Wafer level chip scale semiconductor package
This disclosure relates to a method of forming a wafer level chip scale semiconductor package, the method comprising: providing a carrier having a cavity formed therein; forming electrical contacts at a base portion and sidewalls portions of the cavity; placing a semiconductor die in the base of the cavity; connecting bond pads of the semiconductor die to the electrical contacts; encapsulating the semiconductor die; and removing the carrier to expose the electrical contacts, such that the electrical contacts are arranged directly on the encapsulation material.
1. A method of forming a wafer level chip scale semiconductor package, the method comprising:
providing a carrier having a cavity formed therein;
forming electrical contacts at a base portion and sidewalls portions of the cavity, wherein forming the electrical contacts comprises plating the base, the sidewalls of the cavity, and an upper major surface of the carrier;
placing a semiconductor die in the base of the cavity;
connecting bond pads of the semiconductor die to the electrical contacts by wire bonding at least one bond pad of the bond pads to at least one electrical contact of the electrical contacts at the upper major surface of the carrier;
encapsulating the semiconductor die; and
removing the carrier to expose the electrical contacts, such that the electrical contacts are arranged directly on the encapsulation material.
2. The method of claim 1 , wherein the carrier is removed by etching.
3. The method of claim 1 , wherein the electrical contacts are formed by a rough plating process.
4. The method of claim 1 , wherein the electrical contacts comprise nickel.
5. The method of claim 1 , wherein the electrical contacts form the terminals wafer level chip scale semiconductor package.
6. A wafer level chip scale semiconductor package comprising:
a semiconductor die encapsulated in an encapsulation material, said encapsulation having side walls and base and forming a lip at a top of the side walls away from the base;
a plurality of electrical contacts, wherein each of the plurality of electrical contacts are arranged directly on the encapsulation material; and
bond pads of the semiconductor die are connected to respective electrical contacts, wherein said each of said electrical contacts extend from a base portion to a side wall portion and on the lip of the encapsulation material, at least a bond pad of the bond pads is connected by wire bond to at least one electrical contact of the electrical contacts at the lip of the encapsulant;
wherein the electrical contacts are rough plated.
7. The wafer level chip scale semiconductor package of claim 6 wherein the electrical contacts comprise nickel.
8. The wafer level chip scale semiconductor package of claim 6 , wherein the electrical contacts form the terminals wafer level chip scale semiconductor package.
9. The method of claim 1 , wherein connecting the bond pads includes wire bonding the bond pads of the semiconductor die to the electrical contacts.
10. The method of claim 1 , wherein connecting the bond pads includes bonding at least one bond pad of the bond pads of the semiconductor die to at least one electrical contact of the electrical contacts using solder bumps.
11. The method of claim 1 , wherein placing the semiconductor die in the base on the cavity includes placing the semiconductor die to contact at least one of the electrical contacts with a bottom surface of the semiconductor die.
12. The method of claim 11 , wherein at least one other electrical contact of the electrical contacts does not contact the bottom of the semiconductor die.
13. The method of claim 1 , wherein at least two of the electrical contacts formed at the based and sidewalls portions of the cavity are electrically isolated from each other.
14. The method of claim 1 , wherein the carrier is formed of a plastic.
15. The method of claim 1 , wherein the carrier is formed of copper or aluminum.
16. The method of claim 1 , wherein the electrical contacts include silver or copper.
17. The method of claim 1 , wherein the electrical contacts include an alloy comprising gold, nickel, or palladium.
18. The wafer level chip scale semiconductor package of claim 6 , wherein at least some of the bond pads are connected to respective electrical contacts using solder bumps.
19. The method of claim 1 , wherein placing the semiconductor die in the base on the cavity includes placing the semiconductor die to directly contact the carrier.
20. The method of claim 1 , wherein encapsulating the semiconductor die includes encapsulating to extend above the cavity and over the upper major surface of the carrier.