Microfabricated cell sorter using pressure pulse

1. A microfabricated particle sorting device fabricated on a substrate, that separates a target particle from non-target material flowing in a fluid stream, the particle separation device comprising:

a detection region which generates a signal distinguishing the target particle from non-target material;

a sample inlet channel, a sort channel and a waste channel also fabricated on the same substrate, wherein the target particle is urged into the sort channel rather than the waste channel by a transient pulse of fluidic pressure; wherein the pulse of pressure is generated by an actuator fabricated on the same substrate as the sample inlet channel, wherein the transient pulse has a higher pressure in one location and a lower pressure in another location, than the surrounding fluid, wherein the higher pressure and the lower pressure direct the target particle into the sort channel.

2. The microfabricated particle sorting device of claim 1 , wherein the transient pulse has a higher pressure than the surrounding fluid, and wherein the higher pressure pushes the target particle into the sort channel.

3. The microfabricated particle sorting device of claim 1 , wherein the transient pulse has a lower pressure than the surrounding fluid, and wherein the lower pressure pulls the target particle into the sort channel.

4. The microfabricated particle sorting device of claim 1 , wherein the transient pulse is generated at the tip of a tapered nozzle formed in the substrate, and wherein the tapered nozzle and the sort channel are disposed at a non-orthogonal angle with respect to the waste channel, and disposed across the waste channel with respect to one another, and downstream of a laser interrogation region.

5. The microfabricated particle sorting device of claim 1 , wherein the transient pressure pulse is applied at an angle to a centerline of the sample stream, and the angle is between 30 and 60 degrees.

6. The microfabricated particle sorting device of claim 1 , wherein the actuator operates based on at least one of electrostatic, electromagnetic and piezoelectric forces.

7. The microfabricated particle sorting device of claim 1 , wherein the waste channel is disposed substantially orthogonally to a plane that contains the sort and the sample inlet channel.

8. The microfabricated particle sorting device of claim 4 , wherein the tapered nozzle width is between 3 microns and 15 microns.

9. The microfabricated particle sorting device of claim 1 , wherein the fluid stream is briefly diverted to the sort channel as the actuator is released into a quiescent state.

10. The microfabricated particle sorting device of claim 1 , wherein the fluid stream is briefly diverted to the sort channel as the actuator is driven from a quiescent state to an actuated state.

11. The microfabricated particle sorting device of claim 1 , where in the sample inlet stream flows to the sort channel with the actuator in the quiescent state.

12. The microfabricated particle sorting device of claim 1 , where in the actuator is actuated by electromagnetic forces arising between an external electromagnet and a permeable material inlaid into a movable member.

13. The microfabricated particle sorting device of claim 12 , wherein the movable member moves in response to the energizing of the external electromagnet, and moves in the plane that also contains the sample inlet channel and the sort channel is actuated by electromagnetic forces arising between an external electromagnet and a permeable material inlaid into the movable member.

14. The microfabricated particle sorting device of claim 13 , wherein the movable member is solidly connected to the substrate with an isthmus of substrate material remaining after formation of the movable member, wherein this isthmus of substrate material provides restoring force to return the movable member to its original position when the electromagnet is de-energized.

15. The microfabricated particle sorting device of claim 14 , where in the movable member is disposed over the waste channel over at least a portion of its movement, such that a passage exists for the target particle to flow from the sample inlet channel to the waste channel with the movable member in a predefined position in the plane.

16. The microfabricated particle sorting device of claim 1 , wherein the detection region is a laser interrogation region, wherein laser radiation is applied to the sample stream.

17. The microfabricated particle sorting device of claim 16 , wherein the sample stream includes suspended target particles which are tagged with a fluorescent tag that interacts with the laser radiation to emit an identifying optical signal.

18. The microfabricated particle sorting device of claim 1 , wherein the detection region measures at least one of a mechanical, optical, electrical, magnetic or chemical property of the target particle, to distinguish the target particle from non-target material.

19. The microfabricated particle sorting device of claim 12 , wherein the external electromagnetic having a coil wrapped around a single permeable core having a north pole and a south pole, with magnetic flux emanating from the north pole, going through space and returning to the south pole of the permeable core.