Magnetic sensor and method of manufacturing the same
The magnetic sensor includes a semiconductor substrate having Hall elements on a front surface of the semiconductor substrate, a conductive layer formed on a back surface of the semiconductor substrate, and a magnetic flux converging plate formed on the conductive layer. The magnetic flux converging plate is formed on the back surface of the semiconductor substrate through formation of the base conductive layer on the back surface of the semiconductor substrate, formation of a resist on the base conductive layer having an opening for forming the magnetic flux converging plate, formation of the magnetic flux converging plate in the opening of the resist by electroplating, removal of the resist, and removal of a part of the base conductive layer by etching with the magnetic flux converging plate as a mask.
1. A magnetic sensor, comprising:
a semiconductor substrate including Hall elements in the semiconductor substrate, the Hall elements having an exposed surface at a front surface of the semiconductor substrate;
a conductive layer on a back surface of the semiconductor substrate; and
a magnetic flux converging plate on the conductive layer adjacent to the back surface of the semiconductor substrate; and
a protective film contacting the front surface of the semiconductor substrate, wherein the exposed surface of the Hall elements contact the protective film and the magnetic flux converging plate is at an opposite side of the substrate from the protective film.
2. A magnetic sensor according to claim 1 , wherein the semiconductor substrate has a thickness of from 100 μm to 400 μm.
3. A magnetic sensor according to claim 1 , wherein the magnetic flux converging plate has a thickness of from 20 μm to 50 μm.
4. A method of manufacturing a magnetic sensor, the method comprising:
forming Hall elements in a semiconductor substrate, the Hall elements having an exposed surface at a front surface of the semiconductor substrate;
forming a protective film contacting the front surface of the semiconductor substrate and contacting the exposed surface of the Hall elements;
forming a base conductive layer on a back surface of the semiconductor substrate;
forming, on the base conductive layer, a resist having an opening for forming a magnetic flux converging plate;
forming a magnetic flux converging plate in the opening by performing electroplating under a state in which the resist is formed such that the magnetic flux converging plate is arranged adjacent to the back surface of the semiconductor substrate and at an opposite side to the protective film;
removing the resist; and
removing a part of the base conductive layer by etching with the magnetic flux converging plate as a mask.
5. A method of manufacturing a magnetic sensor according to claim 4 , further comprising grinding the back surface of the semiconductor substrate so that the semiconductor substrate has a thickness of from 100 μm to 400 μm.
6. A method of manufacturing a magnetic sensor according to claim 4 , wherein the magnetic flux converging plate has a thickness of from 20 μm to 50 μm.