Display device having multiple protective films
According to one embodiment, a display device includes a pixel area including pixels each including at least one thin film transistor includes a semiconductor layer and a gate electrode, a first terminal area including a first wiring line disposed thereon connected to the at least one thin film transistor, a first protective film provided on the semiconductor layer, the gate electrode and the first wiring line, a first insulating film provided on the first protective film, a second protective film provided on the first insulating film, a second insulating film provided on the second protective film, a first opening formed in the first terminal area, and partially exposing the first wiring line, and a second opening formed to correspond to the first opening.
1. A display device comprising:
a pixel area provided above an insulating substrate, and including pixels each including at least one thin film transistor comprising a semiconductor layer including a drain/source region separated by channel region and a gate electrode formed on the semiconductor layer prepared via a gate insulating film;
a first terminal area provided above the insulating substrate and including a first wiring line disposed thereon connected to the at least one thin film transistor;
a first protective film provided on the semiconductor layer, the gate electrode and the first wiring line, wherein the first protective film is configured as an insulating film containing a metal;
a first interlayer insulating film provided on the first protective film;
a second protective film provided on the first interlayer insulating film, as an insulating film containing a metal;
a second interlayer insulating film provided on the second protective film;
a first opening formed in the first protective film and the first interlayer insulating film in the first terminal area, and partially exposing the first wiring line; and
a second opening formed in the second protective film and the second interlayer insulating film to correspond to the first opening.
2. The display device of claim 1 , further comprising:
a peripheral area provided at least between the pixel portion and the first terminal area,
wherein
in the peripheral area, the first protective film and the first interlayer insulating film comprises a first trench, and at least the second protective film is provided also in the first trench, and
in the peripheral area, the second protective film and the second interlayer insulating film comprise a second trench on an opposite side of the pixel portion with respect to the first trench.
3. The display device of claim 2 , further comprising:
a first metallic film provided in at least one of the first trench and the first opening, and between the second protective film and at least the first interlayer insulating film, and in contact with the first wiring line.
4. The display device of claim 1 , wherein
the second protective film is thicker than the first protective film.
5. The display device of claim 1 , wherein
the first and second protective films are formed of aluminum oxide.
6. The display device of claim 1 , wherein
the first and second interlayer insulating films are each formed of an organic material.
7. A display device comprising:
a pixel area provided above an insulating substrate, and including pixels each including at least one thin film transistor comprising a semiconductor layer including a drain/source region separated by channel region and a gate electrode formed on the semiconductor layer prepared via a gate insulating film;
a second terminal area provided above the insulating substrate;
a first protective film provided on the semiconductor layer, the gate electrode and the insulating substrate, as an insulating film containing a metal;
a first interlayer insulating film provided on the first protective film;
a second wiring line provided on the first interlayer insulating film and connected to the at least one thin film transistor;
a second protective film provided on the second wiring line, as an insulating film containing a metal;
a second interlayer insulating film provided on the second protective film; and
a third opening formed in the second protective film and the second interlayer insulating film in the second terminal area, and partially exposing the second wiring line.
8. The display device of claim 7 , further comprising:
a peripheral area provided at least between the pixel area and the second terminal area,
wherein
in the peripheral area, the first protective film and the first interlayer insulating film comprises a third trench, and at least the second wiring line and the second protective film are provided also in the third trench, and
in the peripheral area, the second protective film and the second interlayer insulating film comprise a fourth trench on an opposite side of the pixel portion with respect to the third trench.
9. The display device of claim 8 , further comprising:
a second metallic film provided in at least one of the third opening and the fourth trench and in contact with the second wiring line.
10. The display device of claim 7 , wherein
the second protective film is thicker than the first protective film.
11. The display device of claim 7 , wherein
the first and second protective films are formed of aluminum oxide.
12. The display device of claim 7 , wherein
the first and second interlayer insulating films are each formed of an organic material.
13. A display device comprising:
a pixel area including a thin film transistor and provided above an insulating substrate;
a peripheral area adjacent to the pixel area, provided above the insulating substrate;
a first protective film located above the insulating substrate;
a first interlayer insulating film located above the first protective film and in contact with the first protective film;
a second protective film located above the first interlayer insulating film and in contact with the first interlayer insulating film; and
a second interlayer insulating film located above the second protective film and in contact with the second protective film,
the first protective film and the first interlayer insulating film comprising a first trench,
the second protective film being provided in the first trench,
the second protective film is thicker than the first protective film, and
the second protective film and the second interlayer insulating film comprising a second trench through to the first protective film and being separated from the pixel area further than the first trench.