High voltage semiconductor device
A high voltage semiconductor device includes a gate electrode structure disposed on a substrate, a source region disposed in the substrate to be adjacent to one side of the gate electrode structure, a first drift region disposed in the substrate to be adjacent to another side of the gate electrode structure, a drain region electrically connected with the first drift region, and a device isolation region disposed on one side of the drain region. Particularly, the first drift region is spaced apart from the device isolation region.
1. A high voltage semiconductor device comprising:
a gate electrode structure disposed on a substrate;
a source region disposed in the substrate adjacent to a first portion of the gate electrode structure;
a first drift region disposed in the substrate adjacent to a second portion of the gate electrode structure;
a drain region electrically connected with the first drift region;
a device isolation region disposed on one side of the drain region; and
a second drift region disposed between the first drift region and the drain region,
wherein the first drift region is spaced apart from the device isolation region, and the drain region is electrically connected with the first drift region by the second drift region.
2. The high voltage semiconductor device of claim 1 , wherein the drain region is spaced apart from the gate electrode structure.
3. The high voltage semiconductor device of claim 1 , wherein the second drift region has an impurity concentration higher than that of the first drift region; and
the drain region has an impurity concentration higher than that of the second drift region.
4. The high voltage semiconductor device of claim 1 , wherein the drain region is disposed in the second drift region.
5. The high voltage semiconductor device of claim 1 , wherein the first drift region is formed deeper than the second drift region.
6. The high voltage semiconductor device of claim 1 , wherein the first drift region, the second drift region and the drain region are electrically connected in series.
7. The high voltage semiconductor device of claim 1 , wherein the second drift region is partially overlapped with the first drift region.
8. The high voltage semiconductor device of claim 1 , wherein the device isolation region is formed deeper than the first drift region.
9. The high voltage semiconductor device of claim 1 , wherein an edge portion of the gate electrode structure is disposed on a portion of the first drift region.
10. A high voltage semiconductor device comprising:
a gate electrode structure disposed on a substrate;
a source region disposed in the substrate to be adjacent to one side of the gate electrode structure;
a first drift region disposed in the substrate to be adjacent to another side of the gate electrode structure;
a drain region electrically connected with the first drift region, the drain region being spaced apart from the another side of the gate electrode structure;
a device isolation region disposed on one side of the drain region; and
an insulating region having an electrical resistance higher than that of the first drift region and disposed between the first drift region and the device isolation region.
11. The high voltage semiconductor device of claim 10 , further comprising a second drift region disposed between the first drift region and the drain region.
12. The high voltage semiconductor device of claim 11 , wherein the first drift region is formed deeper than the second drift region; and
the insulating region is disposed below the second drift region.
13. The high voltage semiconductor device of claim 11 , wherein the second drift region comprises a portion overlapped with a portion of the first drift region and a remaining portion.
14. The high voltage semiconductor device of claim 13 , wherein the remaining portion has an impurity concentration higher than that of the first drift region; and
the overlapped portion has an impurity concentration higher than that of the remaining portion.
15. The high voltage semiconductor device of claim 10 , wherein the insulating region has a first conductivity type; and
the first drift region has a second conductivity type.
16. The high voltage semiconductor device of claim 15 , further comprising a well region having the first conductivity type,
wherein the insulating region comprises at least a portion of the well region.
17. A high voltage semiconductor device comprising:
a substrate having a well region;
a gate electrode structure disposed on the well region;
a source region disposed in the well region to be adjacent to one side of the gate electrode structure;
a first drift region disposed in the well region to be adjacent to another side of the gate electrode structure;
a drain region disposed to be spaced apart from the another side of the gate electrode structure;
a second drift region configured to connect the first drift region with the drain region; and
a device isolation region disposed on one side of the drain region,
wherein the first drift region is spaced apart from the device isolation region.
18. The high voltage semiconductor device of claim 17 , wherein the first drift region is formed deeper than the second drift region and shallower than the device isolation region.
19. The high voltage semiconductor device of claim 17 , wherein the second drift region comprises a portion overlapped with a portion of the first drift region and a remaining portion; and
the drain region is directly connected with the overlapped portion of the second drift region.