Semiconductor device manufacturing method
View Patent ↗A semiconductor device manufacturing method includes stacking a second semiconductor chip on a first surface of a first semiconductor chip such that the at bump electrode overlies the position of a first through silicon via in the first semiconductor chip, stacking a third semiconductor chip on the second semiconductor chip such that a second bump electrode on the second semiconductor chip overlies the position of a second through silicon via in the third semiconductor chip to form a chip stacked body, connecting the first and second bump electrodes of the chip stacked body to the first and the second through silicon vias by reflowing the bump material, placing the chip stacked body on the first substrate such that the first surface of the first semiconductor chip faces the second surface, and sealing the second surface and the first, second, and third semiconductor chips with a filling resin.
1. A semiconductor device manufacturing method comprising:
forming a chip stacked body by stacking a second semiconductor chip on a first surface of a first semiconductor chip, a first bump electrode being between and contacting the first surface and the second semiconductor chip, and stacking a third semiconductor chip on the second semiconductor chip, a second bump electrode being between and contacting the second semiconductor chip and the third semiconductor chip;
stacking a fourth semiconductor chip on the chip stacked body;
connecting the first bump electrode to a first through silicon via of the second semiconductor chip by reflowing the first bump electrode;
connecting the second bump electrode to the first through silicon via of the second semiconductor chip and a second through silicon via of the third semiconductor chip by reflowing the second bump electrode;
connecting the chip stacked body to a first substrate by using a first adhesive such that the first surface of the first semiconductor chip faces a second surface of the first substrate;
connecting the chip stacked body to a second substrate by using a second adhesive and a third bump electrode, the second adhesive being provided between the chip stacked body and the second substrate, in a direction perpendicular to the second substrate, and between the third bump electrode and the fourth semiconductor chip in a direction parallel to the second substrate, such that a gap is left between the chip stacked body and the second substrate and between the fourth semiconductor chip and the second substrate; and
after connecting the chip stacked body to the second substrate by using the second adhesive and the third bump electrode, sealing the second surface, the first, second, third, and fourth semiconductor chips with a resin that also enters the gap left between the chip stacked body and the second substrate and between the fourth semiconductor chip and the second substrate.
2. The method of claim 1 , further comprising:
attaching a tape material to a surface of the first semiconductor chip, the surface being opposite to the first surface.
3. The method of claim 2 , further comprising:
after forming the chip stacked body, peeling the tape material off the chip stacked body.
4. The method of claim 1 , wherein
reflowing of the first and second bump electrodes is performed in a reduction atmosphere.
5. The method of claim 1 , wherein
sealing the second surface, the first, second, and third semiconductor chips with the resin is performed by transfer molding.
6. The method of claim 1 , wherein
the first and second bump electrodes each comprise either one of metal bumps including any of Au, Ni, Cu, Sn, Bi, Zn, or In, or metal pads including any of Au, Ni, Cu, Al, or Pd.
7. The method of claim 1 , wherein
an adhesive resin is provided between the first, second, and third semiconductor chips.
8. A method of manufacturing a semiconductor device, comprising:
providing a stacked body comprising a plurality of semiconductor chips electrically interconnected together, the semiconductor chips being at least partially spaced from one another in a chip stacking direction of the stacked body;
stacking a chip on a first surface of the stacked body;
connecting the first surface of the stacked body to a wiring substrate by using a first adhesive and a bump electrode, the first adhesive being provided between the stacked body and the wiring substrate, in a direction perpendicular to the wiring substrate, and between the bump electrode and the chip, in the a direction parallel to the wiring substrate, a gap being left between the stacked body and the wiring substrate, and between the chip and the wiring substrate; and
after connecting the first surface of the stacked body to the wiring substrate using the first adhesive and the bump electrode, performing a sealing resin molding to form a resin body with a sealing resin over the stacked body, the sealing resin entering, during the sealing resin molding, between the plurality of semiconductor chips and the gap that is between the stacked body and the wiring substrate and between the chip and the wiring substrate.
9. The method according to claim 8 , further comprising:
singulating a device comprising the stacked body and a portion of the wiring substrate.
10. The method according to claim 8 , wherein the first surface of the stacked body is also connected to the wiring substrate with solder bumps.
11. The method according to claim 8 , wherein a support substrate is not connected to a second surface of the stacked body when the connecting of the first surface of the stacked body to the wiring substrate is performed.
12. The method according to claim 8 , wherein a support substrate is connected to a second surface of the stacked body using a second adhesive prior to the connecting of the first surface of the stacked body to the wiring substrate is performed.
13. The method of claim 8 , wherein the chip stacked on the stacked body is a logic chip and the semiconductor chips of the stacked body are memory chips.