Gas-detecting apparatus including gas sensor and method of detecting hydrogen using gas sensor
A gas-detecting apparatus includes a measurement circuit including a gas sensor and a measurement instrument and a decision circuit. Detection cells, included in the gas sensor, each include a first electrode, a second electrode having a surface exposed from an insulation layer, and a metal oxide layer disposed between the first electrode and the second electrode. The resistance values of the detection cells are each allowed to decrease by a contact of gas containing hydrogen atoms with the second electrode. The measurement instrument monitors the resistance values of the detection cells. The decision circuit decides whether the gas is detected or not based on at least one change of the resistance values.
1. A gas-detecting apparatus comprising:
a measurement circuit including
a gas sensor that includes an insulation film and detection cells covered with the insulation an insulation film, and
at least one measurement instrument that monitors resistance values of the detection cells; and
a decision circuit that decides whether gas containing hydrogen atoms is detected or not based on at least one change in the resistance values, wherein:
each of the detection cells includes:
a first electrode;
a second electrode having a surface exposed from the insulation film; and
a metal oxide layer disposed between the first electrode and the second electrode, the metal oxide layer including a bulk area and a local area penetrating into the bulk area, a side face of the local area being surrounded by the bulk area,
a degree of oxygen deficiency of the local area is higher than that of the bulk area,
an upper surface of the local area and an upper surface of the bulk area are in direct contact with a bottom surface of the second electrode,
a bottom of the local area is away from an upper surface of the first electrode, and
the resistance values of the detection cells are each allowed to decrease by a contact of the gas with the second electrode.
2. The gas-detecting apparatus according to claim 1 , wherein
the detection cells have the same size and the same structure.
3. The gas-detecting apparatus according to claim 1 , wherein
the detection cells are N detection cells, where N is an integer of two or more; and
the decision circuit decides that the gas is detected when M of the resistance values of the N detection cells are decreased, where M is predetermined to be an integer of one or more and less than N.
4. The gas-detecting apparatus according to claim 3 , wherein
the M is predetermined to be an integer of two or more.
5. The gas-detecting apparatus according to claim 1 , wherein
the at least one measurement instrument are a plurality of measurement instruments that concurrently monitor respective resistance values of the detection cells.
6. The gas-detecting apparatus according to claim 5 , wherein
the plurality of measurement instruments are a plurality of current meters, each of which monitors a current value flowing in a corresponding one of the detection cells, the plurality of current meters being respectively connected in series to the detection cells.
7. The gas-detecting apparatus according to claim 6 , further comprising:
a power supply circuit that applies a voltage to the measurement circuit to allow current to flow in each of the detection cells.
8. The gas-detecting apparatus according to claim 1 , wherein
the at least one measurement instrument is a single measurement instrument that monitors a combined resistance value of the detection cells.
9. The gas-detecting apparatus according to claim 8 , wherein
the detection cells are connected in parallel to one another.
10. The gas-detecting apparatus according to claim 8 , wherein
the single measurement instrument is a single current meter that monitors a combined current value flowing in the detection cells.
11. The gas-detecting apparatus according to claim 10 , further comprising:
a power supply circuit that applies a voltage to the measurement circuit to allow current to flow in each of the detection cells.
12. The gas-detecting apparatus according to claim 1 , wherein
the exposed surface of the second electrode is allowed to come in contact with the gas.
13. The gas-detecting apparatus according to claim 1 , wherein
each of the detection cells reversibly transitions between a high resistive state and a low resistive state in response to a voltage applied between the first electrode and the second electrode, a resistance value in the high resistive state being higher than that in the low resistive state.
14. The gas-detecting apparatus according to claim 13 , further comprising:
a power supply circuit that, before the at least one measurement instrument monitors the resistance values of the detection cells, applies the voltage to the measurement circuit to set each of the detection cells to the high resistive state.
15. The gas-detecting apparatus according to claim 13 , further comprising:
a power supply circuit that, after the decision circuit decides that the gas is detected, applies the voltage to the measurement circuit to set each of the detection cells to the high resistive state.
16. A method of detecting gas with a gas sensor,
the gas sensor comprising:
an insulation film, and
detection cells covered with the insulation film, wherein
each of the detection cells includes:
a first electrode;
a second electrode having a surface exposed from the insulation film; and
a metal oxide layer disposed between the first electrode and the second electrode, the mental oxide layer including a bulk area and a local area penetrating into the bulk area, a side face of the local area being surrounded by the bulk area, a degree of oxygen deficiency of the local area being higher than that of the bulk area, an upper surface of the local area and an upper surface of the bulk area being in direct contact with a bottom surface of the second electrode, a bottom of the local area being away from an upper surface of the first electrode, and
the method of detecting gas comprising:
monitoring resistance values of the detection cells; and
deciding whether gas containing hydrogen atoms is detected or not based on at least one change in the resistance values.
17. The method of detecting gas according to claim 16 , wherein
the detection cells are N detection cells, where N is an integer of two or more; and
in the deciding, detection of the gas is decided when M of the resistance values of the N detection cells are decreased, where M is predetermined to be an integer of one or more and less than N.
18. The method of detecting gas according to claim 16 , wherein
in the monitoring, the resistance values of the detection cells are concurrently monitored.
19. The method of detecting gas according to claim 16 , wherein
in the monitoring, a combined resistance value of the detection cells is monitored.
20. A gas-detecting apparatus comprising:
a measurement circuit including
a gas sensor that includes an insulation film and detection cells covered with the insulation an insulation film, and
at least one measurement instrument that monitors resistance values of the detection cells; and
a decision circuit that decides whether gas containing hydrogen atoms is detected or not based on at least one change in the resistance values, wherein:
the detection cells each include
a first electrode,
a second electrode having a surface exposed from the insulation film, and
a first metal oxide layer, a bottom surface of the first metal oxide layer being in direct contact with an upper surface of the first electrode,
a second metal oxide layer, an upper surface layer of the second metal oxide layer being in direct contact with a bottom surface of the second electrode, and
a local area passing through the second metal oxide layer, an upper surface of the local area being in direct contact with the bottom surface of the second electrode, a bottom of the local area being away from the upper surface of the first electrode;
a degree of oxygen deficiency of the first metal oxide layer is higher than that of the second metal oxide layer;
a degree of oxygen deficiency of the local area is higher than that of the second metal oxide layer; and
the resistance values of the detection cells are each allowed to decrease by a contact of the gas with the second electrode.