Gas sensor including metal oxide layer and hydrogen detection method using gas sensor
View Patent ↗A gas sensor includes: a first conductive layer; a second conductive layer including a first region having a first thickness and a second region having a second thickness larger than the first thickness; a metal oxide layer disposed between the first conductive layer and the second conductive layer, the metal oxide layer including a bulk region and a local region surrounded by the bulk region, a degree of oxygen deficiency of the local region being higher than that of the bulk region; and an insulation layer covering the first conductive layer, the second region of the second conductive layer, and the metal oxide layer and not covering the first region of the second conductive layer.
1. A gas sensor comprising:
a first conductive layer;
a second conductive layer including a first region having a first thickness and a second region having a second thickness larger than the first thickness;
a metal oxide layer disposed between the first conductive layer and the second conductive layer, the metal oxide layer including a bulk region and a local region surrounded by the bulk region, a degree of oxygen deficiency of the local region being higher than that of the bulk region; and
an insulation layer covering the first conductive layer, the second region of the second conductive layer, and the metal oxide layer and not covering the first region of the second conductive layer,
wherein the first thickness and the second thickness are in a direction perpendicular to a stacking line between the second conductive layer and the metal oxide layer.
2. The gas sensor according to claim 1 ,
wherein in the second conductive layer, the second region surrounds the first region, and
the insulation layer has an opening which reaches the first region of the second conductive layer.
3. The gas sensor according to claim 1 ,
wherein the metal oxide layer has a flat surface in contact with the first region and the second region of the second conductive layer.
4. The gas sensor according to claim 1 ,
wherein the first region is allowed to be exposed to a gas.
5. The gas sensor according to claim 1 ,
wherein the local region is in contact with the first region of the second conductive layer.
6. The gas sensor according to claim 1 ,
wherein the second conductive layer is formed of a single material.
7. The gas sensor according to claim 1 ,
wherein a contour of the metal oxide layer is located inside a contour of the second conductive layer when viewed from a direction perpendicular to a principal surface of the second conductive layer.
8. The gas sensor according to claim 1 ,
wherein the second conductive layer includes a first layer having a flat-plate shape and a second layer partially disposed on the first layer,
the first region is a region of the second conductive layer at which the second layer is not disposed on the first layer, and
the second region is a region of the second conductive layer at which the second layer is disposed on the first layer.
9. The gas sensor according to claim 8 ,
wherein a contour of the first layer is located inside a contour of the second layer when viewed from a direction perpendicular to a principal surface of the second conductive layer.
10. The gas sensor according to claim 9 ,
wherein the second conductive layer further includes a third region in which the first layer is not disposed under the second layer,
the gas sensor further comprising a plug connected to the third region of the second conductive layer through the insulation layer.
11. The gas sensor according to claim 1 ,
wherein the metal oxide layer includes:
a first metal oxide layer being in contact with the first conductive layer, a degree of oxygen deficiency of the first metal oxide layer being higher than that of the bulk region; and
a second metal oxide layer being in contact with the second conductive layer, the second metal oxide layer including the bulk region, and
the local region is in contact with the second conductive layer and passes through the second metal oxide layer.
12. The gas sensor according to claim 11 ,
wherein the metal oxide layer further includes:
a third metal oxide layer surrounding the first metal oxide layer and the second metal oxide layer, a resistance of the third metal oxide layer being higher than that of the second metal oxide layer.
13. The gas sensor according to claim 1 ,
wherein the second conductive layer contains a material having a catalyst action which dissociates a hydrogen atom from a hydrogen molecule.
14. The gas sensor according to claim 13 ,
wherein the second conductive layer contains platinum or palladium.
15. The gas sensor according to claim 1 ,
wherein the local region generates heat by a voltage applied between the first conductive layer and the second conductive layer.
16. A fuel-cell vehicle comprising:
a tank storing a hydrogen gas;
a fuel cell; and
the gas sensor according to claim 1 .