Nonvolatile semiconductor memory device and method for manufacturing the same

1. A nonvolatile semiconductor memory device, comprising:

a first gate electrode layer;

a second gate electrode layer separated from the first gate electrode layer in a first direction;

an inter-layer insulating layer provided between the first gate electrode layer and the second gate electrode layer;

a channel layer separated in a second direction from the first gate electrode layer, the second gate electrode layer, and the inter-layer insulating layer, the second direction crossing the first direction;

a tunneling insulating layer provided between the first gate electrode layer and the channel layer and between the second gate electrode layer and the channel layer;

a first charge storage portion including a first semiconductor layer and being provided between the first gate electrode layer and the tunneling insulating layer;

a second charge storage portion including a second semiconductor layer and being provided between the second gate electrode layer and the tunneling insulating layer; and

a blocking insulating layer,

wherein

the first charge storage portion further includes a first charge storage layer provided between the first semiconductor layer and the tunneling insulating layer,

the second charge storage portion further includes a second charge storage layer provided between the second semiconductor layer and the tunneling insulating layer,

the blocking insulating layer is provided between the inter-layer insulating layer and the tunneling insulating layer, between the first gate electrode layer and the first semiconductor layer, between the inter-layer insulating layer and the first semiconductor layer, between the inter-layer insulating layer and the second semiconductor layer, between the second gate electrode layer and the second semiconductor layer, and between the first charge storage layer and the second charge storage layer,

the first charge storage layer and the second charge storage layer include silicon nitride, and

a region where a nitrogen concentration changes is provided between the first semiconductor layer and the first charge storage layer and between the second semiconductor layer and the second charge storage layer.

2. The device according to claim 1 , further comprising a semiconductor substrate,

the first gate electrode layer, the inter-layer insulating layer, the second gate electrode layer, the channel layer, the tunneling insulating layer, the first charge storage portion, the second charge storage portion, and the blocking insulating layer being provided above the semiconductor substrate, a major surface of the semiconductor substrate crossing the first direction.

3. The device according to claim 1 , wherein the blocking insulating layer includes a portion between the inter-layer insulating layer and the tunneling insulating layer, a portion between the first gate electrode layer and the first charge storage portion, a portion between the inter-layer insulating layer and the first charge storage portion, a portion between the inter-layer insulating layer and the second charge storage portion, and a portion between the second gate electrode layer and the second charge storage portion, the portions of the blocking insulating layer being provided as one body.

4. The device according to claim 1 , wherein the blocking insulating layer includes a first blocking film and a second blocking film.

5. The device according to claim 4 , wherein

the first blocking film is provided between the first gate electrode layer and the first charge storage portion, between the inter-layer insulating layer and the first charge storage portion, between the inter-layer insulating layer and the second charge storage portion, and between the second gate electrode layer and the second charge storage portion, and

the second blocking film is provided between the first blocking film and the first charge storage portion and between the first blocking film and the second charge storage portion.

6. The device according to claim 4 , wherein

the first blocking film includes at least one selected from the group consisting of aluminum oxide, hafnium oxide, lanthanum oxide, and zirconia oxide, and

the second blocking film includes silicon oxide.

7. The device according to claim 1 , wherein a portion of the blocking insulating layer is arranged in the first direction with at least a portion of the first charge storage portion.

8. The device according to claim 1 , wherein the first semiconductor layer and the second semiconductor layer include silicide.

9. The device according to claim 8 , wherein the silicide includes at least one selected from the group consisting of nickel, cobalt, ruthenium, and titanium.

10. The device according to claim 1 , wherein the first semiconductor layer and the second semiconductor layer include boron.

11. A method for manufacturing a nonvolatile semiconductor memory device, comprising:

forming an inter-layer insulating layer on a first film, and forming a second film on the inter-layer insulating layer;

exposing a portion of an upper surface of the inter-layer insulating layer and a portion of a lower surface of the inter-layer insulating layer by causing a first side surface of the first film and a second side surface of the second film to recede;

forming a blocking insulating layer on the first side surface caused to recede, on the second side surface caused to recede, on the portion of the upper surface, on the portion of the lower surface, and on a side surface of the inter-layer insulating layer;

forming a semiconductor film to cover the blocking insulating layer, the semiconductor film including a first portion, a second portion, and a third portion, the first portion overlapping the first film in a second direction, the second portion overlapping the second film in the second direction, the third portion overlapping the inter-layer insulating layer in the second direction, the second direction crossing a direction from the first film toward the second film;

removing the third portion for exposing a portion of the blocking insulating layer;

nitriding a portion of the first portion and a portion of the second portion for forming a first charge storage layer from the portion of the first portion and forming a second charge storage layer from the portion of the second portion;

forming a tunneling insulating layer on the portion of the first portion being nitrided, on the portion of the second portion being nitrided, and on the portion of the blocking insulating layer being exposed; and

forming a channel layer on a portion of the tunneling insulating layer.

12. The method according to claim 11 , further comprising:

forming a hole piercing the first film, the inter-layer insulating layer, and the second film after the forming of the inter-layer insulating layer on the first film and the forming of the second film on the inter-layer insulating layer and prior to the exposing of the portion of the upper surface of the inter-layer insulating layer and the portion of the lower surface of the inter-layer insulating layer,

the exposing of the portion of the upper surface of the inter-layer insulating layer and the portion of the lower surface of the inter-layer insulating layer including etching the first film and the second film inside the memory hole.

13. The method according to claim 11 , further comprising:

forming a slit piercing the first film, the inter-layer insulating layer, and the second film;

removing the first film and the second film inside the slit; and

forming a first gate electrode layer in a space where the first film is removed, and forming a second gate electrode layer in a space where the second film is removed.

14. The method according to claim 11 , wherein

the forming of the blocking insulating layer includes:

forming a first blocking film; and

forming a second blocking film.

15. The method according to claim 14 , wherein the first blocking film is formed using a material including at least one selected from the group consisting of aluminum oxide, hafnium oxide, lanthanum oxide, and zirconia oxide, and the second blocking film is formed using a material including silicon oxide.

16. The method according to claim 11 , further comprising forming a metal layer to cover a portion of the first portion and a portion of the second portion, and removing the metal layer, the forming and removing of the metal layer being performed after the exposing of the portion of the blocking insulating layer and prior to the forming of the first charge storage layer from the portion of the first portion and the forming of the second charge storage layer from the portion of the second portion.

17. The method according to claim 16 , wherein the metal layer is formed using a material including at least one selected from the group consisting of nickel, cobalt, ruthenium, and titanium.