Display device and method of manufacturing a display device
View Patent ↗A manufacturing method of a display device in an embodiment according to the present invention, the method includes forming a terminal electrode in a terminal part of a first substrate, forming a pixel electrode corresponding to each pixel in a pixel part of the first substrate, forming a first intermediate layer in a region including the terminal electrode of the terminal part, forming an organic layer above the pixel electrode in the pixel part, forming a counter electrode layer above the first substrate including the pixel part and the terminal part, forming a passivation layer above the counter electrode layer, arranging a second substrate opposing the pixel part and bonding the first substrate and the second substrate using a sealing member enclosing the pixel part, and removing the first intermediate layer, the counter electrode layer and the passivation layer in the terminal part.
1. A manufacturing method of a display device, the method comprising:
forming a terminal electrode in a terminal part of a first substrate;
forming a pixel electrode corresponding to each pixel in a pixel part of the first substrate;
forming a first intermediate layer in a region including the terminal electrode of the terminal part;
forming an organic layer above the pixel electrode in the pixel part;
forming a counter electrode layer above the first substrate including the pixel part and the terminal part;
forming a passivation layer above the counter electrode layer;
arranging a second substrate opposing the pixel part and bonding the first substrate and the second substrate using a sealing member enclosing the pixel part; and
removing the first intermediate layer, the counter electrode layer and the passivation layer in the terminal part,
wherein the first intermediate layer is formed using amorphous carbon.
2. The manufacturing method of a display device according to claim 1 , the method further comprising:
forming a second intermediate layer between the pixel electrode and the organic layer,
wherein the second intermediate layer is arranged separate from the first intermediate layer.
3. The manufacturing method of a display device according to claim 1 , wherein the first intermediate layer, the counter electrode layer and the passivation layer in the terminal part are removed after an end surface of the terminal part is exposed.
4. The manufacturing method of a display device according to claim 2 , wherein the second intermediate layer is formed using amorphous carbon.
5. The manufacturing method of a display device according to claim 1 , wherein the first intermediate layer, the counter electrode layer and the passivation layer are removed by a pure water process.
6. The manufacturing method of a display device according to claim 1 , wherein the terminal part is formed by stacking a metal layer and a conductive metal oxide layer, and the first intermediate layer is formed above the conductive metal oxide layer.
7. The manufacturing method of a display device according to claim 5 , wherein the counter electrode layer and the passivation layer are peeled away from a boundary between the conductive metal oxide layer and the first intermediate layer.
8. The manufacturing method of a display device according to claim 5 , wherein an insulation layer is formed having an end part located in a region on an inner side from an external end part of the conductive metal oxide layer in the terminal part, and the first intermediate layer is formed on an upper surface of the conductive metal oxide layer and the insulation layer.
9. The manufacturing method of a display device according to claim 8 , wherein an end part of the counter electrode layer and an end part of the passivation layer are formed located over the insulation layer.