Method of manufacturing display device
View Patent ↗A substrate including a light-emitting element and a terminal for connection to the outside is prepared. The light-emitting element includes a light-emitting layer, an anode, and a cathode. The anode and the cathode interpose the light-emitting layer therebetween. A sealing layer is formed on the substrate so as to cover the light-emitting element and the terminal. An amorphous carbon film is formed on the sealing layer so as to cover a region above the light-emitting element and avoid a region above the terminal. The sealing layer is dry-etched so as to expose the terminal from the sealing layer using the amorphous carbon film as a mask. The amorphous carbon film is removed.
1. A method of manufacturing a display device, comprising the steps of:
preparing a substrate including a light-emitting element and a terminal for connection to the outside, the light-emitting element including a light-emitting layer, an anode, and a cathode, the anode and the cathode interposing the light-emitting layer therebetween;
forming a sealing layer on the substrate so as to cover the light-emitting element and the terminal;
forming an amorphous carbon film on the sealing layer by evaporation so as to cover a region above the light-emitting element and avoid a region above the terminal, by masking the region above the terminal with a metal mask;
dry-etching the sealing layer so as to expose the terminal from the sealing layer using the amorphous carbon film as a mask; and
removing the amorphous carbon film.
2. The method of manufacturing a display device according to claim 1 , wherein
the step of forming the sealing layer includes the steps of
forming a first inorganic layer,
forming an organic layer on the first inorganic layer, and
forming a second inorganic layer so as to cover the organic layer and include a portion that directly lies on the first inorganic layer.
3. The method of manufacturing a display device according to claim 2 , wherein
in the step of forming the amorphous carbon film, the amorphous carbon film, is formed so as to also lie on a portion of the portion of the second inorganic layer directly lying on the first inorganic layer.
4. The method of manufacturing a display device according to claim 1 , wherein
the step of removing the amorphous carbon film is performed by washing with water.
5. The method of manufacturing a display device according to claim 1 , wherein
in the step of preparing the substrate, the substrate is prepared so as to include the light-emitting element and the terminal in each of a plurality of product regions, and
in the step of forming the amorphous carbon film, the amorphous carbon film is formed to avoid a region between the product regions adjacent to each other.