Fabrication of optics wafer
View Patent ↗Fabricating an optics wafer includes providing a wafer comprising a core region composed of a glass-reinforced epoxy, the wafer further comprising a first resin layer on a top surface of the core region and a second resin layer on a bottom surface of the core region. The wafer further includes vertical transparent regions that's extend through the core region and the first and second resin layers. The wafer is thinned from its top surface and its bottom surface so that a resulting thickness is within a predetermined range without causing glass fibers of the core region to become exposed. Optical structures ate provided on one or more exposed surfaces of at least some of the transparent regions.
1. A method of fabricating an optics wafer, the method comprising:
providing a precursor wafer comprising a core region composed of a glass-reinforced epoxy that is substantially non-transparent for light of a specific spectral range, the precursor wafer further comprising a first resin layer over a top surface of the core region and a second resin layer over a bottom surface of the core region, wherein the first and second resin layers are substantially non-transparent for light of the specific spectral range;
forming openings in the precursor wafer, the openings extending from a top of the precursor wafer to a bottom of the precursor wafer;
substantially filling the openings with a material that, when hardened, is substantially transparent for light of the specific spectral range;
hardening the material in the openings to form transparent elements that are substantially transparent for light of the specific spectral range;
subsequently polishing a top surface of the precursor wafer and a bottom surface of the precursor wafer to obtain a wafer having a thickness within a predetermined range without causing glass fibers of the core region to become exposed; and
subsequently providing respective optical structures on one or more exposed surfaces of at least some of the transparent elements.
2. The method of claim 1 wherein the core region is composed of a composite material composed of woven fiberglass cloth with an epoxy resin binder that is flame resistant.
3. The method according to claim 1 wherein the core region is composed of a composite material composed of woven fiberglass cloth with an epoxy resin binder.
4. The method according to claim 1 wherein the core region is composed of a material produced by inserting continuous glass woven fabric impregnated with an epoxy resin binder.
5. The method according to claim 1 wherein the first and second resin layers are not glass-reinforced.
6. The method according to claim 1 wherein the first and second resin layers are composed of a glass-free black epoxy.
7. The method according to claim 1 wherein, following the polishing, an overall thickness of the wafer is within +5-50 μm of a predetermined thickness across the wafer.
8. The method according to claim 1 wherein, following the polishing, variations in overall thickness of the wafer are no more than 5% across the wafer.
9. The method of claim 1 wherein the specific spectral range includes the infrared portion of the electromagnetic spectrum.
10. The method of claim 1 wherein the specific spectral range includes the near-infrared portion of the electromagnetic spectrum.
11. The method according to claim 1 wherein, following the polishing, a remaining thickness of each of the first and second resin layers is in the range of 10-50% of respective initial thicknesses of the first and second resin layers.
12. The method according to claim 1 wherein the optical structures on the transparent elements include lenses.
13. The method according to claim 1 including using a replication process to provide the optical structures.
14. The method according to claim 1 wherein the optical structures are formed on exposed surfaces of the transparent elements at opposite sides of the wafer.