wherein
the second electrode contains at least one selected from the group consisting of platinum, palladium, and an alloy of platinum and palladium.
4. The gas sensor according to claim 1 , wherein
the first metal oxide is a transition metal oxide or aluminum oxide.
5. The gas sensor according to claim 4 , wherein
the transition metal oxide is one selected from the group consisting of tantalum oxide, hafnium oxide, and zirconium oxide.
6. The gas sensor according to claim 1 , wherein
the metal oxide layer is a layer having a property of reversibly transiting between a high resistance state and a low resistance state showing a lower resistance value than the high resistance state based on a voltage applied between the first electrode and the second electrode.
7. The gas sensor according to claim 1 , wherein
an area of the metal oxide layer being in contact with the second main surface of the first electrode is smaller than an area of the metal oxide layer being in contact with the third main surface of the second electrode.
8. The gas sensor according to claim 1 further comprising:
a measurement circuit that, in operation, measures current flowing in the metal oxide layer when a voltage is applied between the first electrode and the second electrode.
9. The gas sensor according to claim 1 further comprising:
a power supply circuit that, in operation, applies a voltage between the first electrode and the second electrode.
10. The gas sensor according to claim 1 , wherein the local region generates heat by current flowing between the first electrode and the second electrode to reduce the resistance value of the metal oxide layer.
11. The gas sensor according to claim 1 further comprising:
a conductor connected to the via.
12. The gas sensor according to claim 11 , wherein
the via is disposed at a position not directly above the first electrode.
13. A fuel-cell vehicle comprising:
a passenger compartment;
a gas tank chamber accommodating a hydrogen gas tank;
a fuel cell chamber accommodating a fuel cell; and
a gas sensor comprising:
a first electrode having a first main surface and a second main surface opposite to the first main surface;
a second electrode having a third main surface facing the second main surface of the first electrode and a fourth main surface opposite to the third main surface;
a metal oxide layer comprising only a single layer of metal oxide disposed between the first electrode and the second electrode, and being in contact with the second main surface of the first electrode and the third main surface of the second electrode; and
an insulating film covering at least a part of the first electrode, a part of the second electrode, and at least a part of the metal oxide layer, wherein:
at least a part of the fourth main surface of the second electrode is not covered with the insulating film and is exposed to gas which contains a gas molecule including a hydrogen atom;
the metal oxide layer includes a local region being in contact with the second electrode and has a resistance value that decreases with changing oxygen deficiency level in the local region when the second electrode is in contact with the gas molecule; and
the gas sensor is disposed in at least one selected from the group consisting of the gas tank chamber and the fuel cell chamber; and
a via passing through the insulating film in a portion covering the part of the second electrode and in direct physical contact with the second electrode,
wherein a degree of oxygen deficiency of a metal oxide contained in the local region is larger than a degree of oxygen deficiency of a metal oxide contained in a portion other than the local region in the metal oxide layer.