Semiconductor backmetal (BM) and over pad metallization (OPM) structures and related methods
A method of forming semiconductor devices includes providing a wafer having a first side and second side, electrically conductive pads at the second side, and an electrically insulative layer at the second side with openings to the pads. The first side of the wafer is background to a desired thickness and an electrically conductive layer is deposited thereon. Nickel layers are simultaneously electrolessly deposited over the electrically conductive layer and over the pads, and diffusion barrier layers are then simultaneously deposited over the nickel layers. Another method of forming semiconductor devices includes depositing backmetal (BM) layers on the electrically conductive layer including a titanium layer, a nickel layer, and/or a silver layer. The BM layers are covered with a protective coating and a nickel layer is electrolessly deposited over the pads. A diffusion barrier layer is deposited over the nickel layer over the pads, and the protective coating is removed.
1. A semiconductor device, comprising:
a semiconductor layer having a first side and a second side opposite the first side;
one or more electrically conductive pads coupled at the second side;
one or more electrically insulative layers coupled at the second side and having one or more openings providing access to the one or more electrically conductive pads;
an electrically conductive layer coupled on the first side of the semiconductor layer;
one or more backmetal (BM) layers coupled on the electrically conductive layer;
one or more over-pad metallization (OPM) layers coupled over the one or more electrically conductive pads, the one or more OPM layers comprising a nickel layer, and;
a diffusion barrier layer coupled over the one or more OPM layers;
wherein the semiconductor device comprises one of an insulated gate bipolar transistor (IGBT) or a diode;
wherein a perimeter of each of the one or more OPM layers is entirely within a perimeter of each of the one or more electrically conductive pads; and
wherein a largest planar surface of the electrically conductive layer and a side surface of the electrically conductive layer substantially perpendicular to the largest planar surface of the electrically conductive layer are both directly coupled to the semiconductor layer.
2. The device of claim 1 , wherein the one or more BM layers comprises a nickel layer.
3. The device of claim 1 , wherein the one or more BM layers comprises a titanium layer and a silver layer.
4. The device of claim 1 , wherein the diffusion barrier layer comprises one of electrolessly deposited gold, electrolessly deposited silver, or an organic solderability preservative (OSP).
5. The device of claim 1 , wherein the electrically conductive layer comprises evaporated aluminum.
6. A semiconductor device, comprising:
a semiconductor layer having a first side and a second side opposite the first side;
one or more metallic pads coupled at the second side;
one or more electrically insulative layers coupled at the second side and having one or more openings providing access to the one or more metallic pads;
an electrically conductive layer coupled on the first side of the semiconductor layer;
a first nickel layer coupled on the electrically conductive layer;
a second nickel layer coupled on the one or more metallic pads;
a first diffusion barrier layer coupled over the first nickel layer; and
a second diffusion barrier layer coupled over the second nickel layer;
wherein a largest planar surface of the electrically conductive layer and a side surface of the electrically conductive layer substantially perpendicular to the largest planar surface of the electrically conductive layer are both directly coupled to the semiconductor layer.
7. The device of claim 6 , wherein the first diffusion barrier and the second diffusion barrier layer each comprises one of gold or silver.
8. The device of claim 6 , wherein the first diffusion barrier layer and the second diffusion barrier layer each comprises an organic solderability preservative (OSP).
9. The device of claim 6 , wherein the one or more electrically insulative layers comprises polyimide.
10. The device of claim 6 , wherein the metallic layer comprises AlCu.
11. The device of claim 6 , wherein the semiconductor device is one of an insulated gate bipolar transistor (IGBT) or a diode.
12. The device of claim 6 , wherein the first nickel layer is directly coupled to the semiconductor layer.
13. A semiconductor device comprising:
a semiconductor layer having a first side and a second side opposite the first side;
one or more electrically conductive pads coupled at the second side;
one or more electrically insulative layers coupled at the second side and having one or more openings providing access to the one or more electrically conductive pads;
an electrically conductive layer coupled on the first side of the semiconductor layer;
a titanium layer coupled on the electrically conductive layer;
a first nickel layer coupled on the titanium layer;
a silver layer coupled on the first nickel layer;
a second nickel layer coupled over the one or more electrically conductive pads; and
a diffusion barrier layer coupled over the second nickel layer;
wherein the semiconductor device comprises one of an insulated gate bipolar transistor (IGBT) or a diode;
wherein the second nickel layer and the diffusion barrier layer comprise an over-pad metallization (OPM) layer; and
wherein the OPM layer is located entirely within a perimeter of one of the one or more electrically conductive pads; and
wherein a largest planar surface of the electrically conductive layer and a side surface of the electrically conductive layer substantially perpendicular to the largest planar surface of the electrically conductive layer are both directly coupled to the semiconductor layer.
14. The device of claim 13 , wherein the diffusion barrier layer comprises one of gold, silver, or an organic solderability preservative (OSP).
15. The device of claim 13 , wherein the electrically conductive layer comprises evaporated aluminum.
16. The device of claim 13 , wherein the electrically conductive layer is partially encapsulated on at least two sides by the semiconductor layer.