MULTILAYER THIN FILM DEVICE ENCAPSULATION USING SOFT AND PLIABLE LAYER FIRST
A thin film device. The thin film device may include: an active device region, the active device region comprising a diffusant; and a thin film encapsulant disposed adjacent to the active device region and encapsulating at least a portion of the active device region, the thin film encapsulant comprising: a first layer, the first layer disposed immediately adjacent the active device region and comprising a soft and pliable material; and a second layer disposed on the first layer, the second layer comprising a rigid dielectric material or rigid metal material.
1 . A thin film battery, comprising:
a selective expansion region; and
a polymer layer disposed adjacent to the active device region and encapsulating the selective expansion region, the polymer layer comprising a plurality of polymer sub-layers, wherein a first polymer sub-layer of the plurality of polymer sub-layers comprises a soft and pliable layer having a first hardness, and wherein a second polymer sub-layer of the plurality of polymer sub-layers has a second hardness, the second hardness being greater than the first hardness.
2 . The thin film battery of claim 1 , wherein the polymer layer comprises a three-layer polymer layer stack comprising:
a first outer polymer sub-layer, the first outer polymer sub-layer being disposed on the selective expansion region, wherein the first outer polymer sub-layer comprises the second hardness;
an inner polymer sub-layer, the inner polymer sub-layer being disposed on the first outer polymer sub-layer and comprising the first hardness and exhibiting soft and pliable properties; and
a second outer polymer sub-layer, the second outer polymer sub-layer being disposed on the inner polymer sub-layer, the second outer polymer sub-layer being harder than the inner polymer sub-layer.
3 . The thin film battery of claim 1 , wherein the first polymer sub-layer comprises one of: silicone, Parylene-C, and KMPR.
4 . The thin film battery of claim 3 , wherein the second polymer sub-layer comprises one of: Parylene-C, KMPR, and polyimide.
5 . The thin film battery of claim 2 , wherein the inner polymer sub-layer comprises one of:
silicone, Parylene-C, and KMPR, and wherein the first outer polymer sub-layer and the second outer polymer sub-layer comprise one of: Parylene-C, KMPR, and polyimide.
6 . The thin film battery of claim 1 , wherein the selective expansion region comprises an anode, the thin film device further comprising:
a lithium-containing cathode; and
a solid state electrolyte, the solid state electrolyte being disposed between the lithium-containing cathode and the anode.
7 . The thin film battery of claim 1 , wherein the polymer layer is a first polymer layer, the thin film battery further comprising:
a first rigid layer, disposed on the first polymer layer;
a second polymer layer, disposed on the first rigid layer; and
a second rigid layer, disposed on the second polymer layer.
8 . The thin film battery of claim 7 , wherein the first rigid layer comprises a rigid metal layer or a rigid dielectric layer, and wherein the second rigid layer comprises a rigid metal layer or a rigid dielectric layer.
9 . The thin film battery of claim 7 , wherein a thickness of the first polymer layer is between 10 μm and 50 μm.
10 . The thin film battery of claim 9 , wherein a thickness of the first rigid layer is 5 μm or less, and wherein a thickness of the second rigid layer is 5 μm or less.
11 . The thin film battery of claim 9 , wherein a thickness of the second polymer layer is 20 μm or less.
12 . The thin film battery of claim 2 , wherein the polymer layer is a first polymer layer, the thin film battery further comprising:
a first rigid layer, disposed on the first polymer layer;
a second polymer layer, disposed on the first rigid layer; and
a second rigid layer, disposed on the second polymer layer.
13 . The thin film battery of claim 12 , wherein the first rigid layer comprises a rigid metal layer or a rigid dielectric layer, and wherein the second rigid layer comprises a rigid metal layer or a rigid dielectric layer.
14 . The thin film battery of claim 12 , wherein a thickness of the first polymer layer is between 10 μm and 50 μm.
15 . The thin film battery of claim 14 , wherein a thickness of the first rigid layer is 5 μm or less, and wherein a thickness of the second rigid layer is 5 μm or less.
16 . The thin film battery of claim 14 , wherein a thickness of the second polymer layer is 20 μm or less.
17 . A thin film battery, comprising:
a lithium-containing cathode;
a solid state electrolyte, disposed on the cathode;
an anode disposed on the solid state electrolyte; and
a thin film encapsulant disposed adjacent to the anode, the thin film encapsulant comprising:
a first polymer sub-layer, disposed on the anode, the first polymer sub-layer having a first hardness;
a second polymer sub-layer, disposed on the first polymer sub-layer, the second polymer sub-layer having a second hardness, the second hardness being different from the first hardness;
a first rigid layer, disposed on the first polymer layer;
a second polymer layer disposed on the first rigid layer; and
a second rigid layer disposed on the second polymer layer.
18 . The thin film battery of claim 17 , wherein the polymer layer comprises a three-layer polymer layer stack comprising the first polymer layer:
a first outer polymer sub-layer, the first outer polymer sub-layer being disposed on the anode, wherein the first outer polymer sub-layer comprises the second hardness;
an inner polymer sub-layer, the inner polymer sub-layer being disposed on the first outer polymer sub-layer and comprising the first hardness; and
a second outer polymer sub-layer, the second outer polymer sub-layer being disposed on the inner polymer sub-layer, the second outer polymer sub-layer being harder than the inner polymer sub-layer.