IP Library Granted Patent US 10,290,677
Granted Patent B2
US 10,290,677 · App. 15/457,290 · Granted May 14, 2019

Semiconductor device having hall elements formed in a semiconductor substrate and a magnetic body flux concentrator

Inventors: Matsuo Kishi (Chiba, JP); Miei Takahama (nee Sato) (Chiba, JP); Hiroshi Takahashi (Chiba, JP); Mika Ebihara (Chiba, JP); Takaaki Hioka (Chiba, JP)
Assignee: ABLIC Inc.
H01L27/22G01R33/07H01L43/04H01L43/06H01L43/14
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Quick Facts
Patent No.
US 10,290,677
App. No.
15/457,290
Granted
May 14, 2019
Kind
B2
Abstract

A semiconductor device includes a semiconductor substrate having a plurality of Hall elements formed therein, and a magnetic body formed on the semiconductor substrate and having a magnetic flux converging function. The contour in vertical cross-section of the magnetic body on the semiconductor substrate has an outer circumferential portion. At least a part of the outer circumferential portion has a portion having an approximate quadrant shape, and a portion contiguous to the approximate quadrant portion and substantially parallel to the semiconductor substrate.

Claims (12)

1. A semiconductor device, comprising:

a semiconductor substrate having a plurality of Hall elements formed therein; and

a magnetic body formed on the semiconductor substrate with a protective layer interposed between the magnetic body and the semiconductor substrate, the magnetic body having a magnetic flux converging function, and the magnetic body having a contour having an outer circumferential portion in vertical cross-section,

at least a part of the outer circumferential portion comprising a curve-shaped portion and a portion continuous from the curve-shaped portion and substantially parallel to the semiconductor substrate, and

a gap being formed between the substantially parallel portion and the protective layer.

2. A semiconductor device according to claim 1 , wherein the curve-shaped portion has an approximate quadrant shape.

3. A semiconductor device according to claim 2 , wherein the approximate quadrant shape in vertical cross-section of the magnetic body has one terminal portion at which a tangential direction is substantially perpendicular to the semiconductor substrate.

4. A semiconductor device according to claim 2 ,

wherein the semiconductor device has a portion parallel to the semiconductor substrate as a portion continuous from one terminal portion of the approximate quadrant shape, which is apart of the outer circumferential portion of the magnetic body in vertical cross-section, and

wherein the parallel portion comprises a portion that at least partially covers a region of the plurality of Hall elements.

5. A semiconductor device according to claim 1 , further comprising a base layer configured to connect the semiconductor substrate and the magnetic body to each other,

wherein the base layer is kept from covering a region of the plurality of Hall elements.

Assignments (2)
CHANGE OF NAME Recorded Mar 12, 2018
From: SII SEMICONDUCTOR CORPORATION
To: ABLIC INC.
Reel/Frame 045567/0927 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 13, 2017
From: KISHI, MATSUO; TAKAHAMA (NEE SATO), MIEI; TAKAHASHI, HIROSHI; EBIHARA, MIKA; HIOKA, TAKAAKI
To: SII SEMICONDUCTOR CORPORATION
Reel/Frame 041562/0137 →
Priority Claims (1)
JP 2016-051494 · Mar 15, 2016 · national
Continuity (1)
Related Publication 20170271400A1 · Sep 21, 2017
Cited By (1)
US 12,416,691